NiC/Ti中子多层膜的微结构和界面研究

张众; 靳鑫; 李文斌; 黄秋实; 王占山

doi:10.3788/OPE.20172511.2859

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NiC/Ti中子多层膜的微结构和界面研究

X射线光学 | 更新时间：2020-07-07

- NiC/Ti中子多层膜的微结构和界面研究
- Investigation on microstructures and interfaces of NiC/Ti neutron multilayers
- 光学精密工程 2017年25卷第11期页码：2859-2864
- 作者机构：
  
  同济大学物理科学与工程学院先进微结构材料教育部重点实验室, 上海 200092
- 作者简介：
  
  [ "张众(1977-), 男, 辽宁朝阳人, 博士, 教授, 博士生导师, 2003年于中科院长春光机所获得硕士学位, 2006年于同济大学获得博士学位, 主要从事中子及X射线多层膜方面的研究。E-mail:zhangzhongcc@tongji.edu.cn" ]
  [ "靳鑫(1994-), 男, 河南周口人, 硕士, 2014年于合肥工业大学获得学士学位, 2017年于同济大学获得硕士学位, 主要从事中子多层膜方面的研究。E-mail:1_jinxin@tongji.edu.cn" ]
- 基金信息：
  
  国家自然科学基金NSAF联合基金资助项目(U1430131)
- DOI：10.3788/OPE.20172511.2859
  中图分类号： O434
- 收稿日期：2017-04-14，
  
  录用日期：2017-5-16，
  
  纸质出版日期：2017-11-25
- 稿件说明：
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张众, 靳鑫, 李文斌, 等. NiC/Ti中子多层膜的微结构和界面研究[J]. 光学精密工程, 2017,25(11):2859-2864.

Zhong ZHANG, Xin JIN, Wen-bin LI, et al. Investigation on microstructures and interfaces of NiC/Ti neutron multilayers[J]. Optics and precision engineering, 2017, 25(11): 2859-2864.
张众, 靳鑫, 李文斌, 等. NiC/Ti中子多层膜的微结构和界面研究[J]. 光学精密工程, 2017,25(11):2859-2864. DOI： 10.3788/OPE.20172511.2859.

Zhong ZHANG, Xin JIN, Wen-bin LI, et al. Investigation on microstructures and interfaces of NiC/Ti neutron multilayers[J]. Optics and precision engineering, 2017, 25(11): 2859-2864. DOI： 10.3788/OPE.20172511.2859.

摘要

NiC/Ti中子超镜是一种高性能的中子多层膜光学元件，是提升中子导管、聚焦装置等中子光学系统的中子利用率的关键之一。为了提升NiC/Ti中子超镜的性能，本文面向具有不同厚度NiC膜层的NiC/Ti多层膜，分别采用X射线掠入射反射和X射线衍射的方法表征了NiC/Ti多层膜的膜层厚度、界面粗糙度和膜层晶向结构。研究结果表明：随着NiC膜层厚度的增长，除了在较小尺度（≤2.5 nm），NiC-on-Ti界面的粗糙度基本保持不变；而Ti-on-NiC界面的粗糙度却呈现出较大的变化。具有不同厚度的NiC膜层的NiC/Ti多层膜的界面粗糙度呈现不对称性的变化，主要原因在于NiC膜层的微结构随着膜层厚度的增长而产生了变化。

Abstract

NiC/Ti neutron supermirror plays a key role in improving the capability of neutron optics. In order to improve the performance of the neutron supermirror

a study in microstructures and interfaces of NiC/Ti multilayers with varied NiC layer thickness was presented. The thickness

interface roughness and crystalline state of NiC/Ti multilayers were represent by Grazing incidence X-ray reflectivity and X-ray diffraction

respectively. The study results indicate that the NiC-on-Ti interface roughness was almost constant except the thin NiC layer

which has the thickness less than 2.5 nm

however the Ti-on-NiC interface roughness has relatively large changes. The NiC layers transferred from amorphous to polycrystal

as the NiC layer thickness increase from 2.5 nm to 5.5 nm

and both two interfaces and the size of Ni (111) crystalline grains almost kept constant as the NiC layer thickness continue to increase. This different variation between Ti-on-NiC and NiC-on-Ti interface roughness can be attributed to the microstructures changes resulting from varying NiC layer thickness.

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Keywords

references

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