基于柔性止动的MEMS惯性开关冲击可靠性强化

步超; 聂伟荣; 徐安达; 周织建

doi:10.3788/OPE.20172501.0123

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基于柔性止动的MEMS惯性开关冲击可靠性强化

微纳技术与精密机械 | 更新时间：2020-07-07

- 基于柔性止动的MEMS惯性开关冲击可靠性强化
- Shock reliability enhancement by flexible stop for MEMS inertial switch
- 光学精密工程 2017年25卷第1期页码：123-132
- 作者机构：
  
  南京理工大学机械工程学院, 江苏南京 210096
- 作者简介：
  
  [ "步超(1991-),男,江苏扬州人,博士研究生,2014于南京理工大学获得学士学位,主要从事MEMS惯性器件的设计与可靠性研究。E-mail:buxychao@163.com" ]
  聂伟荣(1969-)，女，山西原平人，博士，副教授，2002于南京理工大学获得博士学位，主要从事引信MEMS安全系统技术研究以及智能探测与控制技术研究。E-mail:njnwr@hotmail.com E-mail:njnwr@hotmail.com
- 基金信息：
  
  国家自然科学基金资助项目(No.51475245)
- DOI：10.3788/OPE.20172501.0123
  中图分类号： TH703
- 收稿日期：2016-08-20，
  
  录用日期：2016-9-27，
  
  纸质出版日期：2017-01-25
- 稿件说明：
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步超, 聂伟荣, 徐安达, 等. 基于柔性止动的MEMS惯性开关冲击可靠性强化[J]. 光学精密工程, 2017,25(1):123-132.

Chao BU, Wei-rong NIE, An-da XU, et al. Shock reliability enhancement by flexible stop for MEMS inertial switch[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 123-132.
步超, 聂伟荣, 徐安达, 等. 基于柔性止动的MEMS惯性开关冲击可靠性强化[J]. 光学精密工程, 2017,25(1):123-132. DOI： 10.3788/OPE.20172501.0123.

Chao BU, Wei-rong NIE, An-da XU, et al. Shock reliability enhancement by flexible stop for MEMS inertial switch[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 123-132. DOI： 10.3788/OPE.20172501.0123.

摘要

为了提高MEMS惯性开关的冲击可靠性，提出了一种柔性止动结构。首先，利用连续接触力理论建立了止动碰撞模型，通过Simulink对模型进行仿真，研究开关在不同止动形式下的响应特性。接着，从空间占用和应力集中的角度对悬臂梁和平面微弹簧两种止动形式进行讨论，设计止动结构。最后，利用UV-LIGA工艺制作开关样机，通过落锤冲击系统对样机进行测试。碰撞接触力对于冲击可靠性至关重要，Simulink仿真结果表明柔性止动结构能够极大的延长碰撞接触时间，从而降低接触力。同时，采用柔性止动还改善了碰撞后的弹跳现象，提高闭锁稳定性。冲击试验表明，开关累积失效分布函数符合韦布尔分布，标度参数（参考加速度）

=29 600、形状参数

=8.2。相比无柔性止动的MEMS开关，提出的柔性止动明显改善了开关的抗冲击性能。对柔性止动的建模、仿真与试验为MEMS惯性开关的抗冲击设计提供了有益参考。

Abstract

To improve the shock reliability of the MEMS inertial switch

a flexible stop structure was proposed. Firstly

the stop collision model was established using the theory of continuous contact force

and the response characteristics of the switch in different stop modes were researched conducting simulation on the model through Simulink. Then

from the perspectives of space-efficient and the stress concentration

the cantilever type and plane micro-spring type stops were discussed and the stop structure was designed. Finally

the switch prototypes were fabricated using the UV-LIGA technology

and the prototypes were tested by the drop hammer shock system. Collision contact force was critical for shock reliability

Simulink simulation result shows that the flexible stop structure can greatly prolong the collision contact time

thus reducing the contact force. At the same time

it also improves the contact bounce phenomenon using flexible stop after collision and the stability of latching. The shock test shows that the cumulative failure distribution function (CDF) of the switch accords with Weibull distribution

with scale parameter (reference acceleration)

=29 600

shape parameter

=8.2. Compared with the MEMS switch without flexible stop

the proposed flexible stop improves the shock resistance of the switch significantly. Modeling

simulation and test of flexible stop provide beneficial reference resources for anti-shock design of MEMS inertial switch.

关键词

Keywords

references

XIONG W, HONG-LI Q I, JI-ZONG W U,et al. Simulation, fabrication and characterization of an all-metal contact-enhanced triaxial inertial microswitch with low axial disturbance[C]. IEEE Conference on Local Computer Networks, Edmonton, AB, Canada, 2014:194-203.

WANG Y, CHEN W, YANG Z, et al. An inertial micro-switch with compliant cantilever fixed electrode for prolonging contact time[C]. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems(MEMS), Estoril, 2013:600-603.

蔡豪刚, 杨卓青, 丁桂甫,等. 基于非硅衬底的微机电系统惯性开关的研制[J]. 机械工程学报, 2009, 45(3):156-161.

CAI H G, YANG ZH Q, DING G F.et al. Development of a MEMS electrical inertia micro-switch based on non-silicon substrate[J]. Chinese Journal of Mechanical Engineering, 2009, 45(3):156-161.(in Chinese)

黄新龙, 熊瑛, 陈光焱,等. UV-LIGA技术制作微型螺旋形加速度开关[J]. 光学精密工程, 2010, 18(5):1152-1158.

HUANG X L, XIONG Y, CHEN G Y, et al. Fabrication of micro spiral acceleration switch using UV-LIGA technology[J]. Opt. Precision Eng., 2010, 18(5):1152-1158.(in Chinese)

WANG Y, YANG Z, XU Q, et al. Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time[J]. Journal of Micromechanics and Microengineering, 2015, 25(8):085012.

CAO Y, XI Z, YU P, et al. A MEMS inertial switch with a single circular mass for universal sensitivity[J]. Journal of Micromechanics and Microengineering, 2015, 25(10):105005.

XI Z, CAO Y, YU P, et al. The simulation and visual test contact process of a MEMS inertial switch with flexible electrodes[J]. Microsystem Technologies, 2015:1-8.

ZHANG Q, YANG Z, XU Q, et al. Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity[J]. Journal of Micromechanics and Microengineering, 2016, 26(5):055008.

TANNER D M, WALRAVEN J A, HELGESEN K,et al. MEMS reliability in shock environments[C].Reliability Physics Symposium, San Jose, California, 2000:129-138.

周织建, 聂伟荣, 席占稳,等. 多层UV-LIGA电铸镍材料的抗冲击性能[J]. 光学精密工程, 2015, 23(4):1044-1052.

ZHOU ZH J, NIE W R, XI ZH W, et al. Anti-impact material properties of UV-LIGA multi-layered electroformed nickel[J]. Opt. Precision Eng., 2015, 23(4):1044-1052.(in Chinese)

SRIKAR V T, SENTURIA S D. The reliability of microelectromechanical systems(MEMS) in shock environments[J]. Journal of Microelectromechanical Systems, 2002, 11(3):206-214.

SUNDARAM S, TORMEN M, TIMOTIJEVIC B, et al. Vibration and shock reliability of MEMS:modeling and experimental validation[J]. Journal of Micromechanics & Microengineering, 2011, 21(4):45022-45034(13).

HARTZELL A, WOODILLA D. Reliability methodology for prediction of micromachined accelerometer stiction[C].Reliability Physics Symposium Proceedings, San Diego, 1999:202-205.

姚文莉, 岳嵘. 有争议的碰撞恢复系数研究进展[J]. 振动与冲击, 2015, 34(19):43-48.

YAO W L,YUE R. The controversial coefficient of restitution for impact problems[J]. Journal of Vibration and Shock, 2015, 34(19):43-48.(in Chinese)

HUNT K H, CROSSLEY F R E. Coefficient of restitution interpreted as damping in vibroimpact[J]. Journal of Applied Mechanics, 1975, 42(2):440-445.

FLORES P, MACHADO M, SILVA M T, et al. On the continuous contact force models for soft materials in multibody dynamics[J]. Multibody System Dynamics, 2011, 25(3):357-375.

GILARDI G, SHARF I. Literature survey of contact dynamics modelling[J]. Mechanism & Machine Theory, 2002, 37(10):1213-1239.

LANKARANI H M, NIKRAVESH P E. A contact force model with hysteresis damping for impact analysis of multibody systems[J]. Journal of Mechanical Design, 1990, 112(3):369-376.

NIE W, CHENG J, XI Z, et al. Elastic coefficient analysis on planar S-shaped micro spring under high impact load[J]. Microsystem Technologies, 2015:1-9.

WAGNER U, MULLER-FIEDLER R, BAGDAHN J, et al. Mechanical reliability of epipoly MEMS structures under shock load[C].Transducers, Solid-State Sensors, Actuators and Microsystems, International Conference, Boston, 2003(1):175-178.

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