零差移频式干涉图形相位锁定系统的超精密控制

王磊杰; 张鸣; 鲁森; 杨开明

doi:10.3788/OPE.20172505.1213

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零差移频式干涉图形相位锁定系统的超精密控制

微纳技术与精密机械 | 更新时间：2020-07-07

- 零差移频式干涉图形相位锁定系统的超精密控制
- Ultra-precision control of homodyne frequency-shifting interference pattern phase locking system
- 光学精密工程 2017年25卷第5期页码：1213-1221
- 作者机构：
  
  清华大学机械工程系摩擦学国家重点实验室精密超精密制造装备及控制北京市重点实验室, 北京 100084
- 作者简介：
  
  [ "王磊杰(1988-), 男, 河南周口人, 博士后, 助理研究员, 2010年于中国矿业大学(北京)获得学士学位, 2016年于清华大学获得博士学位, 主要从事基于扫描干涉光刻的大口径光栅制造技术、超精密光栅干涉仪位移测量技术和超精密激光干涉仪位移测量技术的研究。E-mail:wang-lj66@mail.tsinghua.edu.cn" ]
  张鸣(1973-), 男, 吉林扶余人, 副研究员, 1996年于北京科技大学获得学士学位, 1999年于中国运载火箭研究院13所获得硕士学位, 2005年于清华大学获得博士学位, 主要从事高端光刻机超精密工件台的研究, 涉及超精密工件台系统设计以及结构设计、超精密制造工艺、高性能驱动、超精密测量及超精密环境保障等工件台研发的核心技术。E-mail:zm01@mails.tsinghua.edu.cn ZHANG Ming, E-mail:zm01@mails.tsinghua.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(51677104);中国博士后科学基金资助项目(2017M610885)
- DOI：10.3788/OPE.20172505.1213
  中图分类号： TN305.7;O438.1
- 收稿日期：2016-10-24，
  
  录用日期：2016-12-16，
  
  纸质出版日期：2017-05-25
- 稿件说明：
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王磊杰, 张鸣, 鲁森, 等. 零差移频式干涉图形相位锁定系统的超精密控制[J]. 光学精密工程, 2017,25(5):1213-1221.

Lei-jie WANG, Ming ZHANG, Sen LU, et al. Ultra-precision control of homodyne frequency-shifting interference pattern phase locking system[J]. Optics and precision engineering, 2017, 25(5): 1213-1221.
王磊杰, 张鸣, 鲁森, 等. 零差移频式干涉图形相位锁定系统的超精密控制[J]. 光学精密工程, 2017,25(5):1213-1221. DOI： 10.3788/OPE.20172505.1213.

Lei-jie WANG, Ming ZHANG, Sen LU, et al. Ultra-precision control of homodyne frequency-shifting interference pattern phase locking system[J]. Optics and precision engineering, 2017, 25(5): 1213-1221. DOI： 10.3788/OPE.20172505.1213.

摘要

利用全息曝光法制造大口径全息平面光栅时，常引入零差移频式干涉图形相位锁定系统来提高全息曝光质量。本文针对直接影响最终干涉曝光精度的系统控制精度开展研究。首先，介绍了新型的零差移频式干涉图形锁定系统的原理和结构，在系统理论建模及模型辨识的基础上，针对非线性系统模型进行了高阶线性化拟合，并结合系统振动测试实验结果，设计了系统控制器。然后，对设计的控制器进行了实际控制调试，实现了系统的超精密控制。最后，针对系统控制误差纹波，采用频域分析方法揭示了影响系统控制精度的主要因素，提出了未来提升系统控制精度的方法。测试结果显示：系统相位锁定控制精度可达±0.046 1 rad（3

）且以高频误差纹波形式呈现。分析了高频误差纹波的成因，指出受系统噪声、延迟、控制器参数等因素限制，控制器很难完全抑制频段跨度大而连续的高频微振动引起的干涉图形相位漂移。

Abstract

When larger aperture holographic plane gratings are fabricated by the holographic exposure method

the homodyne frequency-shifting interference pattern phase locking system usually is used to improve the holographic exposure quality. This paper focuses on the ultra-precision control of the system. Firstly

the principles and structures of a novel homodyne frequency-shifting interference pattern phase locking system were introduced. The high-order linear model was fitted for a nonlinear model of the system based on the theoretical modeling and system identification and a controller of the system was designed by combining the fitting model and the system vibration test result. Then

an actual controlling test was performed based on the design result of the controller to implement the ultra-precision control of the system. Finally

an analysis method on frequency domain was used to explore the effect factors on control precision for the ripple wave in the system. The experiment results demonstrate that the controlling error of the system has reached to ±0.046 1 rad(3

) and it shows high frequency error ripple wave. The causes of the high frequency error were researched

and the results indicate that limited to the noise

delay of the system and controller parameters

the drift of the interference pattern caused by continuous micro-vibration with a wide frequency range can not be completely restrained by the controller.

关键词

Keywords

references

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