均匀光强分布的5kW半导体激光硬化光源研制

林星辰; 朱洪波; 王彪; 张亚维; 周成林; 宁永强; 王立军

doi:10.3788/OPE.20172505.1178

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均匀光强分布的5kW半导体激光硬化光源研制

现代应用光学 | 更新时间：2020-07-07

- 均匀光强分布的5kW半导体激光硬化光源研制
- Development of 5kW diode laser hardening source with homogenized intensity distribution
- 光学精密工程 2017年25卷第5期页码：1178-1184
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2.江苏华博数控设备有限公司, 江苏淮安 223100
- 作者简介：
  
  [ "林星辰(1988-), 女, 助理研究员, 2014年于哈尔滨工程大学获得硕士学位, 主要从事激光技术应用、激光控制等方面的研究。E-mail:linstars123@163.com" ]
  朱洪波(1984-), 男, 吉林长春人, 博士, 2012年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事大功率半导体激光加工光源的研制。E-mail:zhbciomp@163.com ZHU Hong-bo, E-mail:zhbciomp@163.com
- 基金信息：
  
  国家自然科学基金资助项目(61306059);国家自然科学基金资助项目(61674149)
- DOI：10.3788/OPE.20172505.1178
  中图分类号： TN248.4
- 收稿日期：2016-12-15，
  
  录用日期：2017-1-20，
  
  纸质出版日期：2017-05-25
- 稿件说明：
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林星辰, 朱洪波, 王彪, 等. 均匀光强分布的5kW半导体激光硬化光源研制[J]. 光学精密工程, 2017,25(5):1178-1184.

Xing-chen LIN, Hong-bo ZHU, Biao WANG, et al. Development of 5kW diode laser hardening source with homogenized intensity distribution[J]. Optics and precision engineering, 2017, 25(5): 1178-1184.
林星辰, 朱洪波, 王彪, 等. 均匀光强分布的5kW半导体激光硬化光源研制[J]. 光学精密工程, 2017,25(5):1178-1184. DOI： 10.3788/OPE.20172505.1178.

Xing-chen LIN, Hong-bo ZHU, Biao WANG, et al. Development of 5kW diode laser hardening source with homogenized intensity distribution[J]. Optics and precision engineering, 2017, 25(5): 1178-1184. DOI： 10.3788/OPE.20172505.1178.

摘要

随着半导体激光自身输出功率和转换效率的提升，半导体激光已经广泛的应用于激光加工领域。本文针对目前激光加工领域对半导体激光硬化光源的需求，研制了波长为976 nm的连续输出半导体激光硬化光源。该光源采用空间/偏振合束工艺达到了较高的合束效率，采用柱面微透镜阵列分割与聚焦镜复合较好地匀化了巴条激光器慢轴方向固有的光强起伏，使聚焦光斑的光强呈平顶分布。最后对该光源进行了实验装调和测试。结果表明，在工作电流为93 A时，光源的最大输出功率为5 120W，电光转换效率达47%，光斑尺寸为2 mm×16 mm，光斑分布为平顶分布，平整度大于90%，满足工业中对大面积、高效率激光硬化的要求。

Abstract

With the improvement of self output power and conversion efficiency

semiconductor lasers have been widely used in laser processing field. Aiming at current requirement for hardening light source of semiconductor laser in laser processing field

a continuous output hardening light source of semiconductor laser with a wavelength of 976 mm was developed. The light source reached higher beam combination efficiency by adopting space/polarization beam combination technique

and better homogenized inherent light intensity fluctuation along slow axis for laser bar by adopting array division of cylindrical micro lens combined with focusing lens

thus making light intensity of focus spots flatly distributed. Finally

the light source was adjusted and tested experimentally. The results show that when the working current is 93 A

the maximum output power of the light source is 5 120 W

the electro-optical conversion efficiency reaches 47%

the spot size is 2 mm×16 mm and the flatness of the spot distribution is over 90%

which meet the requirement for large-scale high efficiency laser hardening in industry.

关键词

Keywords

references

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