压电式高精度位移微扫描控制系统设计

黄燕; 沈飞; 黄整章; 王红雨; 鹿存跃

doi:10.3788/OPE.20162413.0454

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压电式高精度位移微扫描控制系统设计

更新时间：2020-08-13

- 压电式高精度位移微扫描控制系统设计
- Micro-scanning control system design for piezoelectric high-precision displacement
- 光学精密工程 2016年24卷第10s期页码：454-460
- 作者机构：
  
  1. 仪器科学与技术系, 上海交通大学上海,200240
  2. 上海航天控制技术研究所上海,201109
  3. 中国航天科技集团公司红外探测技术研发中心上海,201109
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.11174206();No.61471237）();上海航天创新基金资助项目（No.SAST201347）();国家海洋工程重点实验室重
- DOI：10.3788/OPE.20162413.0454
  中图分类号： V445.8
- 收稿日期：2016-05-07，
  
  修回日期：2016-06-12，
  
  纸质出版日期：2016-11-14
- 稿件说明：
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黄燕, 沈飞, 黄整章等. 压电式高精度位移微扫描控制系统设计[J]. 光学精密工程, 2016,24(10s): 454-460

HUANG Yan, SHEN Fei, HUANG Zheng-zhang etc. Micro-scanning control system design for piezoelectric high-precision displacement[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 454-460
黄燕, 沈飞, 黄整章等. 压电式高精度位移微扫描控制系统设计[J]. 光学精密工程, 2016,24(10s): 454-460 DOI： 10.3788/OPE.20162413.0454.

HUANG Yan, SHEN Fei, HUANG Zheng-zhang etc. Micro-scanning control system design for piezoelectric high-precision displacement[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 454-460 DOI： 10.3788/OPE.20162413.0454.

摘要

为了实现对微扫描系统的超分辨率成像，基于压电叠堆致动器，在现有微位移驱动平台的基础上设计了一种高精度位移控制系统。压电叠堆致动器材料本身的迟滞特性影响了系统的精度及稳定性，对其迟滞非线性的建模与补偿方法进行了研究。采用改进的Prandtl-Ishlinskii迟滞非线性模型的逆模型作为前馈控制器对其迟滞非线性进行补偿。通过测试微位移驱动平台的输出特性确定逆补偿模型的参数，逆模型结构简洁，系统的响应速度快，利于实时控制。实验结果表明该迟滞逆补偿控制系统能明显减小系统的迟滞非线性，最大的非线性误差为0.4

m。系统在微扫描驱动平台微位移放大的基础上实现了精确的二维定位。

Abstract

To realize super-resolution imaging to micro-scanning system

a high-precision displacement control system is designed on the basis of piezoelectric stack actuator and existing micrometric displacement drive platform. Hysteresis characteristic of piezoelectric stack actuator material affects accuracy and stability of system

and research is performed to modeling and compensation method of its hysteretic nonlinearity. Adopt advanced inverse model of Prandtl-Ishlinskii hysteresis nonlinearity model as feedforward controller to compensate for its hysteretic nonlinearity. Confirm parameter of inverse compensation model by testing output characteristics of micrometric displacement drive platform. Structure of inverse model is simple

and response speed of system is quick

which is beneficial to real-time control. Experimental result shows that the hysteretic inverse compensation control system can obviously decrease hysteretic nonlinearity of system and the maximum nonlinear error is 0.4

m. System realizes accurate two-dimension positioning on the basis of micrometric displacement amplification of micro-scanning drive platform.

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references

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