彩色共焦系统可调制色散物镜设计

崔长彩; 李煌; 余卿; 叶瑞芳

doi:10.3788/OPE.20172504.0875

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彩色共焦系统可调制色散物镜设计

现代应用光学 | 更新时间：2020-07-07

- 彩色共焦系统可调制色散物镜设计
- Design of adjustable dispersive objective lens for chromatic confocal system
- 光学精密工程 2017年25卷第4期页码：875-883
- 作者机构：
  
  1.华侨大学制造工程研究院, 福建厦门 361021
  2.华侨大学机电及自动化学院, 福建厦门 361021
  3.上海理工大学光电信息与计算机工程学院上海市现代光学系统重点实验室, 上海 200093
- 作者简介：
  
  [ "崔长彩 (1972-), 女, 山东胶南人, 教授, 博士生导师, 1996年于佳木斯大学获得学士学位, 2003年于哈尔滨工业大学获得博士学位, 2005-2009年于华中科技大学机械工程博士后流动站从事博士后研究, 2011-2012年英国HUDDERSFIELD大学精密技术中心访问学者, 主要从事表面形貌评定技术、表面形貌测量技术及自动测量仪器的研究。E-mail:cuichc@hqu.edu.cn" ]
  余卿 (1983-), 男, 江西新余人, 博士, 副教授, 2005年、2011年于合肥工业大学分别获得学士、博士学位, 2014年至今在上海理工大学光学工程博士后流动站从事博士后研究, 主要从事光电检测、精密机械设计方面的研究。E-mail:yuqing@hqu.edu.cnYU Qing,E-mail:yuqing@hqu.edu.cn
- 基金信息：
  
  福建省科技计划项目-对外合作项目(2015I0004);厦门市科技计划项目-对台科技合作项目(3502Z20151232);大连理工大学精密与特种加工教育部重点实验室研究基金资助项目(JMTZ201503)
- DOI：10.3788/OPE.20172504.0875
  中图分类号： TN247
- 收稿日期：2016-12-09，
  
  录用日期：2017-1-24，
  
  纸质出版日期：2017-04-25
- 稿件说明：
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崔长彩, 李煌, 余卿, 等. 彩色共焦系统可调制色散物镜设计[J]. 光学精密工程, 2017,25(4):875-883.

Chang-cai CUI, Huang LI, Qing YU, et al. Design of adjustable dispersive objective lens for chromatic confocal system[J]. Optics and precision engineering, 2017, 25(4): 875-883.
崔长彩, 李煌, 余卿, 等. 彩色共焦系统可调制色散物镜设计[J]. 光学精密工程, 2017,25(4):875-883. DOI： 10.3788/OPE.20172504.0875.

Chang-cai CUI, Huang LI, Qing YU, et al. Design of adjustable dispersive objective lens for chromatic confocal system[J]. Optics and precision engineering, 2017, 25(4): 875-883. DOI： 10.3788/OPE.20172504.0875.

摘要

针对彩色共焦距测量系统中测量范围和分辨率的调制问题，采用色散和聚焦功能分离的思路设计了一款色散物镜，其色散功能由纯球面折射透镜组成的色散管镜来实现，聚焦功能则采用商业物镜实现。使用ZEMAX软件对色散管镜的结构、材料及像差进行了设计及优化，仿真结果显示所设计的色散管镜在可见光范围内能获得优于230 mm的轴向线性色散，实际加工的成品管镜的轴向线性色散范围可达160 mm。实验测量了色散管镜及它结合不同聚焦物镜后的色散特性。实验结果表明，色散管镜结合不同聚焦能力的物镜能够具有高线性度的轴向色散区域；结合4倍和10倍放大倍率的商用物镜，分别获得了1 300

m和225

m的测量范围，其轴向分辨率分别为2

m和0.4

m，实现了测量范围和分辨率的调制。

Abstract

Aiming at the adjustment of measuring range and resolution in Chromatic Confocal Microscopy (CCM)

a dispersive objective for chromatic confocal system was designed

which can realize chromatic dispersion and focusing function separately. The chromatic dispersion was achieved through a dispersion tube lens

which was composed of pure spherical refraction lens. The focusing function was accomplished by a commercial objective lens. The structure

material and aberrations of the dispersive tube lens were designed and optimized by ZEMAX software. The simulation shows that the axial linear chromatic dispersion is better than 230 mm in visible waveband. Moreover the axial linear dispersion range of the finished tube lens can be up to 160 mm. The dispersion characteristics of the tube lens combined with different focusing objective lenses were determined experimentally. The results show that the axial dispersion region with high linearity can be maintained in the case of different focusing objective lens. With commercial objective lens of 4x and 10x magnification

the measurement ranges of 1 300

m and 225

m are obtained with axial resolution of 2

m and 0.4

m respectively. Thus

the modulation of measurement range and resolution is achieved.

关键词

Keywords

references

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