磁致伸缩压力传感器设计及其输出特性

王博文; 王启龙; 韩建晖; 万丽丽; 曹淑瑛; 王宁; 刘华平

doi:10.3788/OPE.20172504.0928

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磁致伸缩压力传感器设计及其输出特性

微纳技术与精密机械 | 更新时间：2020-07-07

- 磁致伸缩压力传感器设计及其输出特性
- Design of magnetostrictive pressure sensor and its output characteristics
- 光学精密工程 2017年25卷第4期页码：928-933
- 作者机构：
  
  1.河北工业大学电磁场与电器可靠性省部共建重点实验室, 天津 300130
  2.清华大学计算机科学与技术系, 智能技术与系统国家重点实验室, 北京 100084
- 作者简介：
  
  王博文 (1956-) 男, 辽宁沈阳人, 教授, 博士生导师, 1995年于中国科学院金属研究所获博士学位, 1997年于东北大学完成博士后研究工作, 主要从事磁性材料与器件的研究工作。E-mail:bwwang@hebut.edu.cn WANG Bo-wen, E-mail:bwwang@hebut.edu.cn
  [ "王启龙 (1990-) 男, 山东临沂人, 硕士研究生, 2014年于山东农业大学获得学士学位, 2017年于河北工业大学获得硕士学位, 研究方向为新型磁性材料与器件。E-mail:343466771@qq.com" ]
- 基金信息：
  
  国家自然科学基金资助项目(No.51171057);河北省自然科学基金资助项目(No.E2016202034);河北省高等学校科学技术研究重点项目(No.ZD2016004)
- DOI：10.3788/OPE.20172504.0928
  中图分类号： TP212.12
- 收稿日期：2016-06-30，
  
  录用日期：2016-9-19，
  
  纸质出版日期：2017-04-25
- 稿件说明：
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王博文, 王启龙, 韩建晖, 等. 磁致伸缩压力传感器设计及其输出特性[J]. 光学精密工程, 2017,25(4):928-933.

Bo-wen WANG, Qi-long WANG, Jian-hui HAN, et al. Design of magnetostrictive pressure sensor and its output characteristics[J]. Optics and precision engineering, 2017, 25(4): 928-933.
王博文, 王启龙, 韩建晖, 等. 磁致伸缩压力传感器设计及其输出特性[J]. 光学精密工程, 2017,25(4):928-933. DOI： 10.3788/OPE.20172504.0928.

Bo-wen WANG, Qi-long WANG, Jian-hui HAN, et al. Design of magnetostrictive pressure sensor and its output characteristics[J]. Optics and precision engineering, 2017, 25(4): 928-933. DOI： 10.3788/OPE.20172504.0928.

摘要

研究了铁镓合金（Galfenol）的磁致伸缩特性，提出一种基于Galfenol的新型磁致伸缩压力传感器，以实现机器人的触觉力精确感知。该传感器利用磁致伸缩逆效应将压力转换为电压信号，从而完成对压力的精确测量。设计、制作了磁致伸缩压力传感器，采用双永磁体回形磁路优化了压力传感器的磁场。对传感器进行了理论分析与实验研究，讨论了偏置条件、外压力等因素对输出电压峰值的影响。实验结果表明，在偏置磁场为4.8 kA/m、施加的压力为2.5 Hz、6 N时，传感器的输出电压峰值达16 mV，且输出电压峰值与压力呈较好的线性关系。研制的传感器具有结构简单、线性度好、反应速度快等特点，可以满足机器人触觉感知的需求，也可应用于其他领域的压力测量。

Abstract

Magnetostrictive characteristics of Galfenol were researched and a new type of magnetostrictive pressure sensor based on the Galfenol was proposed to implement the accurate perception of tactile sensation for robots. The sensor converts a pressure signal into a voltage signal based on magnetostrictive inverse effect to implement the accurate measurement of the pressure. The magnetostrictive pressure sensor was designed and fabricated

and the magnetic field of pressure sensor was optimized by a magnetic circuit of double permanent magnets. Then

the sensor was analyzed theoretically and investigated experimentally

and the influences of bias condition

external pressure and other factors on the peak value of output voltage were discussed. The results show that when bias magnetic field is 4.8 kA/m and applied pressure is 2.5 Hz and 6 N

the peak value of output voltage reaches 16 mV and the peak value of output voltage has better linear relation with the pressure. The developed sensor is characteristics by simple structure

good linearity

and a quick response speed. It meets the requirements of tactile sensation of robots and is suitable for the pressure measurement in other fields.

关键词

Keywords

references

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