3-PRR平面三自由度纳米定位平台的设计

马立; 杨斌; 田应仲; 肖金涛; 华晓青; 孙立宁

doi:10.3788/OPE.20172507.1866

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3-PRR平面三自由度纳米定位平台的设计

微纳技术与精密机械 | 更新时间：2020-07-07

- 3-PRR平面三自由度纳米定位平台的设计
- Design of 3-DOF planar nano-positioning platform with 3-PRR structure
- 光学精密工程 2017年25卷第7期页码：1866-1873
- 作者机构：
  
  1.上海大学机电工程与自动化学院, 上海 200072
  2.苏州大学机器人与微系统研究中心, 江苏苏州 215021
- 作者简介：
  
  [ "马立(1977-), 女, 黑龙江人, 博士, 研究员, 2007年于哈尔滨工业大学获得博士学位, 现为上海大学机电工程与自动化学院教师, 主要从事微操作机器人技术方面的研究。E-mail:hitlian@163.com" ]
- 基金信息：
  
  国家自然科学基金(61573238);国家科技支撑计划(2015BAF10B01);上海市教育委员会科研创新项目(14YZ008);江苏省先进机器人技术重点实验室基金(JAR201304)
- DOI：10.3788/OPE.20172507.1866
  中图分类号： TP242
- 收稿日期：2016-10-21，
  
  录用日期：2017-2-17，
  
  纸质出版日期：2017-07-25
- 稿件说明：
移动端阅览
马立, 杨斌, 田应仲, 等. 3-PRR平面三自由度纳米定位平台的设计[J]. 光学精密工程, 2017,25(7):1866-1873.

Li MA, Bin YANG, Ying-zhong TIAN, et al. Design of 3-DOF planar nano-positioning platform with 3-PRR structure[J]. Optics and precision engineering, 2017, 25(7): 1866-1873.
马立, 杨斌, 田应仲, 等. 3-PRR平面三自由度纳米定位平台的设计[J]. 光学精密工程, 2017,25(7):1866-1873. DOI： 10.3788/OPE.20172507.1866.

Li MA, Bin YANG, Ying-zhong TIAN, et al. Design of 3-DOF planar nano-positioning platform with 3-PRR structure[J]. Optics and precision engineering, 2017, 25(7): 1866-1873. DOI： 10.3788/OPE.20172507.1866.

摘要

本文设计了一种由压电陶瓷驱动的应变片进行检测的平面三自由度纳米定位平台，该平台采用的是平板铰链、直圆铰链及单边V型铰链导向的3-PRR结构。通过建立平台的伪刚体模型及对其进行位姿分析，获得了平台的正、逆解。同时，运用有限元分析方法对平台进行了仿真分析。搭建了3-PRR平面三自由度纳米定位平台测试实验系统对所设计平台进行试验。实验结果显示：3-PRR平台沿x轴、y轴的行程及最大转角分别为-11.32~11.41

m、-12.47~12.76

m、3.63'，对应的分辨率分别为71 nm、83 nm、1.35"。理论分析结果、有限元仿真结果与实验结果的最大误差分别为5.87%、6.19%，验证了理论分析和有限元仿真的正确性。

轴及

轴的位移输出与应变片的输出电压近似呈正比关系，证实了利用应变片来检测3-PRR平台运动的可行性。

Abstract

A 3-DOF nano-positioning platform detected by strain gauges driven by piezoelectric ceramics based on orientation of plate hinge

right angle flexure hinge and unilateral V-type hinge was designed. Pseudo-rigid-body model was established

and position analysis was conducted on it to obtain positive solution and inverse solution of the platform. Meanwhile

simulation analysis was conducted on the platform with finite elements analysis. Test experiment system of 3-DOF planar nano-positioning platform with 3-PRR structure was established. Experimental result indicates that travel ranges of 3-PRR platform along x-axis

y-axis and maximum rotary angle are respectively -11.32~11.41

-12.47~12.76

3.63'

and corresponding resolution ratios are respectively 71 nm

83 nm

1.35". Maximal errors of theoretical analysis and finite element simulation to experimental result are respectively 5.87%

6.19% to verify correctness of theoretical analysis and finite element simulation. Displacement output of

-axis and

-axis is approximately proportional to output voltage of strain gauges

which verifies the feasibility to use strain gauges to detect movement of 3-PRR platform.

关键词

Keywords

references

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