闪耀透射光栅衍射规律的分析和验证

黄元申; 过军军; 盛斌

doi:10.3788/OPE.20172512.3012

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闪耀透射光栅衍射规律的分析和验证

光栅微纳制造 | 更新时间：2020-07-07

- 闪耀透射光栅衍射规律的分析和验证
- Analysis and verification of diffraction rules of blazed transmission grating
- 光学精密工程 2017年25卷第12期页码：3012-3019
- 作者机构：
  
  1.上海理工大学光电信息与计算机工程学院, 上海 200093
  2.上海市现代光学系统重点实验室教育部光学仪器与系统工程中心, 上海 200093
  3.上海光学仪器研究所, 上海 200093
- 作者简介：
  
  [ "黄元申(1963-), 男, 上海人, 硕士, 高级工程师, 上海理工大学光电信息与计算机工程学院光电仪器研发中心主任, 主要从事衍射光栅和微纳光学元件的设计与加工。E-mail:hyshyq@sina.com" ]
  [ "过军军(1989-), 男, 湖南株州人, 硕士研究生, 主要研究方向为衍射光栅。E-mail:157670504@usst.edu.cn" ]
- 基金信息：
  
  国家重点研究发展计划资助项目(2016YFB1102303);国家自然科学基金资助项目(61378060);国家重大仪器专项(2016YFF0101904)
- DOI：10.3788/OPE.20172512.3012
  中图分类号： O436.1
- 收稿日期：2017-07-10，
  
  录用日期：2017-9-18，
  
  纸质出版日期：2017-12-25
- 稿件说明：
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黄元申, 过军军, 盛斌. 闪耀透射光栅衍射规律的分析和验证[J]. 光学精密工程, 2017,25(12):3012-3019.

Yuan-shen HUANG, Jun-jun GUO, Bin SHENG. Analysis and verification of diffraction rules of blazed transmission grating[J]. Optics and precision engineering, 2017, 25(12): 3012-3019.
黄元申, 过军军, 盛斌. 闪耀透射光栅衍射规律的分析和验证[J]. 光学精密工程, 2017,25(12):3012-3019. DOI： 10.3788/OPE.20172512.3012.

Yuan-shen HUANG, Jun-jun GUO, Bin SHENG. Analysis and verification of diffraction rules of blazed transmission grating[J]. Optics and precision engineering, 2017, 25(12): 3012-3019. DOI： 10.3788/OPE.20172512.3012.

摘要

基于标量理论研究了不同槽形角，不同刻线密度的透射式闪耀光栅对使用波段的影响，推导了闪耀透射光栅的衍射光能量分布规律。分析证明了透射闪耀光栅在衍射能量最强方向上衍射光的衍射角与入射光的入射角之间的关系满足Snell定律。给出了入射角、衍射角与槽形角之间的关系式，研究了不同刻线密度和槽形角条件下衍射光能量分布的规律。对闪耀透射光栅进行了测量和比较，结果表明：已有闪耀透射光栅测量的结果与理论计算数据相吻合。制备了聚二甲基硅氧烷（PDMS）可调谐闪耀透射光栅，应用研究的理论公式测量了该闪耀透射光栅在拉伸与自由状态下的闪耀波长和光栅刻线密度，结果显示其波长测量误差在5 nm以内。拟合了光栅的等效槽形，验证了实时监测PDMS光栅槽形和刻线密度随拉力大小变化的规律。

Abstract

Based on the scalar theory

the influence of the blazed transmission grating with different groove angles or different groove densities on the used wavelength was researched and the energy distribution of the diffraction light of the blazed transmission grating was deduced. It was concluded that the relationship between the diffraction angle and the incident angle of the diffracted grating in the diffraction direction with the strongest energy could satisfy the Snell's law. The relationship among the angle of incidence

diffraction angle and groove angle was given

and the energy distribution law of the diffracted light at different groove densities and groove angles was studied. Then

the blazed transmission gratings were measured. It is shown that the characteristics of the existing blazed transmission gratings are consistent with that of theoretical calculation. A polydimethylsiloxane (PDMS) period-tunable blazed transmission grating was fabricated. Then

the blazed wavelength and groove density of the PDMS blazed transmission grating were measured in both stretched and free state by using the deduced formula. The results show that the measurement error of the wavelength is within 5 nm. The equivalent groove profile of the grating was fitted

which verifies the law that groove profile and groove density of the PDMS grating are changed with the tension changes in the real-time monitoring.

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Keywords

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