单频激光干涉仪正交信号的高精度处理

夏豪杰; 胡梦雯; 张欣

doi:10.3788/OPE.20172509.2309

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单频激光干涉仪正交信号的高精度处理

现代应用光学 | 更新时间：2020-08-13

- 单频激光干涉仪正交信号的高精度处理
- High precision processing of quadrature signals for homodyne interferometer
- 光学精密工程 2017年25卷第9期页码：2309-2316
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院, 安徽合肥 230009
- 作者简介：
  
  [ " 夏豪杰(1979-), 男, 安徽宿州人, 博士, 副教授, 硕士生导师, 主要从事光电精密测试技术及微纳米测量技术的研究.E-mail:hjxia@hfut.edu.cn" ]
  [ "胡梦雯(1993-), 女, 安徽六安人, 硕士研究生, 主要从事光电精密测试技术及微纳米测量技术的研究.E-mail:2015110021@mail.hfut.edu" ]
- 基金信息：
  
  国家自然科学基金资助项目(51375138);国家自然科学基金重大科研仪器研制项目(51427805)
- DOI：10.3788/OPE.20172509.2309
  中图分类号： TH711;TN249
- 收稿日期：2017-04-09，
  
  录用日期：2017-6-15，
  
  纸质出版日期：2017-09-25
- 稿件说明：
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夏豪杰, 胡梦雯, 张欣. 单频激光干涉仪正交信号的高精度处理[J]. 光学精密工程, 2017,25(9):2309-2316.

Hao-jie XIA, Meng-wen HU, Xin ZHANG. High precision processing of quadrature signals for homodyne interferometer[J]. Optics and precision engineering, 2017, 25(9): 2309-2316.
夏豪杰, 胡梦雯, 张欣. 单频激光干涉仪正交信号的高精度处理[J]. 光学精密工程, 2017,25(9):2309-2316. DOI： 10.3788/OPE.20172509.2309.

Hao-jie XIA, Meng-wen HU, Xin ZHANG. High precision processing of quadrature signals for homodyne interferometer[J]. Optics and precision engineering, 2017, 25(9): 2309-2316. DOI： 10.3788/OPE.20172509.2309.

摘要

为了提高单频激光干涉仪正交信号相位细分辨向的可靠性与重复性

本文在正交信号Heydemann误差模型和数字信号处理技术的基础上

提出一种结合误差修正和相位细分辨向技术的正交信号高精度误差补偿算法。该算法采用基于最小二乘法的矩阵运算计算正交误差补偿参数初值

通过迭代运算进一步提高补偿精度

并对修正后的信号构建了基于相位的细分辨向算法。最后通过MATLAB软件对该算法进行了验证。实验结果表明

上述算法可实现对正交信号误差的精确补偿

使测量精度可达亚纳米甚至皮米数量级

从而有效提高测量信号的解调精度。

Abstract

In order to improve the reliability and repeatability of phase counting and subdivision of quadrature signals for homodyne interferometers

a high accuracy error compensation algorithm for quadrature signals combined error correction with phase-based counting and subdivision was proposed based on the Heydemann correction model of quadrature signals and digital signal processing technology. Matrix manipulation based on the least square method was adopted to calculate compensation parameter initials of quadrature signals

which were corrected by iterative operation to further improve the compensation accuracy. Then phase-based counting and subdivision algorithm was established base on the revised signals. Finally

the algorithm was verified with Matlab software. Experimental results show that the proposed algorithm can accurately compensate the error of the quadrature signals

and the measurement accuracy achieves sub-nanometer or even picometer scales

thus the demodulation accuracy of the measured signals can be improved effectively.

关键词

Keywords

references

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