基于波面面形的滤波计算

夏志林; 曾翔; 刘世杰; 周游; 张志刚

doi:10.3788/OPE.20162412.3033

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基于波面面形的滤波计算

高功率激光光学元器件 | 更新时间：2020-08-13

- 基于波面面形的滤波计算
- Filter calculation based on wavefront figures
- 光学精密工程 2016年24卷第12期页码：3033-3040
- 作者机构：
  
  1.武汉理工大学材料科学与工程学院, 湖北武汉 430070
  2.中国科学院上海光学精密机械研究所强激光材料重点实验室, 上海 201800
- 作者简介：
  
  [ "夏志林(1978-), 男, 江苏东台人, 研究员, 2007年于中国科学院上海光学精密机械研究所获得博士学位, 现为武汉理工大学材料科学与工程学院教师, 主要从事激光与物质相互作用方面的研究。E-Mail:xiazhilin@whut.edu.cn" ]
  刘世杰(1979-), 男, 陕西人, 副研究员, 硕士生导师, 2008年于中国科学院上海光学精密机械研究所获得博士学位, 主要从事光学检测技术的研究。E-mail:shijieliu@siom.ac.cn LIU Shi-jie, E-mail:shijieliu@siom.ac.cn
- 基金信息：
  
  国家自然科学基金青年科学基金资助项目(11602280)
- DOI：10.3788/OPE.20162412.3033
  中图分类号： TH744.3;TN247
- 收稿日期：2016-10-13，
  
  录用日期：2016-11-17，
  
  纸质出版日期：2016-12-25
- 稿件说明：
移动端阅览
夏志林, 曾翔, 刘世杰, 等. 基于波面面形的滤波计算[J]. 光学精密工程, 2016,24(12):3033-3040.

Zhi-lin XIA, Xiang ZENG, Shi-jie LIU, et al. Filter calculation based on wavefront figures[J]. Optics and precision engineering, 2016, 24(12): 3033-3040.
夏志林, 曾翔, 刘世杰, 等. 基于波面面形的滤波计算[J]. 光学精密工程, 2016,24(12):3033-3040. DOI： 10.3788/OPE.20162412.3033.

Zhi-lin XIA, Xiang ZENG, Shi-jie LIU, et al. Filter calculation based on wavefront figures[J]. Optics and precision engineering, 2016, 24(12): 3033-3040. DOI： 10.3788/OPE.20162412.3033.

摘要

为提高光学干涉测量的精度，研究了用来消除干涉条纹图噪声的滤波算法。讨论了不同波面和不同干涉仪噪声下不同滤波方法的滤波效果。考虑干涉仪噪声对条纹图的影响与检测中的不同波面情况，基于泽尼克多项式原理用matlab仿真法建立了离焦、像散、彗差、球差4种不同的干涉条纹图，计算了滤波后不同波面面形的PV值和GRMS值差别的大小。结果表明：同种噪声与滤波器情况下，在离焦、像散、彗差、球差4种面型中，滤波后球差波面的PV差值最大，高达0.11λ，与在乘性噪声下其它波面的最高PV值0.08λ相比，滤波效果较差；滤波后像散波面的PV差值最小，除乘性噪声中值滤波情况外，PV差值均在0.05λ以下，最低达0.01λ，滤波效果较好。此外，彗差波面滤波情况要略优于离焦波面。滤波器中，低通滤波稳定性高，PV差值局限于0.01λ~0.04λ，滤波效果相对好；而空域滤波后波面的PV差值最高达0.09λ，但噪声针对性更好。

Abstract

To improve the measuring accuracy of optical interferometry

the filtering methods to eliminate the noise in interference fringe patterns were researched. The results of different filtering methods were discussed in different wavefronts and different noises of the interferometer. By taking the effects of interferometric noise on fringe patterns and different wavefronts into account

four kinds of fringe patterns for defocus

astigmatism

coma

spherical aberration were established based on zernike polynomials by matlab simulation. The differences of PV and GRMS values before and after filtering were calculated for different wavefronts. The results on four kinds of wavefronts for defocus

astigmatism

coma

spherical aberration show that under the same kind of noise and filtering

the PV difference of the spherical aberration is largest

up to 0.11λ

which shows a poor filtering effect as compared with the 0.08λ from other wavefront differences under the multiplicative noise. Furthermore

the PV difference of the astigmatism wavefront is smallest

and it is down to 0.05λ excepting median filtering in the multiplicative noise

showing a better filter effect. Moreover

the result of coma wavefront filtering is slightly better than that of the defocus wavefront filtering. For the filter methods

low-pass filters offer high-stability and the differences of the PV is from 0.01λ to 0.04λ

showing a better filtering effect.

关键词

Keywords

references

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