<italic style="font-style: italic">Ф</italic>420 mm高次非球面透镜的加工与检测

孟晓辉; 王永刚; 李文卿; 王聪; 张继友

doi:10.3788/OPE.20162412.3068

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Ф420 mm高次非球面透镜的加工与检测

高功率激光光学元器件 | 更新时间：2020-08-13

- Ф420 mm高次非球面透镜的加工与检测
- Fabricating and testing of Ф420 mm high-order aspheric lens
- 光学精密工程 2016年24卷第12期页码：3068-3075
- 作者机构：
  
  北京空间机电研究所, 北京 100094
- 作者简介：
  
  孟晓辉(1985-), 男, 河北灵寿人, 工程师, 2007年于河北大学获得学士学位, 2010年于中科院南京天文光学技术研究所获得硕士学位, 主要从事大口径非球面反射镜加工与检测技术的研究。E-mail:mrmeng_508@163.com MENG Xiao-hui, E-mail:mrmeng_508@163.com
  [ "王永刚(1982-), 男, 江苏盐城人, 高级工程师, 2010年于中科院长春光机所获得博士学位, 主要从事大口径空间反射镜超精密制造及高精度测试技术的研究。E-mail:vangernh@126.com" ]
- 基金信息：
  
  总装备部预研基金资助项目(9140A21010114HT05063)
- DOI：10.3788/OPE.20162412.3068
  中图分类号： TH703;TN305.2
- 收稿日期：2016-11-09，
  
  录用日期：2016-11-21，
  
  纸质出版日期：2016-12-25
- 稿件说明：
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孟晓辉, 王永刚, 李文卿, 等. Ф420 mm高次非球面透镜的加工与检测[J]. 光学精密工程, 2016,24(12):3068-3075.

Xiao-hui MENG, Yong-gang WANG, Wen-qing LI, et al. Fabricating and testing of Ф420 mm high-order aspheric lens[J]. Optics and precision engineering, 2016, 24(12): 3068-3075.
孟晓辉, 王永刚, 李文卿, 等. Ф420 mm高次非球面透镜的加工与检测[J]. 光学精密工程, 2016,24(12):3068-3075. DOI： 10.3788/OPE.20162412.3068.

Xiao-hui MENG, Yong-gang WANG, Wen-qing LI, et al. Fabricating and testing of Ф420 mm high-order aspheric lens[J]. Optics and precision engineering, 2016, 24(12): 3068-3075. DOI： 10.3788/OPE.20162412.3068.

摘要

介绍了

420 mm熔石英高次非球面透镜的加工与检测方法。对现有数控加工工艺进行了优化，通过分工序加工方式，依次采用机器人研磨、抛光和离子束修形技术完成了透镜的加工。进行非球面透镜检测时，考虑透镜的凹面为球面，利用球面波干涉仪对其面形进行了直接检测，剔除干涉仪标准镜镜头参考面误差后，透镜凹面的精度达到0.011λ-RMS；针对透镜的凸面为高次非球面，采用基于背后反射自准法的零位补偿技术对其进行面形检测，其精度达到0.013λ-RMS。最后，采用一块高精度标准球面镜对加工后透镜的透射波前进行了自消球差检测，得到其波前误差为0.013λ-RMS。试验结果表明，非球面透镜各项技术指标均满足设计要求。所述工艺方法亦适用于更大口径的非球面透镜及其他类型非球面光学元件的高精度加工.

Abstract

The fabrication and testing of a

420 mm fused silica high-order aspheric lens were presented. Current fabricating technologies were optimized

and robot grinding

polishing

and ion beam figuring were respectively applied to the fabrication of lens. For testing an aspheric lens

a spherical interferometer was used to test the concave surface of spheric lens

and the result shows that the test accuracy is 0.011λ-rms after the error of interferometer standard lens reference surface was removed. Furthermore

null compensators based on reflective auto-collimating method were taken to test the high-order convex aspherical surface

and the surface figure errors are 0.013λ-rms. Finally

a standard spherical mirror was used to test the transmission wavefront of processed aspheric lens with self-aplanatic form

and the transmission wavefront errors of aspheric lens is 0.013λ-rms. The testing results indicate that the entire specifications meet the requirements of design. The processing methods proposed by the paper are suitable for the fabrication of larger aspheric lenses and other larger aperture aspherical elements.

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Keywords

references

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Ф420 mm高次非球面透镜的加工与检测

Fabricating and testing of Ф420 mm high-order aspheric lens

DOI：10.3788/OPE.20162412.3068

摘要

Abstract

关键词

Keywords

references