菲涅尔波带片及其在光学加速度传感器中的应用

贾书海; 申鹏程; 汪永林; 董君; 王飞; 唐振华; 杜艳芬

doi:10.3788/OPE.20162413.0267

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菲涅尔波带片及其在光学加速度传感器中的应用

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- 菲涅尔波带片及其在光学加速度传感器中的应用
- Fresnel zone plate and its application in optical acceleration sensor
- 光学精密工程 2016年24卷第10s期页码：267-271
- 作者机构：
  
  西安交通大学机械工程学院,陕西西安,710049
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.U1510114，No.51575437）();陕西省科技攻关计划资助项目（No.2014K07-02）()
- DOI：10.3788/OPE.20162413.0267
  中图分类号： TN25;TP212
- 收稿日期：2016-05-28，
  
  修回日期：2016-06-12，
  
  纸质出版日期：2016-11-14
- 稿件说明：
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贾书海, 申鹏程, 汪永林等. 菲涅尔波带片及其在光学加速度传感器中的应用[J]. 光学精密工程, 2016,24(10s): 267-271

JIA Shu-hai, SHEN Peng-cheng, WANG Yong-lin etc. Fresnel zone plate and its application in optical acceleration sensor[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 267-271
贾书海, 申鹏程, 汪永林等. 菲涅尔波带片及其在光学加速度传感器中的应用[J]. 光学精密工程, 2016,24(10s): 267-271 DOI： 10.3788/OPE.20162413.0267.

JIA Shu-hai, SHEN Peng-cheng, WANG Yong-lin etc. Fresnel zone plate and its application in optical acceleration sensor[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 267-271 DOI： 10.3788/OPE.20162413.0267.

摘要

设计加工了一种菲涅尔波带片，介绍了该菲涅尔波带片的设计原理和参数选择。该波带片的尺寸精度在微米级，最大理论半径为494.19

m，最小理论半径为78.11

m。开发了该波带片的微纳加工工艺流程，成功制备出了高质量的波带片。所加工的菲涅耳衍射波带片边界光滑完整，具有良好的聚焦和成像特性。利用该波带片的衍射特性开发出了一种全光型的加速度传感器，并对其传感特性进行了测试。从实测的输出曲线可以看出，传感器输出和加速度之间有着良好的线性度，灵敏度为0.033 V/

。该传感器利用光纤来导光，传感器头内没有电子元件，具有良好的抗电磁干扰能力，可以应用于恶劣环境中。

Abstract

A method to design and prepare a Fresnel zone plate for all-optical type acceleration sensor was proposed

and the design principles and parameters of the Fresnel zone plate was introduced. The maximum and minimum theoretical radii of the wave band plate were 494.19

m and 78.11

m respectively with the size precision in micron level. The micro-nanofabrication process technology of the zone plate was developed. Then a high-quality zone plate was successfully fabricated. The boundary of the zone plate was smooth and complete

thus proving good focusing and imaging properties. Finally

an all-optical type acceleration sensor based on the zone plate diffractive properties was developed and tested. In terms of the output curves from the test

it shows that the output of the sensor proves a good linearity with the acceleration and the sensitivity is 0.033 V/

. The sensor guides light with optical fibers instead of electronic components

which provides good resistance to electromagnetic interference and promising applications in harsh environments.

关键词

Keywords

references

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MOGHIMI M J, FERNANDES J, KANHERE A, et al.. Microscale Fresnel zone plate array on flexible substrate[C]. 201518th International Conference on Solid-State Sensors, Actuators and Microsystems. Anchorage Alaska:Transducers, 2015:395-398.

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WANG X F, WANG J Y, CHEN X H, et al.. Large field-of-view X-ray imaging by using a Fresnel zone plate[J]. Laser and Particle Beams,2012,30(1):87-93.

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KONG W J, JIA SH H, YANG J. Computer simulation for the principle of a new optical acceleration sensor[J]. SPIE, 2006, 6149(614924):1-5. 导师简介:贾书海(1969-),男,陕西咸阳人,博士,教授,博士生导师,2000年于西安交通大学获得博士学位,主要从事智能光电传感技术、智能光机电一体化技术等方面的研究。E-mail:shjia@mail.xjtu.edu.cn

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