PBS对零差激光干涉仪非线性误差的影响

王超群; 黄强先; 伍婷婷; 武万多

doi:10.3788/OPE.20162413.0190

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PBS对零差激光干涉仪非线性误差的影响

更新时间：2020-08-13

- PBS对零差激光干涉仪非线性误差的影响
- Effect of PBSs on nonlinearity in a homodyne interferometer
- 光学精密工程 2016年24卷第10s期页码：190-196
- 作者机构：
  
  1. 合肥工业大学仪器科学与光电工程学院,安徽合肥,230009
  2. 合肥工业大学电子科学与应用物理学院,安徽合肥,230009
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.51475131）()
- DOI：10.3788/OPE.20162413.0190
  中图分类号： TH703;TH744.3
- 收稿日期：2016-05-28，
  
  修回日期：2016-06-11，
  
  纸质出版日期：2016-11-14
- 稿件说明：
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王超群, 黄强先, 伍婷婷等. PBS对零差激光干涉仪非线性误差的影响[J]. 光学精密工程, 2016,24(10s): 190-196

WANG Chao-qun, HUANG Qiang-xian, WU Ting-ting etc. Effect of PBSs on nonlinearity in a homodyne interferometer[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 190-196
王超群, 黄强先, 伍婷婷等. PBS对零差激光干涉仪非线性误差的影响[J]. 光学精密工程, 2016,24(10s): 190-196 DOI： 10.3788/OPE.20162413.0190.

WANG Chao-qun, HUANG Qiang-xian, WU Ting-ting etc. Effect of PBSs on nonlinearity in a homodyne interferometer[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 190-196 DOI： 10.3788/OPE.20162413.0190.

摘要

基于琼斯矩阵原理研究了分别位于零差激光干涉仪干涉部分和探测部分的3个偏振分光棱镜（PBS）引起的非线性误差。首先，介绍了零差激光干涉仪的构成和工作原理。然后对干涉仪中PBS的理想琼斯矩阵进行修正，建立了与光路中PBS用途相对应的误差分析模型。最后，在Maple软件中分别仿真了PBS单独和整体引起的非线性误差。结合仿真曲线和误差分析模型可知，干涉部分的PBS

主要引起非正交误差，而探测部分的PBS

和PBS

引起直流漂移误差和不等幅误差。仿真结果表明，采用性能更好的PBS

可使非线性误差从2.32 nm降低至0.23 nm；调节光电探测器的增益系数，则可消除PBS

和PBS

引起的直流漂移和不等幅误差。上述研究结果为进一步补偿由PBS引起的非线性误差提供了理论依据。

Abstract

The non-linear errors caused by performance deficiency of 3 polarized beam splitters (PBS) located on the interferometer part and detection part of homodyne laser interferometer were calculated respectively on the basis of Jones matrix. Firstly

the composition and working principle of the homodyne interferometer were introduced. Then the ideal Jones matrix was modified for establishing the error analysis models of the PBSs with different purpose. The simulation of the non-linear errors induced by PBS separately and integrally was performed in Maple software. In combination of the simulated curve and error analysis model

it shows that the PBS

at interference part mainly causes non-orthogonal error and PBS

and PBS

at detection part mainly cause DC drift error and unequal amplitude error. Therefore

the non-linear error reduces from 2.32 nm to 0.23 nm by adopting PBS with better performance. The DC drift and unequal amplitude error caused by PBS

and PBS

was eliminated by adjusting the gains of detectors. The research results provide theoretical foundation for further compensation to non-linear error caused by PBS.

关键词

Keywords

references

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