高性能偏振膜的研制

朱美萍; 孙建; 张伟丽; 赵元安; 刘晓凤; 赵娇玲; 易葵; 邵建达

doi:10.3788/OPE.20162412.2908

您当前的位置：

首页 >

文章列表页 >

高性能偏振膜的研制

高功率激光光学元器件 | 更新时间：2020-08-13

- 高性能偏振膜的研制
- Development of high performance polarizer coatings
- 光学精密工程 2016年24卷第12期页码：2908-2915
- 作者机构：
  
  中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
- 作者简介：
  
  朱美萍(1982-), 女, 博士, 硕士生导师, 主要从事高功率激光薄膜的研究工作。E-mail:bree@siom.ac.cn ZHU Mei-ping, E-mail:bree@siom.ac.cn
- 基金信息：
  
  国家自然科学基金资助项目(61505227)
- DOI：10.3788/OPE.20162412.2908
  中图分类号： O484.1;O436.3
- 收稿日期：2016-10-26，
  
  录用日期：2016-11-17，
  
  纸质出版日期：2016-12-25
- 稿件说明：
移动端阅览
朱美萍, 孙建, 张伟丽, 等. 高性能偏振膜的研制[J]. 光学精密工程, 2016,24(12):2908-2915.

Mei-ping ZHU, Jian SUN, Wei-li ZHANG, et al. Development of high performance polarizer coatings[J]. Optics and precision engineering, 2016, 24(12): 2908-2915.
朱美萍, 孙建, 张伟丽, 等. 高性能偏振膜的研制[J]. 光学精密工程, 2016,24(12):2908-2915. DOI： 10.3788/OPE.20162412.2908.

Mei-ping ZHU, Jian SUN, Wei-li ZHANG, et al. Development of high performance polarizer coatings[J]. Optics and precision engineering, 2016, 24(12): 2908-2915. DOI： 10.3788/OPE.20162412.2908.

摘要

综述了国内外科研人员在高性能偏振膜的研制方面开展的工作，主要涉及偏振膜光谱性能、抗激光损伤阈值和膜层应力控制等方面的研究。针对我国神光系列装置对偏振膜的性能要求，简述了中国科学院上海光学精密机械研究所采用电子束沉积技术在光谱性能、损伤阈值和面形精度三个方面开展的研究工作。给出了在薄膜设计、制备和后处理等方面进行的研究和取得的进展。结合上述研究成果，得到了低缺陷密度、低应力的高性能偏振膜。由本科研团队研制的布儒斯特角薄膜偏振器在在2012年和2013年SPIE激光损伤国际会议（SPIE Laser Damage）组织的全球性偏振膜激光损伤阈值水平竞赛中连续取得了p分量损伤阈值和平均损伤阈值最佳的结果。另外，通过解决应力诱导膜层龟裂的重大技术问题，在国内首先推出了大口径偏振片，该大口径偏振片满足透射率

98%，反射率

99%的光谱性能要求和17 J/cm

（9 ns）的通量运行要求，有力支撑了我国SGII-UP大型激光装置的稳定运行。

Abstract

The research and achievements of high performance polarizer coatings by many scholars around the world are reviewed

including the spectral properties

laser damage threshold and stress control. For the performance requirements of polarizer coatings in China Shenguang series facilities

it describes the investigation of spectral properties

laser damage threshold

and figure accuracy of the polarizer coatings based on electron beam depolarization by Shanghai Institute of Opitcs and Fine Mechanics of the Chinese Academy of Sciences (SIOM). Much work and achievements on design

preparation and past-treatment of the coating are given. On the basis of the research achievements

high performance thin films polarizer with low defect density and low stress have obtained. The Brewster angle thin film polarizer developed by our team has participated in the International Laser Damage Competition held on the SPIE 2012 Laser Damage

SPIE 2013 Laser Damage Symposium. The p-polarized LIDT (Laser Induced Damage Threshold) as well as the average of p-polarized and s-polarized LIDT achieves the best results. The stress-induced crazing of large aperture polarizer coating is also solved

by which the manufacturing of large aperture polarizer is implemented in China

showing the spectral properties of

98%

99% and the flux property of 17 J/cm

(9 ns).Now

the prepared large aperture polarizer has supported the stable operation of ShenguangII-UP laser facility.

关键词

Keywords

references

STOLZ C J. Brewster's angle thin film plate polarizer design study from an electric field perspective[C]. Optical Systems Design and Production , International Society for Optics and Photonics , 1999:347-353. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=991876

OLIVER J B, RIGATTI A L, HOWE J D, et al .. Thin-film polarizers for the OMEGA EP laser system[C]. Boulder Damage Symposium ⅩⅩⅩⅦ : Annual Symposium on Optical Materials for High Power Lasers , International Society for Optics and Photonics , 2005:599119-599119-8. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1333412

DEFORD J F, KOZLOWSKI M R. Modeling of electric-field enhancement at nodular defects in dielectric mirror coatings[C]. Optical Materials for High Power Lasers , International Society for Optics and Photonics , 1993:455-472. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1005390

GENIN F Y, STOLZ C J, REITTER T A, et al .. Effect of electric field distribution on the morphologies of laser-induced damage in hafnia-silica multilayer polarizers[C]. Laser-Induced Damage in Optical Materials :1996, International Society for Optics and Photonics , 1997:342-352. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1026976

SHEEHAN L M, KOZLOWSKI M R, RAINER F, et al .. Large-area conditioning of optics for high-power laser systems[C]. Laser-Induced Damage in Optical Materials :1993. International Society for Optics and Photonics , 1994:559-568. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=949411

BERCEGOL H. What is laser conditioning? A review focused on dielectric multilayers[J].SPIE, 1999, 3578:421-426.

WOLFE C R, KOZLOWSKI M R, CAMPBELL J H, et al.. Laser conditioning of optical thin films[J].SPIE, 1990:1-3.

CAMPBELL J H, HAWLEY-FEDDER R A, STOLZ C J, et al .. NIF optical materials and fabrication technologies:an overview[C]. Lasers and Applications in Science and Engineering , International Society for Optics and Photonics , 2004:84-101. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1322059

LAWSON J K, AIKENS D M, ENGLISH Jr R E, et al.. Surface figure and roughness tolerances for NIF optics and the interpretation of the gradient, PV wavefront, and RMS specifications[J].SPIE's International Symposium on Optical Science, Engineering, and Instrumentation. International Society for Optics and Photonics, 1999:510-517.

LAWSON J K, AIKENS D M, ENGLISH Jr R E, et al .. Power spectral density specifications for high-power laser systems[C]. Optical Instrumentation & Systems Design , International Society for Optics and Photonics , 1996:345-356. http://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=1019696

LAVASTRE E, NÉAUPORT J, DUCHESNE J, et al .. Polarizers coatings for the Laser MegaJoule prototype[C]. Optical Interference Coatings , Optical Society of America , 2004:TuF3. https://www.osapublishing.org/abstract.cfm?uri=OIC-2004-TuF3

ZHU M, YI K, ZHANG W, et al.. Preparation of high performance thin-film polarizers[J]. Chinese Optics Letters, 2010, 8(6):624-626.

ZHU M, YI K, FAN Z, et al.. Theoretical and experimental research on spectral performance and laser induced damage of Brewster's thin film polarizers[J]. Applied Surface Science, 2011, 257(15):6884-6888.

ZHANG D, SHAO J, ZHANG D, et al.. Employing oxygen-plasma posttreatment to improve the laser-induced damage threshold of ZrO 2 films prepared by the electron-beam evaporation method[J]. Optics Letters, 2004, 29(24):2870-2872.

ZHANG D, WANG C, FAN P, et al.. Influence of plasma treatment on laser-induced damage characters of HfO 2 thin films at 355 nm[J]. Optics Express, 2009, 17(10):8246-8252.

浏览量

541

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

基于权重分析的高功率激光系统参数优化设计

光纤形状传感技术综述

离子后处理对TiO2光学薄膜及损伤特性的影响

离子后处理对TiO₂光学薄膜及损伤特性的影响

高功率准连续微秒脉冲钠导星激光