基于单次全反射椭球单玻璃管X射线聚焦镜表征光源参数

王亚冰; 朱玉; 孙天希; 孙学鹏; 刘志国; 李坊佐; 姜博文; 张晓芸; 张丰收

doi:10.3788/OPE.20172511.2872

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基于单次全反射椭球单玻璃管X射线聚焦镜表征光源参数

X射线光学 | 更新时间：2020-07-07

- 基于单次全反射椭球单玻璃管X射线聚焦镜表征光源参数
- Determination of parameters of X-ray source based on single-bounce ellipsoidal monocapillary X-ray condenser
- 光学精密工程 2017年25卷第11期页码：2872-2877
- 作者机构：
  
  1.北京师范大学核科学与技术学院, 北京 100875
  2.北京市辐射中心, 北京 100875
- 作者简介：
  
  [ "王亚冰(1992-), 男, 河北石家庄人, 2016年于四川大学获得学士学位, 主要从事单椭球透镜应用和图像处理的研究。E-mail:201621220020@mail.bnu.edu.cn" ]
  [ "孙天希(1969-), 男, 山东潍坊人, 教授。2006年于北京师范大学获得博士学位。主要从事X射线科学与技术研究。作为方向负责人, 主要科研工作是负责毛细管X射线光学器件的设计、研制和应用开发。E-mail:stx@bnu.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(11675019);中央高校基本科研业务费专项资金资助项目(2014KJJCA03);北京市科学技术研究院萌芽计划资助项目(201712)
- DOI：10.3788/OPE.20172511.2872
  中图分类号： O434.12
- 收稿日期：2017-05-23，
  
  录用日期：2017-6-26，
  
  纸质出版日期：2017-11-25
- 稿件说明：
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王亚冰, 朱玉, 孙天希, 等. 基于单次全反射椭球单玻璃管X射线聚焦镜表征光源参数[J]. 光学精密工程, 2017,25(11):2872-2877.

Ya-bing WANG, Yu ZHU, Tian-xi SUN, et al. Determination of parameters of X-ray source based on single-bounce ellipsoidal monocapillary X-ray condenser[J]. Optics and precision engineering, 2017, 25(11): 2872-2877.
王亚冰, 朱玉, 孙天希, 等. 基于单次全反射椭球单玻璃管X射线聚焦镜表征光源参数[J]. 光学精密工程, 2017,25(11):2872-2877. DOI： 10.3788/OPE.20172511.2872.

Ya-bing WANG, Yu ZHU, Tian-xi SUN, et al. Determination of parameters of X-ray source based on single-bounce ellipsoidal monocapillary X-ray condenser[J]. Optics and precision engineering, 2017, 25(11): 2872-2877. DOI： 10.3788/OPE.20172511.2872.

摘要

为了正确表征X射线光源参数，本文利用单次全反射椭球单玻璃管X射线聚焦镜，设计了一种测量X射线光源焦斑尺寸和焦深的方法。该方法利用椭球单玻璃管X射线聚焦镜具有单次全反射成像能力的特点，对多个已知焦斑尺寸的多毛细管X光透镜模拟光源的焦斑成像尺寸和椭球聚焦镜的面形误差进行表征，从而确定光源焦斑尺寸和经过椭球聚焦镜后的焦斑成像尺寸以及椭球聚焦镜的面型误差之间的通用数学关系。然后，通过分析待测光源焦斑经过椭球聚焦镜所成像的尺寸来得到被测量光源的焦斑尺寸。利用该法也同样可以得到光源焦深的大小。为了验证设计方法的可行性，测量了实验室微焦斑X射线光源的焦斑和焦深参数。测试显示：对于焦斑直径约为50 μm、焦深约为20 mm的光源，文中方法得到的算术平均值标准偏差分别为1.5 μm和0.7 mm。结果表明：本文设计的光源参数表征方法可以实现对微焦斑源焦斑尺寸和焦深的同时测量，在X射线源的研制和应用领域具有潜在应用。

Abstract

To exactly characterize X-ray light resource parameters

a measuring method for the focal spot size and focal depth of an X-ray source was proposed by using a single-bounce ellipsoidal monocapillary X-ray condenser (SBEMXRC). The SBEMXRC was a kind of X-ray reflective imaging optics and characterized by its single total reflection imaging capability. The universal relationship among the focal spot size of the X-ray source

image size of focal spot of the X-ray source and the slope errors of the SBEMXRC was determined by the X-ray sources with known spot sizes simulated by a polycapillary X-ray lens. The focal spot size of the X-ray source with a unknown spot size was accordingly obtained by analyzing image size of the focal spot. The focal depth of the X-ray source could also be measured by the designed method. To verify the feasibility of the designed method

the spot size and the focal depth of a microfocus X-ray source in our lab were measured. The experimental results show that the arithmetic mean standard deviations of the measurement are 1.5 μm and 0.7 mm for the X-ray source with a spot size about 50 μm and a focal depth about 20 mm

respectively. The results demonstrate that the focal spot size and focal depth of the X-ray source could be simultaneously measured with the designed method. This method has potential applications in the field of X-ray sources.

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