位移补偿器压电陶瓷片微位移自动测量设备

杨劲; 任同群; 王晓东

doi:10.3788/OPE.20162413.0461

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位移补偿器压电陶瓷片微位移自动测量设备

更新时间：2020-08-13

- 位移补偿器压电陶瓷片微位移自动测量设备
- Automatic measurement equipment for micrometric displacement of piezoelectric ceramic piece of displacement compensator
- 光学精密工程 2016年24卷第10s期页码：461-467
- 作者机构：
  
  1. 大连理工大学精密与特种加工教育部重点实验室,辽宁大连,116021
  2. 大连理工大学微纳米技术及系统辽宁省重点实验室,辽宁大连,116023
- 作者简介：
- 基金信息：
  
  高档数控机床与基础制造装备&rdquo();科技重大专项&ldquo();高精度惯性器件微制造装备&rdquo();课题资助项目（No.2013ZX04001-091）
- DOI：10.3788/OPE.20162413.0461
  中图分类号：
- 收稿日期：2016-05-10，
  
  修回日期：2016-06-07，
  
  纸质出版日期：2016-11-14
- 稿件说明：
移动端阅览
杨劲, 任同群, 王晓东. 位移补偿器压电陶瓷片微位移自动测量设备[J]. 光学精密工程, 2016,24(10s): 461-467

YANG Jin, REN Tong-qun, WANG Xiao-dong. Automatic measurement equipment for micrometric displacement of piezoelectric ceramic piece of displacement compensator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 461-467
杨劲, 任同群, 王晓东. 位移补偿器压电陶瓷片微位移自动测量设备[J]. 光学精密工程, 2016,24(10s): 461-467 DOI： 10.3788/OPE.20162413.0461.

YANG Jin, REN Tong-qun, WANG Xiao-dong. Automatic measurement equipment for micrometric displacement of piezoelectric ceramic piece of displacement compensator[J]. Editorial Office of Optics and Precision Engineering, 2016,24(10s): 461-467 DOI： 10.3788/OPE.20162413.0461.

摘要

针对用于激光陀螺位移补偿器的压电陶瓷片微位移自动测量任务，研制了自动测量设备。本设备采用三坐标机器人作为运动框架，使用光电传感器作为位移检测及反馈控制传感器，解决运动位置自动检测问题，实现设备的自动化运行。在零件拾取及固定装置中应用真空吸附技术，有效避免薄片零件意外损伤情况的发生。使用高精度电感测微仪，采取双测头测量，相比单测头测量方式，消除了零件搬运及放置位置误差对测量结果的影响。设备可批量完成压电陶瓷片的自动上料、测量和分拣配对工作。实验表明，与现有测量方法相比，本文研制的压电陶瓷片微位移自动测量设备能够提高测量速度60%以上，全量程测量精度0.5

m，重复精度0.06

m。满足测量技术要求，测量结果可靠性高、一致性好。

Abstract

Aimed at automatic measurement task of micrometric displacement of piezoelectric ceramic piece for laser gyroscope displacement compensator

automatic measurement equipment is developed. Three-dimensional robot is adopted in the equipment as motion frame

and photoelectric sensor is used as sensor for displacement detection and feedback control

which solves the problem of automatic motion detection

and realizes automatic operation of equipment. The vaccum technology is applied in parts pickup and fixation

which effectively avoids the occurance of accidental damage of slice parts. The high-precision inductance micrometers are used with working mode of relative measurement. As a result

the influence of part transport and placement error on measuring result is eliminated effectively. The equipment can finish the work of automatic part loading

measurement

selection and matching in batches. The experiment results show that the developed equipment improves measuring speed in more than 60 percent compared with existing measuring method

the measurement accuracy is 0.5

m in full measuring range

the repeated accuracy is no more than 0.06

m. Thus

the requirements of the measurement is satisfied based on the high reliability and consistency of the developed equipment.

关键词

Keywords

references

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