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1. 中国科学院 光电研究院 北京,100094
2. 北京理工大学 北京,100081
3. 北京信息科技大学 北京,100192
收稿日期:2016-05-29,
修回日期:2016-06-15,
纸质出版日期:2016-11-14
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纪荣祎, 周维虎, 黎尧等. 激光跟踪仪高精度绝对测距系统[J]. 光学精密工程, 2016,24(10s): 148-155
JI Rong-yi, ZHOU Wei-hu, LI Yao etc. High absolute distance measurement system of laser tracker[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 148-155
纪荣祎, 周维虎, 黎尧等. 激光跟踪仪高精度绝对测距系统[J]. 光学精密工程, 2016,24(10s): 148-155 DOI: 10.3788/OPE.20162413.0148.
JI Rong-yi, ZHOU Wei-hu, LI Yao etc. High absolute distance measurement system of laser tracker[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 148-155 DOI: 10.3788/OPE.20162413.0148.
设计了组合式激光绝对测距系统,实现了激光跟踪仪的高精度绝对测距性能。首先,介绍了激光跟踪仪的工作原理与性能特点,设计了基于双飞秒激光测距与相位式激光测距的组合式绝对测距方案。然后,根据相位激光测距原理设计了相位激光测距光路与信号处理系统设计。最后,进行了飞秒测距系统测距精度比对实验和相位测距系统动态跟踪测量实验。实验结果表明:在60 m的测量范围内,飞秒激光测距可达到1
μ
m+0.5
μ
m/m的测距精度,相位激光测距系统能够实现±10 mm的动态测距精度,可满足组合式测量对距离大数的测量精度要求。设计的组合式激光绝对测距系统能够满足激光跟踪仪对测距系统测量精度高、测量速度快、可动态测量的性能要求。
A combined laser absolute ranging system was designed to achieve the high-precision absolute ranging performance of laser tracker. Firstly
the operating principle and performance characteristics of laser tracker were introduced. Then an absolute range scheme combing the femtosecond laser distance measuring with the phase-shift laser ranging was developed. Based on the principle of the phase-shift laser ranging
the optical path and signal processing system were designed. Finally
the precisions of femtosecond laser distance measuring system and phase laser ranging were tested experimentally. The result indicates that the femtosecond laser distance measuring and the phase laser ranging can achieve a precision of 1
μ
m+0.5
μ
m/m and a dynamic ranging precision of ±10 mm respectively within the measurement range of 60 m
which can satisfy the precision requirement of combined ranging system in long-distance measurement. The designed combined-type laser absolute ranging system can meet the performance requirement of high precision
fast measuring speed and dynamic measurement.
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华卿,周维虎,许艳. 飞秒激光频率梳绝对测距技术综述[J]. 计测技术,2012,32(1):1-5. HUA Q,ZHOU W H,XU Y. Review of absolute distance measurement with femtosecond optical frequency comb[J].Metrology & Measurement Technology, 2012,32(1):1-5.(in Chinese)
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