基于光学傅里叶变换的周期性微结构缺陷检测

董明利; 李波; 张帆; 孙鹏

doi:10.3788/OPE.20172507.1727

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基于光学傅里叶变换的周期性微结构缺陷检测

现代应用光学 | 更新时间：2020-07-07

- 基于光学傅里叶变换的周期性微结构缺陷检测
- Detection of periodic microstructure defect based on optical Fourier transform
- 光学精密工程 2017年25卷第7期页码：1727-1737
- 作者机构：
  
  北京信息科技大学光电测试技术北京市重点实验室, 北京 100192
- 作者简介：
  
  [ "董明利(1965-)，女，辽宁省鞍山人，教授，1989年于合肥工业大学获得硕士学位，2009年于北京理工大学获得博士学位, 主要从事视觉测量技术和生物医学检测技术方面的研究。E-mail:dongml@bistu.edu.cn" ]
  [ "李波(1992-)，男，湖北襄阳人，硕士研究生，2015年于北京信息科技大学获得学士学位，主要从事生物医学检测技术方面的研究。E-mail：boboy@mail.bistu.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(61605011);教育部创新团队项目
- DOI：10.3788/OPE.20172507.1727
  中图分类号： O438.2;TH741
- 收稿日期：2017-02-22，
  
  录用日期：2017-4-14，
  
  纸质出版日期：2017-07-25
- 稿件说明：
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董明利, 李波, 张帆, 等. 基于光学傅里叶变换的周期性微结构缺陷检测[J]. 光学精密工程, 2017,25(7):1727-1737.

Ming-li DONG, Bo LI, Fan ZHANG, et al. Detection of periodic microstructure defect based on optical Fourier transform[J]. Optics and precision engineering, 2017, 25(7): 1727-1737.
董明利, 李波, 张帆, 等. 基于光学傅里叶变换的周期性微结构缺陷检测[J]. 光学精密工程, 2017,25(7):1727-1737. DOI： 10.3788/OPE.20172507.1727.

Ming-li DONG, Bo LI, Fan ZHANG, et al. Detection of periodic microstructure defect based on optical Fourier transform[J]. Optics and precision engineering, 2017, 25(7): 1727-1737. DOI： 10.3788/OPE.20172507.1727.

摘要

为了实现大视场周期性微结构缺陷检测，提出了一种基于光学傅里叶变换（FT）的大视场周期性微结构缺陷检测方法，并搭建相关实验系统进行实验验证。首先，对周期性微结构的像进行二维快速傅里叶变换，获取周期性微结构的空间频谱；然后，选取一级衍射斑点中的一个斑点做快速傅里叶逆变换，得到周期性微结构的幅值分布图；最后，根据幅值分布图中的幅值突变位置确定缺陷的位置以及根据幅值突变的剧烈程度来定性地判断缺陷处的点偏离原来位置的位移。实验结果表明：该套系统的测量视场能达到1.5 mm×1.5 mm，测量分辨率能达到0.5 μm以上，在保证分辨率达到要求的前提下，大大地提高了检测视场，能够快速、高效、便捷地在大视场下对周期性微结构进行缺陷检测。

Abstract

In order to achieve defect detection of periodic microstructure in a large field of view

a defect detection method based on optical Fourier transform was proposed and relevant experimental system was established. Firstly

the periodic microstructure imaging was subject to two-dimensional fast Fourier transform for deriving spatial frequency spectrum of periodic microstructure. Then

a spot among first-order diffraction spots was chosen to be processed by fast Fourier transform for obtaining the amplitude histogram. According to the mutation location in the amplitude histogram

defect positions were determined. The deviation of defects was proportional to the intensity of the amplitude mutations. The experimental result shows that the system can provide a measurement field of view of 1.5 mm×1.5 mm and the measurement resolution over 0.5 μm

improving the detection field greatly on the premise of an adequate resolution. The proposed method enables fast

efficient and convenient defect detection of periodic microstructure in a large field of view.

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references

NIH B, WANG M, LI L, et al..Photonic-crystal-based optical fiber bundles and their applications[J]. IEEE Photonics Journal, 2013, 5(4):2400213.

YANG S, ZHU J G, HUANG Y L, et al..Fabrication of micro-scale gratings for Moiré method with a femtosecond laser[J]. Theoretical and Applied Mechanics Letters, 2016, 6(4):171-175.

刘杰, 铁生年, 卢辉东.多信道二维光子晶体滤波器[J].光学精密工程, 2016, 24(5):1021-1027.

LIU J, TIE SH N, LU H D. Multi-channel drop filter based on two-dimensional photonic crystal[J].Opt. Precision Eng., 2016, 24(5):1021-1027. (in Chinese)

VUCKOVI J, LONCAR M, MABUCHI H, et al..Design of photonic crystal microcavities for cavity QED[J]. Physical Review E:Statistical, Nonlinear, and Soft Matter Physics, 2001, 65(2):016608.

程轲, 王书杰, 付冬伟, 等.单晶硅表面周期性微结构的减反射特性及光伏特性[J].高等学校化学学报, 2010, 31(8):1647-1650.

CHENG K, WANG SH J, FU D W, et al..Antireflection and photovoltaic properties of microstructures design on the single crystalline silicon surface[J]. Chemical Journal of Chinese Universities, 2010, 31(8):1647-1650. (in Chinese)

ZHANG F, ANDERSON S, ZHENG X, et al..Cell force mapping using a double-sided micropillar array based on the moiré fringe method[J]. Applied Physics Letters, 2014, 105(3):033702.

FEI S, SUN Y F, SHI X Q, et al..Techniques for nano-scale deformation measurement[C]. Proceedings of the 6th Electronics Packaging Technology Conference, IEEE, 2004:729-734.

WANG Y W, FENG C, LIU X L, et al..Correction and extraction of the encoder grating image full-barcode[J]. Advanced Materials Research, 2014, 889-890:1042-1047.

WELLER R, SHEPARD B M. Displacement measurement by mechanical interferometry[J]. Proceedings of the Society for Experimental Stress Analysis, 1948, 6(1):35-38.

朱向冰, 何世平, 付绍军, 等.云纹法检测变线距光栅的线密度[J].光学精密工程, 2002, 10(3):285-289.

ZHU X B, HE SH P, FU SH J, et al..Measurement of the line-density of a varied-line-space grating by Moiré fringe[J]. Opt. Precision Eng., 2002, 10(3):285-289. (in Chinese)

IMAI T, PUTAUX J L, SUGIYAMA J. Geometric phase analysis of lattice images from algal cellulose microfibrils[J]. Polymer, 2003, 44(6):1871-1879.

胡浩, 梁晋, 唐正宗, 等.数字图像相关法测量金属薄板焊接的全场变形[J].光学精密工程, 2012, 20(7):1636-1644.

HU H, LIANG J, TANG ZH ZH, et al..Measurement of full-field deformations in metal sheet welding processes by image correlation method[J].Opt. Precision Eng., 2012, 20(7):1636-1644. (in Chinese)

HŸTCH M J, PUTAUX J L, PÉNISSON J M. Measurement of the displacement field of dislocations to 0.03Å by electron microscopy[J]. Nature, 2003, 423(6937):270-273.

HŸTCH M J, SNOECK E, KILAAS R. Quantitative measurement of displacement and strain fields from HREM micrographs[J]. Ultramicroscopy, 1998, 74(3):131-146.

BI H B, HARTSOUGH C, HAN B.Nano-pattern recognition and correlation technique for Nano-scale deformation measurement[C]. ASME 2007 InterPACK Conference collocated with the ASME/JSME 2007 Thermal Engineering Heat Transfer Summer Conference, ASME, 2007:831-838.

张登臣, 郁道银.实用光学设计方法与现代光学系统[M].北京:机械工业出版社, 1995:314-317.

ZHANG D CH, YU D Y. Practical Optical Design Method and Modern Optical System[M]. Beijing:Mechanical Industry Press, 1995:314-317. (in Chinese)

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