折叠双S型Bimorph热式MEMS微镜

陆安江; 张正平; 黄子吉; 任哲毅; 陈巧; 秦水介

doi:10.3788/OPE.20162413.0400

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折叠双S型Bimorph热式MEMS微镜

更新时间：2020-08-13

- 折叠双S型Bimorph热式MEMS微镜
- MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator
- 光学精密工程 2016年24卷第10s期页码：400-406
- 作者机构：
  
  1. 贵州省光电子技术及应用重点实验室,贵州贵阳,550025
  2. 无锡微奥科技有限公司无锡,214135
  3. 贵州大学大数据与信息工程学院, 贵州贵阳 550025
- 作者简介：
- 基金信息：
  
  国际合作研究资助项目（No.2014DFA00670）();国家科技支撑计划资助项目（No.2015BAD28B02）()
- DOI：10.3788/OPE.20162413.0400
  中图分类号： TP394.1;TH691.9
- 收稿日期：2016-06-10，
  
  修回日期：2016-06-30，
  
  纸质出版日期：2016-11-14
- 稿件说明：
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陆安江, 张正平, 黄子吉等. 折叠双S型Bimorph热式MEMS微镜[J]. 光学精密工程, 2016,24(10s): 400-406

LU An-jiang, ZHANG Zheng-ping, HUANG Zi-ji etc. MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 400-406
陆安江, 张正平, 黄子吉等. 折叠双S型Bimorph热式MEMS微镜[J]. 光学精密工程, 2016,24(10s): 400-406 DOI： 10.3788/OPE.20162413.0400.

LU An-jiang, ZHANG Zheng-ping, HUANG Zi-ji etc. MEMS micro-mirror of folded double S-shaped bimorph electro-thermal actuator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 400-406 DOI： 10.3788/OPE.20162413.0400.

摘要

为了设计具有大角度、大位移、低电压的MEMS微镜。采用折叠双S型双层梁驱动结构设计了一种能够克服静电驱动缺陷的新型MEMS微镜，利用表硅与SOI相结合的MEMS微加工工艺来实现双材料电热的差分驱动。不但解决了因环境温度所引起的不稳定性问题，而且还实现了创记录的大角度、大位移扫描。通过该方法设计的微镜尺寸小于2.5 mm×2.5 mm，机械转角大于5度，垂直线性位移可达425

m，系统响应时间小于10 ms。最后对微镜的电热与机电特性、频率响应、谐振频率等进行了测试与分析，结果显示MEMS微镜性能稳定可靠，有望得到更多领域的推广应用。

Abstract

Purpose:to design a MEMS micromirror with wide angle

large displacement and low voltage. Method:design a new-type MEMS micromirror capable of overcoming electrostatic drive by adopting the folded dual-S double-layer beam driving structure

and achieve the electrothermal differential drive of bi-materials by adopting the MEMS micromachining process combining surface silicon with SOI

which not only solved the problem of instability caused by ambient temperature

but also achieved the record-breaking wide-angle and large-displacement scanning; micromirror designed by adopting this method is smaller than 2.5 mm×2.5 mm

the mechanical angle is greater than 5°

the vertical linear displacement can reach 425

and the system response time is shorter than 10 ms; finally

test and analyze the electrothermal and electromechanical performance

frequency response and resonant frequency of the micromirror. It indicates that the MEMS micromirror

with stable and reliable performance

has a broad prospect in wider promotion and application.

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Keywords

references

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