薄膜谐振Lamb波传感器测量液体流速矢量的方法

孔慧; 李传宇; 周连群; 姚佳; 唐玉国; 郭振; 张威

doi:10.3788/OPE.20172501.0155

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薄膜谐振Lamb波传感器测量液体流速矢量的方法

微纳技术与精密机械 | 更新时间：2020-07-07

- 薄膜谐振Lamb波传感器测量液体流速矢量的方法
- A method for fluid velocity vector measurement using thin film Lamb wave resonator
- 光学精密工程 2017年25卷第1期页码：155-162
- 作者机构：
  
  1.上海大学机电工程与自动化学院, 上海 200000
  2.中国科学院苏州生物医学工程技术研究所, 江苏苏州 215163
- 作者简介：
  
  [ "孔慧(1990-),女,山东济宁人,2014年攻读中国科学院苏州生物医学工程技术研究所与上海大学的联合培养学生,主要从事Lamb波传感器的设计、制作与流体相互作用研究。E-mail:1017882997@qq.com" ]
  周连群(1981-),男,山东金乡人,中法双博士,研究员,博士生导师,主要从事微纳生物传感器及系统研究。E-mail:zhoulq@sibet.ac.cn E-mail:zhoulq@sibet.ac.cn
- 基金信息：
  
  国家863高技术研究发展计划资助项目(No.2015AA042603)
- DOI：10.3788/OPE.20172501.0155
  中图分类号： TB853.29
- 收稿日期：2016-08-20，
  
  录用日期：2016-9-17，
  
  纸质出版日期：2017-01-25
- 稿件说明：
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孔慧, 李传宇, 周连群, 等. 薄膜谐振Lamb波传感器测量液体流速矢量的方法[J]. 光学精密工程, 2017,25(1):155-162.

Hui KONG, Chuan-yu LI, Lian-qun ZHOU, et al. A method for fluid velocity vector measurement using thin film Lamb wave resonator[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 155-162.
孔慧, 李传宇, 周连群, 等. 薄膜谐振Lamb波传感器测量液体流速矢量的方法[J]. 光学精密工程, 2017,25(1):155-162. DOI： 10.3788/OPE.20172501.0155.

Hui KONG, Chuan-yu LI, Lian-qun ZHOU, et al. A method for fluid velocity vector measurement using thin film Lamb wave resonator[J]. Editorial office of optics and precision engineeri, 2017, 25(1): 155-162. DOI： 10.3788/OPE.20172501.0155.

摘要

针对液体流速测量领域中微型流量传感器高品质因数、高灵敏度的性能要求。本文设计一种双端增强型薄膜谐振结构实现Lamb波传感器的高品质因数，利用传感器反对称模式（A

模式）在薄膜-液体界面处的消逝波实现液体流速矢量测量。所制作的双端增强型薄膜谐振Lamb传感器A

模式的主峰品质因数为703，A

模式的频率移动量与液体流速大小存在线性关系，频率移动方向与液体流动方向存在对应关系。流速实测灵敏度约为270 Hz/mm/s，传感器稳定性噪声小于0.2 Hz，流速最低检测极限值（LOD）为2.2

m/s，流量最低检测极限值（LOD）为18.3 nL/min。结果表明，双端增强型薄膜谐振Lamb波传感器可以实现液体流速高灵敏度矢量测量。

Abstract

The trend of further research of the micro flow sensor is higher quality factor and sensitivity in the field of velocity measurement. In this letter

a new type of double-ended enhanced film resonance structure was proposed to obtain high quality factor of the Lamb wave sensor. The vector measurements of the liquid flow velocity can be achieved by using the evanescent wave

which exists around the membrane-liquid interface of one antisymmetric mode(A

) of this Lamb wave sensor. The quality factor for the prominent peak of the A

mode reaches 703. There is a linear relationship between the phase frequency shifts of A

mode and the value of fluid velocity

while the direction of flow velocity can be judged by the phase frequency shifts direction. Correspondingly

the sensitivity of flow velocity measurement is about 270 Hz/mm/s. As the maximum noises of A

mode is less than 0.2 Hz

the limit of detection of the flow velocity(LOD) is 2.2

m/s and the flow rate(LOD) is 18.3 nL/min. The results demonstrate that the vector measurements of the liquid flow velocity can be actualized with high sensitivity by the double-ended enhanced Lamb wave sensor.

关键词

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