全固态210 nm准连续深紫外激光器

崔建丰; 高涛; 张亚男; 王迪; 岱钦; 姚俊

doi:10.3788/OPE.20162413.0212

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全固态210 nm准连续深紫外激光器

更新时间：2020-08-13

- 全固态210 nm准连续深紫外激光器
- All-solid-state 210 nm quasi-continuous deep ultraviolet laser
- 光学精密工程 2016年24卷第10s期页码：212-215
- 作者机构：
  
  1. 沈阳理工大学理学院,辽宁沈阳,110159
  2. 鞍山紫玉激光科技有限公司,辽宁鞍山,114000
- 作者简介：
- 基金信息：
  
  科技部科技型中小企业技术创新基金资助项目（No.C262100678）();辽宁省科技计划资助项目（No.2014220040）();沈阳市科技计划资助项目（No.F1
- DOI：10.3788/OPE.20162413.0212
  中图分类号： TN248.1
- 收稿日期：2016-05-26，
  
  修回日期：2016-06-19，
  
  纸质出版日期：2016-11-14
- 稿件说明：
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崔建丰, 高涛, 张亚男等. 全固态210 nm准连续深紫外激光器[J]. 光学精密工程, 2016,24(10s): 212-215

CUI Jian-feng, GAO Tao, ZHANG Ya-nan etc. All-solid-state 210 nm quasi-continuous deep ultraviolet laser[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 212-215
崔建丰, 高涛, 张亚男等. 全固态210 nm准连续深紫外激光器[J]. 光学精密工程, 2016,24(10s): 212-215 DOI： 10.3788/OPE.20162413.0212.

CUI Jian-feng, GAO Tao, ZHANG Ya-nan etc. All-solid-state 210 nm quasi-continuous deep ultraviolet laser[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 212-215 DOI： 10.3788/OPE.20162413.0212.

摘要

本文采用国产808 nm光纤输出半导体激光器作为抽运源，研制了全固态深紫外激光器。该激光器采用激光二极管（LD）端面抽运Nd：YLF晶体和声光调

技术实现了准连续1 053 nm的基波振荡，腔外利用一块LBO晶体和两块BBO晶体对基频光进行二倍频、四倍频及五倍频，实现了准连续210 nm的深紫外激光输出。实验研究了该激光输出功率与LD抽运功率的关系。LD抽运功率为13 W，声光调

激光器的调制频率为1 kHz，基波平均输出功率为1.33 W时，能够获得平均输出功率17 mW，脉冲宽度6.1 ns的210 nm深紫外激光，光束质量良好。该激光器腔外谐波变换无聚焦系统，结构简单、易于操作，有利于小型化生产。

Abstract

By using a domestic fiber output semiconductor laser with 808 nm wavelength

an all-solid-state deep ultraviolet laser was developed. The Laser Diode (LD) end pump Nd:YLF crystal and acoustic-optical Q-switch were adoped to realize quasi-continuous fundamental frequency radiation at 1 053 nm

which was subjected to second harmonic generation

fourth harmonic generation and fifth harmonic by using one LBO crystal and two BBO crystals outside the cavity. Thus the output of quasi-continuous 210 nm deep ultraviolet laser was achieved. The relationship between the output power of the laser and the pump power were researched experimentally. When the pump power of LD is 13 W

the modulation frequency of acoustic-optical

-switch laser is 1 kHz and the average output power of fundamental wave is 1.33 W

the average output power and the pulse width of the deep ultraviolet laser was 17 mW and 6.1 ns respectively. Furthermore the deep ultraviolet laser is characterized by good beam quality

simple configuration and easy operation

thus prone to minimization.

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Keywords

references

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