氧碘化学激光器腔镜表面缺陷的观察与分析

王刚; 陈真; 李艳娜; 公发全

doi:10.3788/OPE.20162412.2948

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氧碘化学激光器腔镜表面缺陷的观察与分析

高功率激光光学元器件 | 更新时间：2020-08-13

- 氧碘化学激光器腔镜表面缺陷的观察与分析
- Observation and analysis of surface defects on cavity mirror of chemical oxygen-iodine laser
- 光学精密工程 2016年24卷第12期页码：2948-2955
- 作者机构：
  
  1.中国科学院大学, 北京 100049
  2.西北核技术研究所, 陕西西安 710024
  3.中国科学院大连化学物理研究所, 辽宁大连 116023
- 作者简介：
  
  王刚(1985-), 男, 山西闻喜人, 博士研究生, 工程师, 2007年于北京大学获得学士学位, 2007年于西北核技术研究所获得硕士学位, 现为中国科学院大学博士研究生, 主要从事激光技术及应用方面的研究。E-mail:linkwg@126.com WANG Gang, E-mail:linkwg@126.com
  [ "陈真(1988-), 男, 河北正定人, 硕士, 工程师, 2011年、2016年于河北工业大学分别获得学士、硕士学位, 主要从事激光技术及应用方面的研究。E-mail:776960091@qq.com" ]
- 基金信息：
  
  国防预研资金资助项目(201521001)
- DOI：10.3788/OPE.20162412.2948
  中图分类号： TN248.5;O484.4
- 收稿日期：2016-10-27，
  
  录用日期：2016-11-17，
  
  纸质出版日期：2016-12-25
- 稿件说明：
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王刚, 陈真, 李艳娜, 等. 氧碘化学激光器腔镜表面缺陷的观察与分析[J]. 光学精密工程, 2016,24(12):2948-2955.

Gang WANG, Zhen CHEN, Yan-na LI, et al. Observation and analysis of surface defects on cavity mirror of chemical oxygen-iodine laser[J]. Optics and precision engineering, 2016, 24(12): 2948-2955.
王刚, 陈真, 李艳娜, 等. 氧碘化学激光器腔镜表面缺陷的观察与分析[J]. 光学精密工程, 2016,24(12):2948-2955. DOI： 10.3788/OPE.20162412.2948.

Gang WANG, Zhen CHEN, Yan-na LI, et al. Observation and analysis of surface defects on cavity mirror of chemical oxygen-iodine laser[J]. Optics and precision engineering, 2016, 24(12): 2948-2955. DOI： 10.3788/OPE.20162412.2948.

摘要

为了明确氧碘化学激光器腔镜损伤的原因，对腔镜表面的缺陷进行了研究。利用扫描探针显微镜观察了激光器腔镜表面缺陷，分析了腔镜表面微观形貌，讨论了常见缺陷的形状及成因。然后，建立了简化的带污染物腔镜的模型。利用COMSOL Multiphysics软件对环形光束辐照腔镜进行了仿真计算。最后，给出了缺陷大小、功率密度和腔镜表面温度的关系，分析了吸附层对腔镜熔融损伤的影响。计算结果表明：腔镜表面污染物大小不变时，激光辐照的功率密度越大，温度增长越快，薄膜表面越容易出现熔融损伤；腔镜表面污染物半径达到2.3 mm时，腔镜薄膜即可出现熔融损伤。另外，吸附层吸收系数增加1%，腔镜最高温度增加约210 K。本文所得结论可为分析腔镜损伤原因和制定腔镜更换依据提供参考。

Abstract

To figure out the causes of cavity mirror defects in a Chemical Oxygen-iodine Laser (COIL)

the surface defects on the cavity mirror were studied. A Scanning Probe Microscopy (SPM) was used to observe the surface defects on the cavity mirror

and its micro topography was analyzed. The shapes of the surface defects and the reasons why the defects appeared were discussed. Then

a simplified model of cavity mirror with defects was established. The ring beam irradiating the cavity mirror was simulated by using COMSOL Multiphysics. The relationship between the defect size

power density and the surface temperature of the cavity mirror was given and the influence of an adsorption layer on the melting damage of the cavity mirror was analyzed. The calculated results show that when the defect area is a constant

the larger the laser radiation power is and the faster the temperature grows

the more the melting damage of film surface is. Moreover

the mirror film has the possibility of melting damage at the defect radius of 2.3 mm. The absorption coefficient of the absorption layer increases by 1%

then the maximum temperature of the mirror increases about 210 K. The conclusion provides a reference for the analysis of the causes of cavity mirror damage and the replacement of the cavity mirror in the COIL system.

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