CO2激光在PET基板加工微通道的工艺优化

陈雪叶; 沈杰男; 胡增亮; 陈静

doi:10.3788/OPE.20162413.0224

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CO₂激光在PET基板加工微通道的工艺优化

更新时间：2020-08-13

- CO₂激光在PET基板加工微通道的工艺优化
- Optimization of processing micro-channels with CO₂-laser on polyethylene terephthalate(PET) sheet
- 光学精密工程 2016年24卷第10s期页码：224-228
- 作者机构：
  
  辽宁工业大学机械工程与自动化学院,辽宁锦州,121001
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.51405214）();辽宁省博士启动基金资助项目（No.20141131）();辽宁省教育厅基金资助项目（No.L2014241）()
- DOI：10.3788/OPE.20162413.0224
  中图分类号： O345
- 收稿日期：2016-05-27，
  
  修回日期：2016-06-19，
  
  纸质出版日期：2016-11-14
- 稿件说明：
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陈雪叶, 沈杰男, 胡增亮等. CO2激光在PET基板加工微通道的工艺优化[J]. 光学精密工程, 2016,24(10s): 224-228

CHEN Xue-ye, SHEN Jie-nan, HU Zeng-liang etc. Optimization of processing micro-channels with CO2-laser on polyethylene terephthalate(PET) sheet[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 224-228
陈雪叶, 沈杰男, 胡增亮等. CO2激光在PET基板加工微通道的工艺优化[J]. 光学精密工程, 2016,24(10s): 224-228 DOI： 10.3788/OPE.20162413.0224.

CHEN Xue-ye, SHEN Jie-nan, HU Zeng-liang etc. Optimization of processing micro-channels with CO2-laser on polyethylene terephthalate(PET) sheet[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 224-228 DOI： 10.3788/OPE.20162413.0224.

摘要

为了提高微通道表面的加工质量，研究了CO

激光在聚乙烯对苯二甲酸酯（PET）基板上加工微通道的工艺。通过正交试验法研究了激光功率、加工速度、通道长度和加工次数对微通道宽度的影响，并且进行了工艺参数优化。然后，通过金相显微镜和粗糙度测量仪对加工结果进行了实验分析。结果表明，正文试验获得的最佳加工参数如下：激光功率为10 W，扫描速度为6 mm/s，通道长度为80 mm，加工次数为3次。在此加工参数下对通道表面的粗糙度（Ra）的算数平均值可以达到170 nm。由此证明使用CO

激光在PET基板上加工微米级通道的方法是完全可行的。

Abstract

In order to improve the processing quality of micro-channels

the fabrication technology of micro-channels on polyethylene terephthalate(PET) substrate using CO

laser was researched. The effects of the processing parameters

including laser power

processing speed

channel length and processing times

on the width of micro-channel were analyzed and optimized through orthogonal tests. Furthermore

the processing results under the optimal parameters were tested by using metallographic microscope and roughness tester. The results show that the arithmetic average value of roughness (

) on the surface of channel can reach 170 nm

when the laser power is 10 W

scanning speed is 6 mm/s; channel length is 80 mm and processing times is 3. Therefore

the method of processing micron-size channel on PET substrate by using CO

laser is completely feasible.

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Keywords

references

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