面向可见光波段的非周期悬空GaN薄膜光栅

王永进; 张锋华; 高绪敏; 施政

doi:10.3788/OPE.20172512.3020

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面向可见光波段的非周期悬空GaN薄膜光栅

光栅微纳制造 | 更新时间：2020-07-07

- 面向可见光波段的非周期悬空GaN薄膜光栅
- Freestanding non-periodic GaN gratings in visible wavelength region
- 光学精密工程 2017年25卷第12期页码：3020-3026
- 作者机构：
  
  南京邮电大学 Peter Grünberg研究中心, 江苏南京 210003
- 作者简介：
  
  [ "王永进(1977-), 男, 江苏徐州人, 博士, 教授, 2005年于中科院上海微系统与信息技术研究所获得博士学位, 先后在德国弗莱堡大学、日本东北大学和德国于利希研究中心从事科研工作, 主要从事可见光通信和光传感方面的研究。E-mail: wangyj@njupt.edu.cn" ]
  [ "张锋华(1994-), 女, 江苏南通人, 硕士研究生, 2016年于南京师范大学获得学士学位, 主要研究方向为可见光通信和光传感。E-mail:1016010313@njupt.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(61322112);国家自然科学基金资助项目(61531166004);国家重点研究发展计划资助项目(2016YFE0118400);南京邮电大学科研基金资助项目(KYZZ16-0256)
- DOI：10.3788/OPE.20172512.3020
  中图分类号： TN303;TN304.2
- 收稿日期：2017-05-23，
  
  录用日期：2017-6-26，
  
  纸质出版日期：2017-12-25
- 稿件说明：
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王永进, 张锋华, 高绪敏, 等. 面向可见光波段的非周期悬空GaN薄膜光栅[J]. 光学精密工程, 2017,25(12):3020-3026.

Yong-jin WANG, Feng-hua ZHANG, Xu-min GAO, et al. Freestanding non-periodic GaN gratings in visible wavelength region[J]. Optics and precision engineering, 2017, 25(12): 3020-3026.
王永进, 张锋华, 高绪敏, 等. 面向可见光波段的非周期悬空GaN薄膜光栅[J]. 光学精密工程, 2017,25(12):3020-3026. DOI： 10.3788/OPE.20172512.3020.

Yong-jin WANG, Feng-hua ZHANG, Xu-min GAO, et al. Freestanding non-periodic GaN gratings in visible wavelength region[J]. Optics and precision engineering, 2017, 25(12): 3020-3026. DOI： 10.3788/OPE.20172512.3020.

摘要

基于严格耦合波理论，提出了一种在可见光波段能调控入射光相位的非周期悬空氮化镓（GaN）薄膜光栅。首先，采用有限差分时域（FDTD）方法，通过改变光栅的周期、占空比等参数仿真计算非周期悬空GaN薄膜光栅的光响应。然后，采用双面加工工艺和氮化物背后减薄技术在硅基GaN晶圆上制备非周期悬空GaN薄膜光栅，控制入射光束的相移。最后，通过角分辨微反射谱实验和光致发光测量实验表征了该薄膜光栅的光学性能。角分辨微反射谱实验结果显示非周期悬空GaN薄膜光栅的光学性能与FDTD的理论分析一致；光致发光测量实验显示其光致发光（PL）强度比硅衬底GaN光栅大大增强，峰值从364.3 nm转移到378.7 nm。另外，在可见光波段内，该悬空非周期GaN光栅有较大的入射角容忍度，为-25°~25°。得到的结果表明，研制的悬空非周期GaN光栅有助于提高光提取效率。

Abstract

On the basis of Rigorous Coupled Wave Analysis(RCWA)

an array of freestanding non-periodic GaN gratings were proposed to control the phase of an incident beam in the visible wavelength region. Firstly

the Finite Difference Time Domain(FDTD) method was used to calculate the optical responses of non-periodic GaN gratings based on the parameters such as period and duty cycle. Then

a double-sided process and nitride back thinning technology were developed to fabricate freestanding non-periodic GaN gratings on a GaN-on-silicon platformand to control the different phase shifts of incident light. Finally

the optical performance of non-periodic GaN gratings was experimentally demonstrated by angular resolved micro-reflectance spectra and photoluminescence spectra. The angular resolved micro-reflectance spectra show that the optical performance of the freestanding non-periodic GaN gratings is in good agreement with that of the theoretical simulations by the FDTD method. The photoluminescence spectra indicate that photoluminescence (PL) intensities of the GaN gratings are greatly improved as compared to that of the GaN-on-silicon

and their emission peaks are from 364.3nm to 378.7nm. Moreover

experimental results give that the incident angular tolerance of the GaN gratings is -25°-25° in the visible wavelength region. In conclusion

the gratings are helpful for the improvement of the light extraction efficiency.

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references

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