非共振式压电直线电机精密驱动及定位控制

曹小涛; 李德全; 李洪文; 林冠宇; 杨维帆

doi:10.3788/OPE.20172508.2139

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非共振式压电直线电机精密驱动及定位控制

微纳技术与精密机械 | 更新时间：2020-07-07

- 非共振式压电直线电机精密驱动及定位控制
- Precision drive and position control of non-resonance piezoelectric stack linear motor
- 光学精密工程 2017年25卷第8期页码：2139-2148
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
- 作者简介：
  
  [ "曹小涛(1980-), 男, 河南巩义人, 博士, 副研究员, 2008年于吉林大学获得博士学位, 主要研究方向为空间相机电子学及控制系统技术。E-mail:caoxiaotao@ciomp.ac.cn" ]
  李德全(1991-), 男, 辽宁鞍山人, 研究实习员, 2014年于哈尔滨工业大学获得学士学位, 2016年于哈尔滨工程大学获得硕士学位, 主要从事嵌入式系统设计及精密控制算法研究。E-mail:lidequan@alu.hit.edu.cn LI De-quan, E-mail:lidequan@alu.hit.edu.cn
- 基金信息：
  
  国家自然基金重大科研仪器研制项目(41527806)
- DOI：10.3788/OPE.20172508.2139
  中图分类号： TP394.1;TH691.9
- 收稿日期：2017-01-21，
  
  录用日期：2017-4-14，
  
  纸质出版日期：2017-08-25
- 稿件说明：
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曹小涛, 李德全, 李洪文, 等. 非共振式压电直线电机精密驱动及定位控制[J]. 光学精密工程, 2017,25(8):2139-2148.

Xiao-tao CAO, De-quan LI, Hong-wen LI, et al. Precision drive and position control of non-resonance piezoelectric stack linear motor[J]. Optics and precision engineering, 2017, 25(8): 2139-2148.
曹小涛, 李德全, 李洪文, 等. 非共振式压电直线电机精密驱动及定位控制[J]. 光学精密工程, 2017,25(8):2139-2148. DOI： 10.3788/OPE.20172508.2139.

Xiao-tao CAO, De-quan LI, Hong-wen LI, et al. Precision drive and position control of non-resonance piezoelectric stack linear motor[J]. Optics and precision engineering, 2017, 25(8): 2139-2148. DOI： 10.3788/OPE.20172508.2139.

摘要

为实现光机结构、集成电路等领域中大行程及高精度的位移控制，利用较为适用的非共振式尺蠖型压电直线电机，基于高压功率运算放大器，设计了非共振式压电直线电机的精密复合放大驱动电路，通过理论分析及实验得到的伯德图验证了驱动电路的分辨率和幅频特性。以现场可编程门阵列（FPGA）为核心处理器，以光栅尺为反馈元件，通过分析非共振式压电直线电机的多种运行模式，根据直线电机的运行时序，设计完成了开环大范围整步运行模式与闭环小范围单步运行模式相结合的控制策略，在单步运行模式中分别设计完成了PID控制算法及PID与压电陶瓷迟滞逆模型前馈相结合的复合控制算法。实验结果表明，该控制策略能够实现大行程内的精密位移控制，复合控制算法具有比PID更加优越的控制效果，能够在21 mm大行程内实现1.5 nm的闭环定位控制精度，直线电机的最大驱动力可达300N，满足大行程高精度位移控制的应用需求。

Abstract

In order to realize long stroke and high precision displacement control in scopes such as optical-mechanical structure

integrated circuit and so on

a precision hybrid amplification driving circuit was designed by using non-resonance piezoelectric inchworm stack linear motor based on the high voltage power operational amplifier. Resolution and amplitude-frequency characteristic of driving circuit were verified by Bode diagram gotten by theoretical analysis and experiment. Taking FPGA as core processor and grating ruler as feedback element

through analyzing various operation modes of non-resonant piezoelectric linear motor

according to the operation sequence of linear motor

a control strategy combining the open loop large range whole step mode with closed-loop and small-range single step operation mode was designed and finished. Two types of control algorithms of PID and compound control of combination between PID and feed forward of hysteresis inverse model of piezoelectric ceramic were designed respectively in single step operation mode. Experimental results indicate that the control strategy can realize precise displacement control. Compound control algorithm has more superior control effect than PID. Moreover

its closed-loop position control precision can reach 1.5 nm in large stroke of 21 mm. Linear motor can realize maximum driving force of 300N and satisfies application demands of high-precision displacement control in large stroke.

关键词

Keywords

references

李宏壮, 林旭东, 刘欣悦, 等. 400mm薄镜面主动光学实验系统[J].光学精密工程, 2009, 17(9):2076-2083.

LI H ZH, LIN X D, LIU X Y, et al.. Experiment system of 400 mm thin-mirror active optics[J]. Opt. Precision Eng., 2009, 17(9):2076-2083. (in Chinese)

袁刚, 张小波, 王代华, 等.压电式快速控制反射镜的迟滞特性及线性化[J].光学精密工程, 2015, 23(6):1650-1656.

YUAN G, ZHANG X B, WANG D H, et al.. Hysteresis and linearization of piezoelectric fast steering mirror[J]. Opt. Precision Eng., 2015, 7(5):739-748. (in Chinese)

曹小涛, 孙天宇, 赵运隆, 等.空间大口径望远镜稳像系统发展现状及趋势[J].中国光学, 2014, 7(5):739-748.

CAO X T, SUN T Y, ZHAO Y L, et al.. Current status and development tendency of image stabilization system of large aperture space telescope[J]. Chinese Optics, 2014, 7(5):739-748.(in Chinese)

赵宏伟, 吴博达, 华顺明, 等.尺蠖型压电直线驱动器的动态特性[J].光学精密工程, 2007, 15(6):873-877.

ZHAO H W, WU B D, HUA SH M, et al.. Dynamic performance of inchworm type piezoelectric linear actuator[J]. Opt. Precision Eng., 2007, 15(6):873-877. (in Chinese)

陈培红, 王寅, 黄伟清.一种新型直动式压电直线电机的设计[J].压电与声光, 2011, 33(2):239-243.

CHEN P H, WANG Y, HUANG W Q. The design of a new direct action piezoelectric linear motor[J]. Piezo Electrics & Acoustooptics, 2011, 33(2):239-243. (in Chinese)

陈西府. 摩擦驱动型非共振压电叠层直线电机的研究[D]. 南京: 南京航空航天大学, 2014.

CHEN X F. Research on friction drive type non-resonance piezoelectric stack linear motors[D].Nanjing:Nanjing University of Aeronautics and Astronautics, 2014.(in Chinese)

马立, 肖金涛, 周莎莎, 等.杠杆式尺蠖压直线电驱动器[J].光学精密工程, 2015, 23(1):184-190.

MA L, XIAO J T, ZHOU SH SH, et al.. Linear lever-type piezoelectric inchworm actuator[J]. Opt. Precision Eng., 2015, 23(1):184-190. (in Chinese)

黄春, 汝长海, 叶秀芬, 等.基于补偿技术的宽频带压电陶瓷驱动电源[J].压电与声光, 2009, 31(3):373-376.

HUANG CH, RU CH H, YE X F, et al.. A broadband piezoelectric amplifier based on compensation technology[J]. Piezo Electrics & Acoustooptics, 2009, 31(3):373-376. (in Chinese)

刘向东, 傅强, 赖志林.多单元浮地级联式压电陶瓷执行器高压驱动电源[J].光学精密工程, 2012, 20(3):597-606.

LIU X D, FU Q, LAI ZH L. High-voltage power amplifier based on multi-unit cascade for piezoelectric actuators[J]. Opt. Precision Eng., 2012, 20(3):597-606. (in Chinese)

杨雪峰, 李威, 王禹桥.压电陶瓷驱动电源的研究现状及进展[J].仪表技术与传感器, 2008(11):109-112.

YANG X F, LI W, WANG Y Q. Present situation and development of power supply for piezoelectric actuator[J]. Instrument Technique and Sensor, 2008(11):109-112. (in Chinese)

赛尔吉欧·佛朗哥.基于运算放大器和模拟集成电路的电路设计[M].西安:西安交通大学出版社, 2009.

SERGIO F. Design with Operational Amplifiers and Analog Integrated Circuits[M]. Xi'an:Xi'an Jiaotong University Press, 2009. (in Chinese)

王希花. 基于压电陶迟滞非线性建模及控制系统的研究[D]. 哈尔滨: 哈尔滨工程大学, 2010.

WANG X H. Research based on piezoelectric ceramics hysteresis nonlinear modeling and control[D]. Harbin:Harbin Engineering University, 2010.(in Chinese)

王晓明.电动机的单片机控制[M].北京:北京航空航天大学出版社, 2015.

WANG X M. Single Chip Microcomputer Control of Motor[M]. Beijing:Beihang University Press, 2015. (in Chinese)

赖志林, 刘向东, 陈振, 等.压电陶瓷执行器多模时变滑模逆补偿控制[J].电机与控制学报, 2012, 16(1):92-103.

LAI ZH L, LIU X D, CHEN ZH, et al.. Multi-mode time-varying sliding mode control of piezoelectric actuator based on inverse compensation[J]. Electric Machines and Control, 2012, 16(1):92-103. (in Chinese)

党选举.压电陶瓷执行器的神经网络实时自适应逆控制[J].光学精密工程, 2008, 16(7):1266-1272.

DANG X J. Real-time adaptive inverse control based on neural networks for piezoelectric actuator[J]. Opt. Precision Eng., 2008, 16(7):1266-1272. (in Chinese)

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