大口径平面光学元件的磁流变加工

侯晶; 王洪祥; 陈贤华; 谢瑞清; 邓文辉; 唐才学

doi:10.3788/OPE.20162412.3054

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大口径平面光学元件的磁流变加工

高功率激光光学元器件 | 更新时间：2020-08-13

- 大口径平面光学元件的磁流变加工
- Magnetorheological processing for large aperture plane optical elements
- 光学精密工程 2016年24卷第12期页码：3054-3060
- 作者机构：
  
  1.哈尔滨工业大学, 黑龙江哈尔滨 150001
  2.中国工程物理研究院激光聚变研究中心, 四川绵阳 621900
- 作者简介：
  
  侯晶(1977-), 男, 吉林淘南人, 博士研究生, 高级工程师, 2008年于浙江大学获得硕士学位, 现为哈尔滨工业大学的博士研究生, 主要从事光学元件的先进制造技术磁流变加工技术的研究。E-mail:houjing1997@163.com HOU Jing, E-mail:houjing1997@163.com
- 基金信息：
  
  科学挑战专题资金资助项目(JCKY2016212A506-0502)
- DOI：10.3788/OPE.20162412.3054
  中图分类号： TN305.2;TH703
- 收稿日期：2016-10-08，
  
  录用日期：2016-11-17，
  
  纸质出版日期：2016-12-25
- 稿件说明：
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侯晶, 王洪祥, 陈贤华, 等. 大口径平面光学元件的磁流变加工[J]. 光学精密工程, 2016,24(12):3054-3060.

Jing HOU, Hong-xiang WANG, Xian-hua CHEN, et al. Magnetorheological processing for large aperture plane optical elements[J]. Optics and precision engineering, 2016, 24(12): 3054-3060.
侯晶, 王洪祥, 陈贤华, 等. 大口径平面光学元件的磁流变加工[J]. 光学精密工程, 2016,24(12):3054-3060. DOI： 10.3788/OPE.20162412.3054.

Jing HOU, Hong-xiang WANG, Xian-hua CHEN, et al. Magnetorheological processing for large aperture plane optical elements[J]. Optics and precision engineering, 2016, 24(12): 3054-3060. DOI： 10.3788/OPE.20162412.3054.

摘要

为了实现大口径平面光学元件的高精度加工，开展了磁流变加工技术的研究。介绍了磁流变加工原理及去除函数的数学模型。根据磁流变加工的特点，建立了元件整体加工的工艺流程，给出了元件加工的工艺要素。然后，开发了抛光斑的提取软件，并基于轨迹段划分的速度模式开发了工艺软件，分析了工艺软件的各项功能模块。最后，基于元件加工的工艺流程，对一件800 mm×400 mm的元件进行了加工实验。利用检测设备测得了元件的低、中、高频的加工指标，其低频反射波前PV值为34 nm，中频波前功率谱密度（PSD1）值为1.7 nm，高频粗糙度

值为0.27 nm。实验显示了较好的实验结果，验证了利用磁流变加工技术实现了大口径光学元件的高精度加工的可行性。本文还阐述了磁流变加工技术在高功率激光元件中应用的优点。

Abstract

The magnetorheological processing was investigated to improve the machining precision of large aperture optical elements. The principle of magnetorheological processing and the mathematical model of removal function were introduced. On the basis of the characteristics of the magneticrheological processing

the whole processing flow of optical elements was established and the technological factors of element process were given. Then

the software for extracting laser spots was developed

the technological software was also proposed based on the orbit segment divided speed mode and functions of modules in the technological software were analyzed. Finally

an element with a length of 800 mm and a width of 400 mm was machined experimentally. The results in low

middle and high frequencies by a test equipment show that the PV value of reflective wavefront in low frequency is 34 nm

the PSD1(power spectrum density) value is 1.7 nm

and the roughness

value is 0.27 nm

respectively. These experimental results verify that it is feasible to machine the high precise large aperture optical elements by magnetorheological processing. Moreover

this paper expounds the advantages of magnetorheological processing in high power laser component applications.

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Keywords

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