交变光场时空耦合型位移测量系统的研制

朱革; 张超; 付敏; 潘帅嘉; 雷川

doi:10.3788/OPE.20172508.2011

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交变光场时空耦合型位移测量系统的研制

现代应用光学 | 更新时间：2020-07-07

- 交变光场时空耦合型位移测量系统的研制
- Developement of alternating light field space-time coupling type displacement measuring system
- 光学精密工程 2017年25卷第8期页码：2011-2022
- 作者机构：
  
  1.重庆理工大学机械工程学院, 重庆 400054
  2.重庆理工大学机械检测技术与装备教育部工程研究中心时栅传感及先进检测技术重庆市重点实验室, 重庆 400054
- 作者简介：
  
  [ "朱革(1970-), 男, 四川宣汉人, 教授, 硕士生导师, 1992年于合肥工业大学获得学士学位, 1999年、2003年于重庆大学分别获得硕士、博士学位, 主要从事精密测试技术方面的研究。E-mail:gezhuge@cqut.edu.cn" ]
  [ "张超(1993-), 男, 重庆垫江人, 硕士研究生, 2015年于西北民族大学获得学士学位, 主要研究方向为光电检测与信号处理。E-mail:zhangchao328207@163.com" ]
  付敏(1981-), 男, 湖南娄底人, 博士, 助理研究员, 2004年于桂林电子工业学院获得学士学位, 2009年于西华大学获得硕士学位, 2014年于重庆大学获得博士学位, 主要研究方向为智能仪器与传感器。E-mail:fum_0@cqut.edu.cn FU Min, E-mail:fum_0@cqut.edu.cn
- 基金信息：
  
  国家自然科学基金资助项目(51505053);重庆市基础科学与前沿技术研究专项资助(cstc2015jcyjA40022);重庆市教委科学技术研究项目(KJ1500909)
- DOI：10.3788/OPE.20172508.2011
  中图分类号： TP212;TH741.1
- 收稿日期：2016-12-27，
  
  录用日期：2017-2-10，
  
  纸质出版日期：2017-08-25
- 稿件说明：
移动端阅览
朱革, 张超, 付敏, 等. 交变光场时空耦合型位移测量系统的研制[J]. 光学精密工程, 2017,25(8):2011-2022.

Ge ZHU, Chao ZHANG, Min FU, et al. Developement of alternating light field space-time coupling type displacement measuring system[J]. Optics and precision engineering, 2017, 25(8): 2011-2022.
朱革, 张超, 付敏, 等. 交变光场时空耦合型位移测量系统的研制[J]. 光学精密工程, 2017,25(8):2011-2022. DOI： 10.3788/OPE.20172508.2011.

Ge ZHU, Chao ZHANG, Min FU, et al. Developement of alternating light field space-time coupling type displacement measuring system[J]. Optics and precision engineering, 2017, 25(8): 2011-2022. DOI： 10.3788/OPE.20172508.2011.

摘要

针对现有光栅精密刻划加工难度大制约测量精度的问题，设计了一种以交变光场为测量媒介的时空耦合线性位移测量系统。该测量系统利用四路正交的交变光场与四组正交的正弦透光面调制耦合形成电行波信号实现高精度位移测量。在对测量系统测量原理分析的基础上，建立了该系统的理论模型和误差模型，通过仿真详细分析了该系统在时间相位不正交、空间相位不正交以及结构安装不平行时的误差规律。开展实验验证了一次、二次和四次谐波的产生原因，根据误差来源改进了测量装置的结构，优化了相应的参数。实验结果表明：在180 mm测量范围内，用栅距0.6 mm的测量系统实现了±0.4

m的测量精度。该测量系统规避了现有光栅精密刻划的问题，结构简单、安装方便，为光学位移测量提供了新思路。

Abstract

Regarding the restriction of precision ruling process difficulty on the measurement precision

a linear space-time coupling displacement measuring system was designed

taking an alternating light field as the measuring medium. The measuring system coupled four orthogonal alternating light fields and four orthogonal sinusoidal light transmitting surface into electrical traveling wave signal

thus achieving high precision displacement measurements. Through analysis of the measuring principle of the system. The theory model and error model of this measurement system were established

and the measuring error characteristic was analyzed in detail by model simulation when time phase and space phase were not orthogonal and mechanical installation was inaccurate respectively. Experiments were conducted for verification of the origins of the first harmonic

the second harmonic and the fourth harmonic. According to which

the measuring equipment was improved and its parameters were optimized. The experiment result shows that the measuring errors of the optimized measuring system are controlled within ±0.4

m in the measuring range of 180 mm with grating pitch of 0.6 mm. The system avoids precision ruling process of current grating

and has simple structure and easy installation

which provide an excellent approach for optical displacement measurements.

关键词

Keywords

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