基于数字微镜器件的中阶梯光栅光谱仪的光学系统设计

张锐; 潘明忠; 杨晋; 巴音贺希格; 崔继承

doi:10.3788/OPE.20172512.2994

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基于数字微镜器件的中阶梯光栅光谱仪的光学系统设计

光栅微纳制造 | 更新时间：2020-07-07

- 基于数字微镜器件的中阶梯光栅光谱仪的光学系统设计
- Optical system of echelle spectrometer based on DMD
- 光学精密工程 2017年25卷第12期页码：2994-3000
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2.中国科学院大学, 北京 100049
- 作者简介：
  
  [ "张锐(1990-), 女, 甘肃兰州人, 博士研究生, 2013年于兰州大学获得学士学位, 主要从事光谱仪器研发及光谱信息处理技术的研究。E-mail:zhangrui_grating@163.com" ]
  [ "巴音贺希格(1962-), 男, 内蒙古鄂尔多斯人, 博士, 研究员, 博士生导师, 2004年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事光栅理论、光栅制作技术及光谱技术的研究。E-mail:bayin888@sina.com" ]
- 基金信息：
  
  国家重大科学仪器设备开发专项(2014YQ120351);国家重大科研装备研制项目(ZDYZ2008-1);国家自然科学基金资助项目(61505204);吉林省科技发展计划项目(20140203011GX)
- DOI：10.3788/OPE.20172512.2994
  中图分类号： TH744.1
- 收稿日期：2017-05-18，
  
  录用日期：2017-6-26，
  
  纸质出版日期：2017-12-25
- 稿件说明：
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张锐, 潘明忠, 杨晋, 等. 基于数字微镜器件的中阶梯光栅光谱仪的光学系统设计[J]. 光学精密工程, 2017,25(12):2994-3000.

Rui ZHANG, Ming-zhong PAN, Jin YANG, et al. Optical system of echelle spectrometer based on DMD[J]. Optics and precision engineering, 2017, 25(12): 2994-3000.
张锐, 潘明忠, 杨晋, 等. 基于数字微镜器件的中阶梯光栅光谱仪的光学系统设计[J]. 光学精密工程, 2017,25(12):2994-3000. DOI： 10.3788/OPE.20172512.2994.

Rui ZHANG, Ming-zhong PAN, Jin YANG, et al. Optical system of echelle spectrometer based on DMD[J]. Optics and precision engineering, 2017, 25(12): 2994-3000. DOI： 10.3788/OPE.20172512.2994.

摘要

研究了一种基于数字微镜器件（DMD）具有新型光路结构的中阶梯光栅光谱仪，并采用新的谱图信息接收方式来降低其使用成本和数据处理过程的复杂程度。将具有单波长选通功能的DMD与一维探测器光电倍增管（PMT）相结合接收中阶梯光栅光谱仪的光谱信息，在降低仪器成本的同时将中阶梯光栅光谱仪谱图还原算法与DMD扫描驱动算法相整合，提高了算法效率。由于DMD的填充因子比CCD稍低，该类光谱仪对成像质量和能量集中度提出了更高的要求。本文根据DMD型中阶梯光栅光谱仪特点，在有限的可挑选的光学材料下，采用多重优化的方式合理设计了中阶梯光栅光谱仪准直镜、中阶梯光栅、棱镜、聚焦镜等各个光学元件的光路结构参数，并且在Czerny-Turner结构中加入校正透镜和场镜，校正了系统所有像差，提高了整个光学系统的成像质量和光谱分辨率。最终设计的光谱仪系统分辨率达0.01 nm，单个微反射镜内的光斑能量聚集度达到70%。

Abstract

An echelle spectrometer with a new optical path based on a Digital Micro Device (DMD)was proposed and a new spectrum receiving method was used to reduce the cost of the grating spectrograph and the complexity of data processing. The DMD with single wavelength getting function and an one-dimensional photomultiplier (PMT) were combined to receive spectral information of the echelle spectrometer. By which

the cost of the instrument was reduced and the spectral restore algorithm for the echelle spectrometer and the scan driving algorithm for the DMD were integrated to improve algorithm efficiency. Because the fill factor of CCD is lower than that of DMD

this kind of echelle spectrometer should be giving a higher imaging quality and higher imaging energy. According to the characteristics of the echelle spectrometer and the limited range of selected optical materials

the multi-optimization method was employed to design the optical path structure parameters of the echelle spectrometers such as quasi-direct mirror

echelle grating

prism and focusing mirror. Moreover

the Czerny-TurnerC-T structure was added into the system to correct the asymmetric aberration and three correction lenses was used to correct the spherical aberration astigmatism. Finally

the resolution of the designed spectrometer system has reached 0.01 nm and the system imaging energy in one pixel can be 70%.

关键词

Keywords

references

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