真空紫外波段Al膜保护层MgF<sub>2</sub>的光学常数

王风丽; 张壮壮; 王占山; 周洪军; 霍同林

doi:10.3788/OPE.20172511.2823

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真空紫外波段Al膜保护层MgF₂的光学常数

X射线光学 | 更新时间：2020-07-07

- 真空紫外波段Al膜保护层MgF₂的光学常数
- Optical constant of MgF₂ coatings for Al/MgF₂ mirror in vacuum ultraviolet region
- 光学精密工程 2017年25卷第11期页码：2823-2828
- 作者机构：
  
  1.同济大学教育部先进微结构材料重点实验室, 上海 200092
  2.同济大学物理科学与工程学院, 上海 200092
  3.中国科学技术大学国家同步辐射实验室, 安徽合肥 230029
- 作者简介：
  
  [ "王风丽(1976-), 女, 山东东阿人, 博士, 副教授, 2002年于长春光学精密机械研究所获得硕士学位, 2005年于同济大学获得博士学位, 主要从事真空紫外、极紫外与X射线波段薄膜方面的研究。E-mail:wangfengli@tongji.edu.cn" ]
  [ "张壮壮(1993-), 男, 山西祁县人, 硕士研究生, 2015年于山西师范大学获得学士学位, 主要从事真空紫外、极紫外波段薄膜光学方面的研究。E-mail:15801788295@163.com" ]
- 基金信息：
  
  国家自然科学基金面上项目(11573020);国家重大仪器开发专项(2012YQ04016403);国家重大仪器开发专项(2012YQ13012505)
- DOI：10.3788/OPE.20172511.2823
  中图分类号： O484.4
- 收稿日期：2017-06-05，
  
  录用日期：2017-6-28，
  
  纸质出版日期：2017-11-25
- 稿件说明：
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王风丽, 张壮壮, 王占山, 等. 真空紫外波段Al膜保护层MgF₂的光学常数[J]. 光学精密工程, 2017,25(11):2823-2828.

Feng-li WANG, Zhuang-zhuang ZHANG, Zhan-shan WANG, et al. Optical constant of MgF₂ coatings for Al/MgF₂ mirror in vacuum ultraviolet region[J]. Optics and precision engineering, 2017, 25(11): 2823-2828.
王风丽, 张壮壮, 王占山, 等. 真空紫外波段Al膜保护层MgF₂的光学常数[J]. 光学精密工程, 2017,25(11):2823-2828. DOI： 10.3788/OPE.20172511.2823.

Feng-li WANG, Zhuang-zhuang ZHANG, Zhan-shan WANG, et al. Optical constant of MgF₂ coatings for Al/MgF₂ mirror in vacuum ultraviolet region[J]. Optics and precision engineering, 2017, 25(11): 2823-2828. DOI： 10.3788/OPE.20172511.2823.

摘要

由于Al膜的保护层MgF

薄膜的光学常数对Al/MgF

高反射镜的性能有极大的影响，本文研究了获取MgF

薄膜光学常数的方法。用热舟蒸发的方法在室温B270基底上镀制了3块不同MgF

厚度的Al/MgF

反射镜样品，通过掠入射X射线小角反射方法表征样品，获得了膜层厚度和粗糙度。在国家同步辐射实验中心计量站测试了入射角为5°时，样品在105~130 nm波段的反射率。在Al、MgF

膜层的厚度和Al的光学常数已知条件下，依据菲涅尔公式，得出了满足某波长处样品反射率的等值曲线，然后从三条曲线的交点得出了MgF

薄膜在108~128 nm波段的光学常数。对比和分析显示：利用此方法得到的108~128 nm波段MgF

薄膜光学常数计算的反射率曲线和实际测试得到的反射率曲线吻合较好。

Abstract

As the optical constant of MgF

over-coated Al mirror effects its optical performance greatly

this paper explores the method to obtain the optical constant. Three Al/MgF

mirror samples covered by MgF

coatings with different thicknesses were deposited on B270 substrates at room temperature by thermal evaporation method. The layer structures of the samples such as the thickness and the roughness were characterized by the grazing incidence X-ray reflectometry. The reflectivities of the samples at a incidence angle of 5° were measured in 105-130 nm region at the National Synchrotron Radiation Laboratory(NSRL). Finally

the optical constant of MgF

for Al/MgF

mirror was obtained by Fresnel formulas at given wavelength and corresponding reflectivity when the coating thicknesses of MgF

and the optical constant of Al have been known. The common intersection point of the curves of three MgF

coatings with different thickness for Al/MgF

mirror determines the optical constant of MgF

coating at given wavelength. The analysis and comparison show that calculated reflectivity from optical constants of this work agrees well with measured reflectivity curves in 108-128 nm region.

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references

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真空紫外波段Al膜保护层MgF2的光学常数

Optical constant of MgF2 coatings for Al/MgF2 mirror in vacuum ultraviolet region

DOI：10.3788/OPE.20172511.2823

摘要

Abstract

关键词

Keywords

references

真空紫外波段Al膜保护层MgF₂的光学常数

Optical constant of MgF₂ coatings for Al/MgF₂ mirror in vacuum ultraviolet region