ALON高陡度薄壁保形非球面的超精密磨削工艺

郭兵; 张春雨; 王金虎; 赵清亮; 陈洪许; 孙金霞; 于欣

doi:10.3788/OPE.20172501.0093

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ALON高陡度薄壁保形非球面的超精密磨削工艺

微纳技术与精密机械 | 更新时间：2020-07-07

- ALON高陡度薄壁保形非球面的超精密磨削工艺
- Ultra-precision grinding process of high-gradient thin conformal aspheric on ALON ceramic
- 光学精密工程 2017年25卷第1期页码：93-99
- 作者机构：
  
  1.哈尔滨工业大学机电工程学院精密工程研究所, 黑龙江哈尔滨 150001
  2.中国空空导弹研究院, 河南洛阳 471009
  3.哈尔滨工业大学航天学院光电子技术研究所, 哈尔滨黑龙江 150080
- 作者简介：
  
  郭兵(1983-),男,吉林延吉人,博士,讲师,2012年于哈尔滨工业大学获得博士学位,主要研究方向为复杂光学表面的超精密加工技术及新型微结构化磨削工具的制备。E-mail:guobing@hit.edu.cn E-mail:guobing@hit.edu.cn
  [ "张春雨(1988-),男,黑龙江五常人,博士研究,主要从事高硬脆红外光学保形元件的超精密加工技术研究。E-mail:zhangchunyu880420@163.com" ]
- 基金信息：
  
  航空科学基金资助项目(No.20140177003);中国博士后科学基金资助项目(No.2015T80337)
- DOI：10.3788/OPE.20172501.0093
  中图分类号： TG580
- 收稿日期：2016-06-05，
  
  录用日期：2016-7-20，
  
  纸质出版日期：2017-01-25
- 稿件说明：
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郭兵, 张春雨, 王金虎, 等. ALON高陡度薄壁保形非球面的超精密磨削工艺[J]. 光学精密工程, 2017,25(1):93-99.

Bing GUO, Chun-yu ZHANG, Jin-hu WANG, et al. Ultra-precision grinding process of high-gradient thin conformal aspheric on ALON ceramic[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 93-99.
郭兵, 张春雨, 王金虎, 等. ALON高陡度薄壁保形非球面的超精密磨削工艺[J]. 光学精密工程, 2017,25(1):93-99. DOI： 10.3788/OPE.20172501.0093.

Bing GUO, Chun-yu ZHANG, Jin-hu WANG, et al. Ultra-precision grinding process of high-gradient thin conformal aspheric on ALON ceramic[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 93-99. DOI： 10.3788/OPE.20172501.0093.

摘要

为了实现新型红外陶瓷ALON高陡度薄壁保形非球面的超精密磨削加工，首先根据ALON的材料属性和高陡度薄壁保形非球面的结构特性，进行了其超精密磨削加工工艺性分析，并基于有限元计算方法，完成了面向ALON高陡度薄壁保形非球面的精密夹具的设计以及关键参数的优化。然后完成了ALON的超精密磨削工艺实验，工艺实验结果表明减小工件转速和砂轮粒度都会降低ALON的平均表面粗糙度

值，但砂轮粒度对磨削后ALON的表面粗糙度影响更显著。最后实现了ALON高陡度薄壁保形非球面的超精密磨削加工，磨削后的ALON高陡度薄壁保形非球面的面形精度

值为2

m，表面粗糙度

值可达8.6 nm。

Abstract

In order to realize the ultra-precision grinding of high-gradient thin conformal aspheric on ALON infrared ceramic

the material property of ALON and the structured feature of high-gradient thin conformal aspheric was analyzed firstly. The precision jig was design and the main dimensions were optimized by finite element method. Secondly

the ALON grinding experiments were implemented. The results indicated that although the roughness would reduce with the decrease of workpiece spindle speed and wheel abrasive size

the effect of abrasive size on roughness was more significant. Finally

the ultra-precision grinding procedures were established for ALON high-gradient thin conformal aspheric. The form accuracy

value of ground ALON workpiece was 2

while the surface roughness was 8.6 nm.

关键词

Keywords

references

SHANNON R R, MILS J P, POLICOVE H M. Conformal optics technology enables window shapes that conform to an application, not to conventional optical limitations[J]. Photonics Spectra, 2001, 35(4):26-34.

李圣怡. 保形红外光学元件制造技术[J]. 航空精密制造技术, 2008(24):55-57.

LI SH Y.Manufacturing technology of conformal infrared optical component[J]. Aeronautical Manufacturing Technology, 2008(24):55-57.(in Chinese)

樊会涛,崔颢,天光. 空空导弹70年发展综述[J]. 航空兵器, 2016, 2(1):3-12.

FAN H T,CUI H,TIAN G. A review on the 70-year development of air-to-air missiles[J]. Aero Weaponry, 2016, 2(1):3-12.(in Chinese)

DEFISHER S, FESS E, WOLFS F. Freeform and conformal optical manufacturing[J]. SPIE, 2013, 8308.

NELSON J D, GOULD A, SMITH N. Advances in freeform optics fabrication for conformal window and dome applications[J]. SPIE, 2013, 8708.

SCHOEN J. Conformal ogive ALON dome fabrication[R]. COM, 2004, 9, 16.

GOELA J S, ASKINAZI J, ROBINSON B. Replication of conformal surfaces by chemical vapor deposition[C]. Proc. of the 8th Electromagnetic Window Symposium, Portland, 2004, 4:313-326.

张发. 热压多晶氟化镁保形头罩加工工艺研究[D]. 长沙:国防科技大学硕士论文, 2009. http://cdmd.cnki.com.cn/Article/CDMD-90002-2010165655.htm

ZHANG F. Research on Processing Technics of Hot-Pressed Poly-Crystal Magnesium Fluoride Conformal Dome[D]. Changsha:Graduate School of National University of Defense Technology, 2009.(in Chinese)

SCHAEFER P, EICHHOHZ A R, SULZBACH C F. Fabrication challenges associated with conformal optics[J]. SPIE, 2001, 4375.

RUCKMAN L J, FESS M E, POLICOVE H M. Deterministic processes for manufacturing conformal(freeform) optical surfaces[J]. SPIE, 2001, 4375:108-113.

武琪,王思青,张长瑞,等. 耐高温透明AlON陶瓷的研究进展与展望[J]. 硅酸盐通报, 2013, 4(32):657-662.

WU Q, WANG S Q, ZHANG CH R, et al. Progress and prospect of high temperature transparent AlON ceramics[J]. Bulletin of the Chinese Ceramic Society, 2013, 4(32):657-662.(in Chinese)

CHEN B, GUO B, ZHAO Q L. On-machine precision form truing of arc-shaped diamond wheels[J]. Journal of Materials Processing Technology, 2015, 223:65-74.

GUO B, ZHAO Q L. Wheel normal grinding of hard and brittle materials[J]. The International Journal of Advanced Manufacturing Technology, 2015, 79(5-8):873-880.

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