米级弯月面化学薄膜涂覆装备的研制

徐佳; 许文斌; 卜和阳; 卢振武; 刘正坤; 洪义麟; 鱼卫星

doi:10.3788/OPE.20172501.0133

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米级弯月面化学薄膜涂覆装备的研制

微纳技术与精密机械 | 更新时间：2020-07-07

- 米级弯月面化学薄膜涂覆装备的研制
- Meter-scale thin film coating equipment based on meniscus-coating technology
- 光学精密工程 2017年25卷第1期页码：133-140
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2.中国科学技术大学, 安徽合肥 230026
  3.中国科学院西安光学精密机械研究所, 陕西西安 710119
- 作者简介：
  
  [ "徐佳(1984-),男,吉林长春人,博士,2008年于长春理工大学获得学士学位,2014年于长春理工大学获得博士学位,现为中科院长春光机所博士后,主要从事微纳加工及光刻技术方面的研究。E-mail:xujia728@163.com" ]
  鱼卫星(1975-),男,陕西临潼人,研究员,1998年于西北工业大学获学士学位,2001年于中科院长春光机所获理学硕士学位,2004年于新加坡南洋理工大学获博士学位,主要研究领域包括亚波长光学、微纳光学、表面等离子体光学、微细加工技术、三维微纳加工技术等。E-mail:yuwx@opt.ac.cn E-mail:yuwx@opt.ac.cn
- 基金信息：
  
  国际科技重大专项资助项目(No.2013ZX04001000-214);国家自然科学基金资助项目(No.11504369);2014年吉林省博士后科研项目
- DOI：10.3788/OPE.20172501.0133
  中图分类号： TB853.29
- 收稿日期：2016-06-20，
  
  录用日期：2016-8-5，
  
  纸质出版日期：2017-01-25
- 稿件说明：
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徐佳, 许文斌, 卜和阳, 等. 米级弯月面化学薄膜涂覆装备的研制[J]. 光学精密工程, 2017,25(1):133-140.

Jia XU, Wen-bin XU, He-yang BU, et al. Meter-scale thin film coating equipment based on meniscus-coating technology[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 133-140.
徐佳, 许文斌, 卜和阳, 等. 米级弯月面化学薄膜涂覆装备的研制[J]. 光学精密工程, 2017,25(1):133-140. DOI： 10.3788/OPE.20172501.0133.

Jia XU, Wen-bin XU, He-yang BU, et al. Meter-scale thin film coating equipment based on meniscus-coating technology[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 133-140. DOI： 10.3788/OPE.20172501.0133.

摘要

弯月面化学涂膜技术因其具有大面积、低成本以及高效率等优势成为继旋涂、喷涂等传统涂膜工艺后极具发展潜力的新型化学薄膜涂覆技术。本文针对国家某重大项目对米级光学元件表面的化学薄膜涂覆需求，对基于弯月面涂胶的技术原理进行了系统研究，分析了涂胶压强、基片和狭缝间距以及材料亲疏水性与涂胶面形态的关系，实现了对弯月液面的精密调控并研制出基于弯月面化学薄膜涂覆技术的装备，在1 400 mm×420 mm尺寸玻璃基片上实现了光刻胶的均匀涂覆，使整体胶膜厚度误差<4%，满足了米级元件表面精密化学薄膜的涂覆需求。

Abstract

The meniscus chemical coating technology becomes a very promising new chemical thin-film coating technology after traditional coating technologies such as spin-coating and spray coating due to its merits of large area

low-cost and high efficiency. To meet the requirements of one national major projects on the meter-scale chemical thin film coating of optical component surface

based on the systematical research of the meniscus chemical film coating principal

static and dynamic gluing experiments were respectively conducted

and the relationships among the gluing pressure

the gap between substrate and slit

the material hydrophobicity and the morphology of meniscus were analyzed

then the fine tuning of the meniscus could be achieved and equipment based on the meniscus chemical thin film coating technology was developed. The coating uniformity of photo-resist was realized using this equipment on the glass substrate sizing 1 400 mm×420 mm

making overall coating thickness error less than 4% and satisfying coating requirements of meter-scale chemical precision thin film coating of optical component surface.

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