超润滑石墨表面的光谱表征研究

史云胜; 刘秉琦; 杨兴

doi:10.3788/OPE.20172506.1513

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超润滑石墨表面的光谱表征研究

微纳技术与精密机械 | 更新时间：2020-07-07

- 超润滑石墨表面的光谱表征研究
- Research on spectral characterization of superlubricity graphite surface
- 光学精密工程 2017年25卷第6期页码：1513-1518
- 作者机构：
  
  1.军械工程学院电子与光学工程系, 河北石家庄 050003
  2.清华大学精密仪器系, 北京 100084
- 作者简介：
  
  [ "史云胜(1987-), 男, 内蒙古通辽人, 博士研究生, 2010年于清华大学获得学士学位, 2013年于军械工程学院获得硕士学位, 现为军械工程学院博士研究生, 主要从事光谱检测及微纳器件研究。E-mail:shiysthu@126.com" ]
  杨兴(1974-), 男, 辽宁鞍山人, 副研究员, 1998年于哈尔滨工业大学获得硕士学位, 2001年于大连理工大学获得博士学位, 现为清华大学精密仪器系副研究员, 主要从事微/纳传感器与执行器、微流体器件、精密测试等方面研究。E-mail:yangxing@tsinghua.edu.cn YANG Xing, E-mail: yangxing@tsinghua.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(51375263)
- DOI：10.3788/OPE.20172506.1513
  中图分类号： O433.4
- 收稿日期：2016-10-10，
  
  录用日期：2017-1-16，
  
  纸质出版日期：2017-06-25
- 稿件说明：
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史云胜, 刘秉琦, 杨兴. 超润滑石墨表面的光谱表征研究[J]. 光学精密工程, 2017,25(6):1513-1518.

Yun-sheng SHI, Bing-qi LIU, Xing YANG. Research on spectral characterization of superlubricity graphite surface[J]. Optics and precision engineering, 2017, 25(6): 1513-1518.
史云胜, 刘秉琦, 杨兴. 超润滑石墨表面的光谱表征研究[J]. 光学精密工程, 2017,25(6):1513-1518. DOI： 10.3788/OPE.20172506.1513.

Yun-sheng SHI, Bing-qi LIU, Xing YANG. Research on spectral characterization of superlubricity graphite surface[J]. Optics and precision engineering, 2017, 25(6): 1513-1518. DOI： 10.3788/OPE.20172506.1513.

摘要

为探寻解决微/纳机电系统中摩擦和磨损等界面效应问题的理想新方法，研究了石墨接触界面对石墨超润滑的影响及阻力来源。首先，利用电子束曝光、反应离子束刻蚀等微加工方法制备了微米级石墨平台，并使用微纳机械手推动石墨平台获得了具有超润滑特性的石墨表面。然后使用拉曼光谱、纳米级红外光谱和原子力显微镜对获得的超润滑石墨表面进行表征。最后使用了能谱仪对石墨平台进行了微区元素分析。结果表明，超润滑石墨表面具有原子级光滑的平整度，并具有极高的有序度，而石墨表面的边缘具有多种缺陷并在加工过程中及大气环境中吸附了多种分子，边缘的氧原子含量比面内氧原子含量高出了24.2%。推动石墨平台的过程中，边缘吸附分子会阻碍超润滑石墨接触界面发生相对滑动，克服这些分子的吸附需要能量，这成为摩擦阻力的来源。

Abstract

In order to seek for a new ideal method to solve friction

abrasion and other interfacial effect problems in micro/nano electro mechanical system

the influence of graphite contact interfaces on graphite superlubricity and the sources of resistance were researched. First

the electron beam lithography

ion beam etching and other micro-processing methods were used to prepare microscale graphite mesa

and graphite surface with superlubricity was obtained by using micro-nano manipulator to shear the graphite mesa. Then

the Raman spectrum

nanoscale infrared spectrum and atomic force microscope were used to characterize the surface of the obtained superlubricity graphite. Finally

energy dispersive spectrometer was taken to analyze micro-area elements in graphite platform. The result shows that the surface of superlubricity graphite has atomically smooth flatness and has high order degree

but there are multiple defects on the edge of the graphite surface; and multiple molecules are absorbed on the surface of the graphite in the process of machining and in the atmospheric environment. The content of marginal oxygen atom is 24.2% higher than the content of in-plane oxygen atom. In the process of pushing graphite platform

the marginally absorbed molecule will hinder the relative sliding of contact interface of superlubricity graphite. Moreover

energy is needed to overcome the absorption of these molecules

which becomes the source of frictional resistance.

关键词

Keywords

references

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