敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析

李华; 郭超群; 蒋林秀; 蒋永荣; 朱健铭; 肖文香; 韦宛伶; 陈真诚

doi:10.3788/OPE.20172506.1567

您当前的位置：

首页 >

文章列表页 >

敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析

微纳技术与精密机械 | 更新时间：2020-07-07

- 敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析
- Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump
- 光学精密工程 2017年25卷第6期页码：1567-1576
- 作者机构：
  
  1.桂林电子科技大学生命与环境科学学院, 广西桂林, 541004
  2.广西信息科学实验中心, 广西桂林, 541004
- 作者简介：
  
  [ "李华(1978-), 男, 湖南郴州人, 博士, 教授, 硕士生导师, 2001年、2004年于中北大学分别获得学士、硕士学位, 2007年于北京理工大学获得博士学位, 2010年于清华大学仪器科学与技术博士后流动站出站, 目前主要从事微型生化分析仪器和MEMS等的研究。E-mail:lihua@guet.edu.cn" ]
  [ "郭超群(1993-), 女, 湖南株洲人, 硕士研究生, 2014年于吉首大学获得学士学位, 目前主要从事微型分析仪器的研究。E-mail:15107429521@163.com" ]
  陈真诚, E-mail: chenzhcheng@163.com CHEN Zhen-cheng, E-mail: chenzhcheng@163.com
- 基金信息：
  
  国家自然科学基金青年基金项目(61204120);广西自然科学基金面上项目(2015GXNSFAA139304);广西自然科学基金青年基金项目(2013GXNSFBA019273);国家级大学生创新项目(XY290406);广西高等教育教学改革工程项目(2014GJB144);广西自动检测技术与仪器重点实验室基金项目(YQ15114);广西信息科学实验中心资助项目(YB1420);桂林电子科技大学研究生教育创新计划资助项目(2017YJCX86);广西物联网技术及产业化推进协同创新中心资助项目(WLW20060503);广西物联网技术及产业化推进协同创新中心资助项目(WLW20060504)
- DOI：10.3788/OPE.20172506.1567
  中图分类号： TH83
- 收稿日期：2016-10-24，
  
  录用日期：2017-1-16，
  
  纸质出版日期：2017-06-25
- 稿件说明：
移动端阅览
李华, 郭超群, 蒋林秀, 等. 敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析[J]. 光学精密工程, 2017,25(6):1567-1576.

Hua LI, Chao-qun GUO, Lin-xiu JIANG, et al. Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump[J]. Optics and precision engineering, 2017, 25(6): 1567-1576.
李华, 郭超群, 蒋林秀, 等. 敞开式离子源和微型气泵集成的微型针-柱放电结构芯片设计与实验分析[J]. 光学精密工程, 2017,25(6):1567-1576. DOI： 10.3788/OPE.20172506.1567.

Hua LI, Chao-qun GUO, Lin-xiu JIANG, et al. Design and experiment analysis for micro needle-cylinder discharge chip integrated by open-type ion source and micro pump[J]. Optics and precision engineering, 2017, 25(6): 1567-1576. DOI： 10.3788/OPE.20172506.1567.

摘要

采用LIGA（Lithographie，Galvanoformung，Abformung）工艺设计加工了一种微型针-柱放电结构芯片，可实现敞开式离子源和微型气泵的系统集成。此微型放电结构由采用电镀铜加工而成的针电极、上圆柱电极和下圆柱电极组成，针-柱间距有1 mm、2 mm两种规格。在室温、大气压环境、无外界通入气流的条件下，通过在针-柱电极上加载负直流高压，可产生稳定的气体放电。利用风速计testo 405-V1测量芯片气体放电产生的离子风风速，结果表明针-柱间距为2 mm时产生的离子风流速最大，可达0.79m/s。对针-柱间距2mm规格的微型芯片进行乙酸进样电离实验，当针-柱之间产生稳定的电晕放电后，可发现位于芯片出口处已被去离子水润湿的PH试纸变红。此时利用微弱电流检测系统采集电离产生的离子，当放电电压为-3300V时，通过微弱电流采集系统检测到的电流信号可达120pA。采用LTQ XL离子阱质谱仪，对芯片电离丙酮、无水乙醇和乙酸乙酯的离子产物进行检测，所得到的主要物质为质子化单体离子和二聚物离子。放电产生离子风风速以及乙酸的进样和电离实验表明，基于LIGA的微型针-柱结构芯片可实现大气压环境下敞开式离子源和微型气泵的双重功能。

Abstract

The LIGA (Lithographie

Galvanoformung

Abformung) technology was adopted to design and process a micro needle-cylinder discharge structure chip

by doing this

system integration of open-type ion source and micro air pump was realized. The micro discharge structure was composed of pin electrode

upper cylinder electrode and bottom cylinder electrode which were fabricated by copper electroplating. There were two types of needle-cylinder clearances

separately were 1 mm and 2 mm. Under the condition of room temperature

atmospheric pressure environment and no airflow from outside

by loading negative direct current and high voltage on the needle-cylinder electrode

stable gas discharge could be generated. The wind speed of ionic wind caused by chip gas discharge could be measured through testo 405-V1 anemometer. The result shows that if the needle-cylinder clearance is 2 mm

the maximum flow velocity of the ionic wind will reach 0.79 m/s. Acetic acid sample injection ionization experiment of microchip with the needle-cylinder clearance of 2 mm was conducted. We found that when there was stable corona discharge between needle and cylinder

PH test paper located at the chip exit and has been moistened by de-ionized water would be red. At this time

the weak current detection system was used to collect ions generated by ionization

if the discharge voltage was -3 300 V

the current signal detected by weak current collection system reached 120 pA. LTQ XL ion trap mass spectrometer was applied to detect products of ions for chip ionization acetone

absolute ethyl alcohol and ethyl acetate

the main obtained substances were protonation monomer ion and biopolymer ion. Speed of ionic wind generated by discharge and sample injection and ionization of acetic acid experiments show that dual functions of open-type ion source and micro air pump can be realized under atmospheric pressure environment based on LIGA micro needle-cylinder structure chip.

关键词

Keywords

references

SABO M, KLAS M, WANG H, et al.. Positive corona discharge ion source with IMS/MS to detect, impurities in high purity Nitrogen [J]. European Physical Journal Applied Physics, 2011, 55(1):532-542.

KUDRYAVTSEV A, MAKAS A, TROSHKOV M. The Features of corona discharge ion source for various classes of substances [J]. International Journal for Ion Mobility Spectrometry, 2003, 6:207-211.

LIU X, LI SH L, LI M SH. Factors influencing the electron yield of needle-ring pulsed corona discharge electron source for negative Ion mobility spectrometer [J]. Plasma Science & Technology, 2013, 15(12):1215-1220.

栗大超, 李国卿, 檀景辉, 等.采用脉冲电晕放电离子源的离子迁移谱仪[J].光学精密工程, 2013, 21(12):3095-3101.

LI D CH, LI G Q, TAN J H, et al.. Ion mobility spectrometer using pulse corona discharge ion source [J]. Opt. Precision Eng., 2013, 21(12):3095-3101.

刘坤, 廖峥, 侯世英, 等.大气压直流辉光放电装置的实验与分析[J].重庆大学学报, 2013, 36(3): 71-76.

LIU K, LIAO ZH, HOU SH Y, et al.. Experiment and analysis of an atmospheric DC glow discharge device [J]. Journal of Chongqing University, 2013, 36(3):71-76.

唐飞, 王晓浩, 刘坤, 等.敞开式小型线-筒电极负电晕放电离子源[J].光学精密工程, 2009, 17(8): 1953-1957.

TANG F, WANG X H, LIU K, et al.. Ambient negative corona discharge ion source with small line-cylinder electrodes [J]. Opt. Precision Eng., 2009, 17(8): 1953-1957.(in Chinese)

LIU K, WANG X H, FEI T, et al.. Realization of atmospheric pressure glow discharge ion source in small gap with precise electrode structure[J]. Nami Jishu Yu Jingmi Gongcheng/nanotechnology & Precision Engineering, 2010, 8(3):189-194.

GUO CH A, TANG F, CHEN J, et al.. Development of dielectric barrier discharge ionization technique [J]. Analytical and Bioanalytical Chemistry, 2015, 407(9):2345-2364.

LI H, GUO CH Q, LI Y K, et al.. Effects of atmospheric-pressure discharge type on ionic wind velocity for needle-to-cylinder electrode [J]. Journal of Vacuum Science & Technology A, 2016, 34:031308-1-031308-8.

李华, 韦昌严, 曾德查, 等.针-柱结构敞开式离子源和微型气泵集成系统的放电特性[J].光学精密工程, 2014, 22(6):1531-1537.

LI H, WEI CH Y, ZENG D CH, et al.. Discharge properties of integrated system of ambient ion source and micro air pump based on needle-to-cylinder structure[J]. Opt. Precision Eng., 2014, 22(6):1531-1537.

李华, 李玉凯, 郭超群, 等.利用离子风实现后吸式进样与电离集成的离子源[J].光学精密工程, 2015, 23(12):3405-3413.

LI H, LI Y K, GUO CH Q, et al.. Ion source with posterior suck sampling and ionization by ionic wind [J]. Opt. Precision Eng., 2015, 23(12): 3405-3413.

李华, 李玉凯, 郭超群, 等.采用离子风实现敞开式离子源和微型气泵集成系统的设计与实验[J].真空科学与技术学报, 2015, 35(9):1112-1118.

LI H, LI Y K, GUO CH Q, et al.. Integration of ion source and micro pump with ionic wind [J]. Chinese Journal of Vacuum Science and Technology, 2015, 35(9):1112-1118.

郭超群, 陈耀彬, 李玉凯, 等.小间隙针-柱结构电晕放电和辉光放电实现离子风的特性[J].纳米技术与精密工程, 2016, 14(2):112-117.

GUO CH Q, CHEN Y B, LI Y K, et al.. Characteristics of ionic wind realized by corona discharge and glow discharge with a small gap needle-cylinder structure [J]. Nanotechnology and Precision Engineering, 2016, 14(2):112-117.

孔祥东, 张玉林, 宋会英. LIGA工艺的发展及应用[J].微纳电子技术, 2004, 41(5):13-18.

KONG X D, ZHANG Y L, SONG H Y. Development and application of LIGA technology[J]. Micronanoelectronic Technology, 2004, 41(5):13-18.

南雪莉, 张斌珍, 张少华, 等.基于UV-LIGA工艺的酸性电铸铜溶液最优化配比[J].科学技术与工程, 2014, 14(29):265-270.

NAN X L, ZHANG B ZH, ZHANG SH H, et al.. The optimal ratio of acid copper electroforming solution based on UV-LIGA process [J]. Science Technology and Engineering, 2014, 14(29):265-270.

LI H, WANG X H, TANG F, et al.. Separation of ions from volatile organic compounds using high-field asymmetric waveform ion mobility spectrometry-mass spectrometer [J]. Chinese Journal of Chemical Physics, 2010, 23(2):125-132.

浏览量

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

利用离子风实现后吸式进样与电离集成的离子源

针-柱结构敞开式离子源和微型气泵集成系统的放电特性

采用脉冲电晕放电离子源的离子迁移谱仪