激光聚焦线扫描法测量KDP晶体坯片的体缺陷

倪开灶; 刘世杰; 吴周令; 陈坚

doi:10.3788/OPE.20162412.3020

您当前的位置：

首页 >

文章列表页 >

激光聚焦线扫描法测量KDP晶体坯片的体缺陷

高功率激光光学元器件 | 更新时间：2020-08-13

- 激光聚焦线扫描法测量KDP晶体坯片的体缺陷
- Measurement of bulk defects for KDP crystal billet with focused line scanning
- 光学精密工程 2016年24卷第12期页码：3020-3026
- 作者机构：
  
  1.中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
  2.合肥知常光电科技有限公司, 安徽合肥 230000
- 作者简介：
  
  [ "倪开灶(1989-), 男, 江苏盐城人, 硕士, 实习研究员, 2015年于苏州大学获得硕士学位, 主要从事光学元件缺陷检测技术方面的研究。E-mail: nikaizao@siom.ac.cn" ]
  刘世杰(1979-), 男, 陕西汉中人, 博士, 副研究员, 2008年于中国科学院上海光学精密机械研究所获得博士学位, 主要从事精密光学检测技术、衍射光学和光学薄膜等方面的研究。E-mail:shijieliu@siom.ac.cn LIU Shi-jie, E-mail: shijieliu@siom.ac.cn
- 基金信息：
  
  国家自然科学基金青年科学基金资助项目(11602280)
- DOI：10.3788/OPE.20162412.3020
  中图分类号： O77;TN247
- 收稿日期：2016-10-18，
  
  录用日期：2016-11-20，
  
  纸质出版日期：2016-12-25
- 稿件说明：
移动端阅览
倪开灶, 刘世杰, 吴周令, 等. 激光聚焦线扫描法测量KDP晶体坯片的体缺陷[J]. 光学精密工程, 2016,24(12):3020-3026.

Kai-zao NI, Shi-jie LIU, Zhou-ling WU, et al. Measurement of bulk defects for KDP crystal billet with focused line scanning[J]. Optics and precision engineering, 2016, 24(12): 3020-3026.
倪开灶, 刘世杰, 吴周令, 等. 激光聚焦线扫描法测量KDP晶体坯片的体缺陷[J]. 光学精密工程, 2016,24(12):3020-3026. DOI： 10.3788/OPE.20162412.3020.

Kai-zao NI, Shi-jie LIU, Zhou-ling WU, et al. Measurement of bulk defects for KDP crystal billet with focused line scanning[J]. Optics and precision engineering, 2016, 24(12): 3020-3026. DOI： 10.3788/OPE.20162412.3020.

摘要

为了快速准确测量磷酸二氢钾（KDP）晶体坯片的体缺陷，提出了高速激光聚焦线扫描散射成像方法，并建立了相应的测量系统。研究了该系统的测量原理和图像采集、图像处理和体缺陷信息提取方法。基于激光散射技术，结合高速运动装置对晶体坯片内部进行三维扫描，用线阵CCD探测器接收气泡、包裹物等体缺陷产生的散射光。然后利用折射率匹配液消除粗糙表面带来的不利影响。最后结合数字图像处理技术，对采集的图像进行实时处理。通过去除背景后与设定阈值比较得到具有体缺陷特征的图像，再对其进行二值化处理，提取得到体缺陷的位置和尺寸信息。利用该检测装置对KDP晶体坯片体缺陷进行了测量，结果显示其检测分辨率优于40

m，能够为晶体坯片的精确切割和最大程度的利用提供依据，从而节省了大量成本。

Abstract

To detect the bulk defects in crystal billet of a KDP (potassium dihydrogen phosphate) crystal quickly and exactly

a laser focusing scanning scattering imaging method was proposed and a corresponding high speed line scanning measurement setup was constructed. The principle of detection

image acquisition

image processing and the extraction of bulk defects were investigated. Based on laser scattering technique

a focused line laser beam was used to scan all parts of the crystal billet with a high-speed movement device. The scattering light caused by bulk defects such as bubbles and inclusions was collected by a linear array CCD. The adverse effect caused by rough surface was eliminated with the index-matching fluid. Combined with digital image processing technique

the captured image was processed in real time. An averaged background was subtracted from the original image

then the image was compared with a threshold to judge the existence of bulk defects. The image with bulk defects was binarized to exact the positions and sizes of bulk defects. Finally

the setup was used to test the crystal billet of a KDP

results show that the sensitivity by proposed method is superior to 40

m. It verifies that this method provides supports for accurately cutting and making the most use of crystal billet and also saves a lot of costs.

关键词

Keywords

references

BAISDEN P A, ATHERTON L J, HAWLEY R A, et al.. Large optics for the national ignition facility[J]. Fusion Science and Technology, 2016, 69:295-351.

CAMPBELL J H, HAWLEY-FEDDER R A, STOLZ C J, et al.. NIF optical materials and fabrication technologies:An overview[J]. Proc. of SPIE, 2004, 5341:84-101.

YU J X, XIANG X, HE S B, et al.. Laser-induced damage initiation and growth of optical materials[J]. Advances in Condensed Matter Physics, 2014, 2014:1-10.

PAN Y X, ZHANG H C, LI M M, et al.. Effect of focus position of ns pulse laser on damage characteristics of K9 glass[J]. Proc. of SPIE, 2015, 9543:95430O-1-7.

LIAO Z M, RAYMOND B, GAYLORD J, et al.. Damage modeling and statistical analysis of optics damage performance in MJ-class laser[J]. Optics Express, 2014, 22(23):28845-28856.

CHANG J X, ZHAO Y A, HU G H, et al.. Characterization of inclusions in KD2PO4 crystals[J]. Chinese Optics Letters, 2015, 13(8):081601-1-4.

GB/T 7962.8--2010, 无色光学玻璃测试方法第8部分:气泡度[S].

GB/T 7962.8--2010, Test methods of colourless optical glass Part 8:Bubble[S]. (in Chinese)

WOLF J, RUNKEL M. System for detection of small inclusions in large optics[J]. Proc. of SPIE, 2008, 7132:71320W-1-8.

DEMOS S G, STAGGS M, RADOUSKY H B. Bulk defect formations in KH 2 PO 4 crystals investigated using fluorescence microscopy[J]. Physical Review B, 2003, 67:224102-1-6.

DEMOS S G, STAGGS M, YAN M, et al.. Microscopic fluorescence imaging of bulk defect clusters in KH2PO4 crystals[J]. Optics Letters, 1999, 24(4):268-270.

COX A J, DEWEERD A J, JENNIFER L. An experiment to measure Mie and Rayleigh total scattering cross sections[J]. Am. J. Phys., 2002, 70(6):620-625.

ZHANG B, KONG F Y, WU Z L, et al.. Investigation on optical surface defect extraction algorithm based on background correction and image segmentation method[J]. Proc. of SPIE, 2015, 9532:95322D-1-7.

浏览量

155

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

磷酸二氢钾晶体飞切过程中温度场的分布及其对切屑形貌的影响