三晶体多轴联动同步辐射X射线荧光光谱仪

隋国荣; 朱泽玮; 王颖; 贾星伟; 单新治

doi:10.3788/OPE.20172511.2878

您当前的位置：

首页 >

文章列表页 >

三晶体多轴联动同步辐射X射线荧光光谱仪

X射线光学 | 更新时间：2020-07-07

- 三晶体多轴联动同步辐射X射线荧光光谱仪
- Synchrotron radiation X-ray fluorescence spectrometer based on three crystals and multi-axis linkage
- 光学精密工程 2017年25卷第11期页码：2878-2888
- 作者机构：
  
  上海理工大学光电信息与计算机工程学院, 上海 200093
- 作者简介：
  
  [ "隋国荣(1974-), 男, 陕西宝鸡人, 博士, 副教授, 2008年于上海理工大学获得博士学位, 主要从事机器视觉及光学成像方面的研究。E-mail:suigr@usst.edu.cn" ]
  [ "朱泽玮(1992-), 男, 甘肃酒泉人, 硕士研究生, 2014年于上海理工大学获得学士学位, 主要从事光电检测的研究。Email:zhuzwusst@gmail.com" ]
- 基金信息：
  
  国家973计划基金资助项目(2015CB352001);上海市重点学科资助项目(S30502);国家自然科学基金资助项目(61178079)
- DOI：10.3788/OPE.20172511.2878
  中图分类号： O434.13;O722.8
- 收稿日期：2017-04-14，
  
  录用日期：2017-6-15，
  
  纸质出版日期：2017-11-25
- 稿件说明：
移动端阅览
隋国荣, 朱泽玮, 王颖, 等. 三晶体多轴联动同步辐射X射线荧光光谱仪[J]. 光学精密工程, 2017,25(11):2878-2888.

Guo-rong SUI, Ze-wei ZHU, Ying WANG, et al. Synchrotron radiation X-ray fluorescence spectrometer based on three crystals and multi-axis linkage[J]. Optics and precision engineering, 2017, 25(11): 2878-2888.
隋国荣, 朱泽玮, 王颖, 等. 三晶体多轴联动同步辐射X射线荧光光谱仪[J]. 光学精密工程, 2017,25(11):2878-2888. DOI： 10.3788/OPE.20172511.2878.

Guo-rong SUI, Ze-wei ZHU, Ying WANG, et al. Synchrotron radiation X-ray fluorescence spectrometer based on three crystals and multi-axis linkage[J]. Optics and precision engineering, 2017, 25(11): 2878-2888. DOI： 10.3788/OPE.20172511.2878.

摘要

针对上海光源X射线吸收精细结构光谱仪对灵敏度和分辨率的要求，研制了三晶体多轴同步辐射X射线荧光光谱仪。其采用一台双晶单色器提供实验X射线，用3块凹面晶体构成系统主体色散结构，并在竖直平面内组成相交的罗兰圆实现荧光分析，可实现10°范围内的布拉格角变化。光谱仪通过高精度控制驱动设备使位移平台实现了3块晶体的4轴联动和总台的2轴联动，其中对位移平台的各轴精度达到了单步长移动25nm，可以实现高分辨率的三维扫描工作。编写了探测器的驱动软件，提高了驱动器的测试灵敏度和分辨率。最后，利用国际通用的实验物理控制系统——EPICS（Experiment Physics and Industrial Control System）完成了整个系统软件的设计，实现了系统各部分的精确控制、自动测量、数据分析和结果显示与存储等功能，构成了一套完整的基于同步辐射光源的高精度高分辨率X射线荧光光谱分析系统。采用钴元素作为测试样品进行了分析实验，结果显示：该光谱仪单次测量时间小于1.5 s，测试精度达到0.4 eV，分辨率为0.1 eV。光谱仪可以完成对样品荧光的采集和分析，操作时间、精度、分辨率和重复性等性能指标均优于现有国内、外设备，目前已成功应用于上海光源XAFS线站的各项科学实验中。

Abstract

To meet the requirements of the X-ray fluorescence spectrometer in Shanghai Synchrotron Radiation Facility(XAFS) for sensitivity and resolution

a synchrotron radiation X-ray fluorescence spectrometer was proposed based on three-crystal and multi-axis linkage. In experiments

the X-ray was provided by a double crystal monochromator

the dispersion structure was made of three concave crystals and these crystals formed an intersectant Rowland circle in the vertical plane to achieve the fluorescent analysis. Moreover

the dispersion structure could change in the Bragg angle ranges of 10°. Four-axis linkage of three crystal and two-axis linkage of the whole platform were implemented by high precisely controlling the driving device. Here

the displacement precision of each axis reaches 25 nm in a single step

which realizes high resolution and three-dimensional scanning work. The driver's software was programmed to improve the test sensitivity and resolution of the driver. The overall system software was designed by using the International Common Experimental Physical Control System-EPICS. By which

the spectrometer realizes the functions such as the precise control

automatic measurement

data analysis

results display and storage functions and completes a high precision and high resolution X-ray fluorescent spectrum analysis system based on Synchrotron Radiation Source. By taking the cobalt as the experimental sample

an analysis experiment was performed. The results show that the single measurement time is less than 1.5 s

the test precision is 0.4 eV and the resolution is 0.1 eV. The spectrometer can acquire and analyze the fluorescence of the sample and the operating time

precision

resolution and the repeatability are superior to those of the existing domestic and foreign equipment. It has been used in the scientific research experiments of Shanghai light source XAFS line.

关键词

Keywords

references

胡波, 武晓梅, 余韬, 等. X射线荧光光谱仪的发展及应用[J].核电子学与探测技术, 2015, 35(7):695-702, 706.

HU B, WU X M, YU T, et al.. The development and application of X-ray fluorescence spectrometer[J]. Nuclear Electronics & Detection Technology, 2015, 35(7):695-702, 706. (in Chinese)

巩岩, 尼启良, 陈波, 等.掠出射X射线荧光光谱仪研制[J].光学精密工程, 2002, 10(6):597-601.

GONG Y, NI Q L, CHEN B, et al.. Grazing exit X-ray fluorescence spectrometer[J]. Opt. Precision Eng., 2002, 10(6):597-601. (in Chinese)

罗立强, 詹秀春, 李国会. X射线荧光光谱仪[M].北京:化学工业出版社, 2008.

LUO L Q, ZHAN X CH, LI G H. X-Ray Fluorescence Spectrometer[M]. Beijing:Chemical Industry Press, 2008. (in Chinese)

杨红霞, 李岑, 杜玉枝, 等.同步辐射X射线荧光法分析藏药材和藏药制剂中金属元素[J].光谱学与光谱分析, 2015, 35(6):1730-1734.

YANG H X, LI C, DU Y ZH, et al.. Metallic elemental analysis of Tibetan herbal medicines and Tibetan medicine preparations by synchrotron radiation X-ray fluorescence[J]. Spectroscopy and Spectral Analysis, 2015, 35(6):1730-1734. (in Chinese)

李小莉, 安树清, 徐铁民, 等.超细粉末压片制样X射线荧光光谱测定碳酸岩样品中多种元素及CO 2 [J].光谱学与光谱分析, 2015, 35(6):1741-1745.

LI X L, AN SH Q, XU T M, et al.. Ultra-fine pressed powder pellet sample preparation XRF determination of multi-elements and carbon dioxide in carbonate[J]. Spectroscopy and Spectral Analysis, 2015, 35(6):1741-1745. (in Chinese)

冼鼎昌.同步辐射的现状和发展[J].中国科学基金, 2005, 19(6):321-325.

XIAN D CH. Present status and development of synchrotron radiation[J]. Bulletin of National Natural Science Foundation of China, 2005, 19(6):321-325. (in Chinese)

MARTÍNEZ-CRIADO G, TUCOULOU R, CLOETENS P, et al.. Status of the hard X-ray microprobe beamline ID22 of the European synchrotron radiation facility[J]. Journal of Synchrotron Radiation, 2012, 19(1):10-18.

刘正坤, 刘颖, 邱克强, 等.软X射线双频光栅设计及制作[J].光学精密工程, 2013, 21(7):1780-1785.

LIU ZH K, LIU Y, QIU K Q, et al.. Design and fabrication of soft X-ray double frequency grating[J]. Opt. Precision Eng., 2013, 21(7):1780-1785. (in Chinese)

朱京涛, 岳帅鹏, 涂昱淳, 等.氮气反应溅射制备软X射线Co/Ti多层膜[J].光学精密工程, 2015, 23(1):10-14.

ZHU J T, YUE SH P, TU Y CH, et al.. Preparation of Co/Ti multilayer in soft X-ray region by nitrogen reactive sputtering[J]. Opt. Precision Eng., 2015, 23(1):10-14. (in Chinese)

张健, 栗孟娟, 阴刚华, 等.用于太空望远镜的大口径薄膜菲涅尔衍射元件[J].光学精密工程, 2016, 24(6):1289-1296.

ZHANG J, LI M J, YIN G H, et al.. Large-diameter membrane Fresnel diffraction elements for space telescope[J]. Opt. Precision Eng., 2016, 24(6):1289-1296. (in Chinese)

章连香, 符斌. X射线荧光光谱分析技术的发展[J].中国无机分析化学, 2013, 3(3):1-7.

ZHANG L X, FU B. Advances in X-ray fluorescence spectrometry[J]. Chinese Journal of Inorganic Analytical Chemistry, 2013, 3(3):1-7. (in Chinese)

杨明太. X射线荧光光谱仪的现状[J].核电子学与探测技术, 2006, 26(6):1025-1029.

YANG M T. The present status of X-ray fluorescence spectrometry[J]. Nuclear Electronics & Detection Technology, 2006, 26(6):1025-1029. (in Chinese)

王峰, 徐朝银, 潘国强, 等.同步辐射X射线双晶单色仪能量扫描[J].光学精密工程, 2001, 9(4):401-404.

WANG F, XU CH Y, PAN G Q, et al.. Energy scanning of the double crystal monochromator at X-ray beamlines[J]. Opt. Precision Eng., 2001, 9(4):401-404. (in Chinese)

KLEIMENOV E, BERGAMASCHI A, VAN BOKHOVEN J, et al.. High-resolution hard-X-ray fluorescence spectrometer[J]. Journal of Physics:Conference Series, 2009, 190(1):012035.

KLEYMENOV E, VAN BOKHOVEN J A, DAVID C, et al.. Five-element Johann-type X-ray emission spectrometer with a single-photon-counting pixel detector[J]. Review of Scientific Instruments, 2011, 82(6):065107.

SOKARAS D, WENG T C, NORDLUND D, et al.. A seven-crystal Johann-type hard X-ray spectrometer at the Stanford Synchrotron Radiation Lightsource[J]. Review of Scientific Instruments, 2013, 84(5):053102.

BERGMANNU, CRAMER S P. High-resolution large-acceptance analyzer for X-ray fluorescence and Raman spectroscopy[J]. Proceedings of SPIE, 1998, 3448:198-209.

熊先才. 双通道椭圆弯晶谱仪的基础理论及实验研究[D]. 重庆: 重庆大学, 2004. http://cdmd.cnki.com.cn/Article/CDMD-10611-2005031242.htm

XIONG X C. Research on Fundamental Theories and Experiments of Double-channel Elliptically-curved Crystal Spectrograph [D]. Chongqing:Chongqing University, 2004. (in Chinese)

REHAKP, WALTON J, GATTI E, et al.. Progress in semiconductor drift detectors[J]. Nuclear Instruments and Methods in Physics Research Section A:Accelerators, Spectrometers, Detectors and Associated Equipment, 1986, 248(2-3):367-378.

浏览量

703

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据