光栅复制拼接光路中入射光角度对拼接误差的影响

丛敏; 齐向东; 糜小涛; 于海利; 李晓天; 卢禹先

doi:10.3788/OPE.20172512.3027

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光栅复制拼接光路中入射光角度对拼接误差的影响

光栅微纳制造 | 更新时间：2020-07-07

- 光栅复制拼接光路中入射光角度对拼接误差的影响
- Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic
- 光学精密工程 2017年25卷第12期页码：3027-3033
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2.中国科学院大学, 北京 100049
- 作者简介：
  
  [ "丛敏(1991-), 女, 吉林人, 博士研究生, 主要从事光栅拼接方面的研究。E-mail:695861544@qq.com" ]
  [ "齐向东(1965-), 男, 吉林辽源人, 研究员, 博士生导师, 主要从事光栅刻划机及衍射光栅研制方面的研究。E-mail:chinagrating@263.net" ]
- 基金信息：
  
  国家自然科学基金资助项目(61505204);吉林省青年人才基金资助项目(20170520167JH);国家973重点基础研究计划资助项目(2014CB049500);国家重大科研装备研制项目(ZDYZ2008-1);重大科学仪器设备开发专项(2016YFF0103304);国家重点研发计划(2016YFF0102006)
- DOI：10.3788/OPE.20172512.3027
  中图分类号： O346.1
- 收稿日期：2017-05-23，
  
  录用日期：2017-6-26，
  
  纸质出版日期：2017-12-25
- 稿件说明：
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丛敏, 齐向东, 糜小涛, 等. 光栅复制拼接光路中入射光角度对拼接误差的影响[J]. 光学精密工程, 2017,25(12):3027-3033.

Min CONG, Xiang-dong QI, Xiao-tao MI, et al. Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic[J]. Optics and precision engineering, 2017, 25(12): 3027-3033.
丛敏, 齐向东, 糜小涛, 等. 光栅复制拼接光路中入射光角度对拼接误差的影响[J]. 光学精密工程, 2017,25(12):3027-3033. DOI： 10.3788/OPE.20172512.3027.

Min CONG, Xiang-dong QI, Xiao-tao MI, et al. Influence of incident light angles on mosaic grating errors in optical path for grating replication and mosaic[J]. Optics and precision engineering, 2017, 25(12): 3027-3033. DOI： 10.3788/OPE.20172512.3027.

摘要

设计了一种基于干涉检验法的复制拼接光栅测量光路。针对光栅复制拼接光路中入射光角度难以精确测量的问题，分析了光栅拼接实验中入射光角度对光栅拼接的影响。建立了光栅拼接误差模型，分析了五维拼接误差的容限要求。按照光栅复制拼接光路的要求，设计了一种干涉仪角度调节装置。根据误差模型和拼接光路分析了500 mm×500 mm大尺寸中阶梯光栅复制拼接光路中入射光角度误差与拼接误差的关系。结果显示：入射光角度误差为1°，拼接光路中绕

轴，

轴的转动误差Δ

，Δ

和沿

轴的位移误差Δ

的计算值与实际值之间分别相差0.002 1

rad，0.003 3

rad和0.348 2 nm时，引起波前差为2.590 1 nm。根据这一计算结果，给出了干涉仪角度调节装置的设计指标，即设置角度调节分度为0.1°时，可满足大尺寸光栅复制拼接要求。

Abstract

A measuring path for grating replication and mosaic was designed based on interferometric method. In consideration of the difficulty of measuring incident light angles in the optical path for grating replication and mosaic

the influence of the angle error of the incident light on the grating replication and mosaic was analyzed. A mathematical model of mosaic grating errors was established

and the tolerance of the mosaic grating errors was given. According the requirement of incident light angle in the optical path for grating replication and mosaic

an angle adjustment structure of the interferometer was designed. On the basis of error mathematical model and the mosaic path

the relation between the incident angle error and the mosaic grating errors was analyzed for a 5 000 mm×500 mm large echelle grating. The results show that when the incident angle error is 1°

and the differences of calculation value and actual value for the Δ

(mosaic grating errors around the

axes) are 0.002 1

rad

0.003 3

rad

0.348 2 nm

respectively

the wavefront error is 2.590 1 nm. Accroding to the calculation and analysis

it shows that the angle adjustment structure of the interferometer needs a dividing plate of 0.1° as the min measuring range

which can meet the requirement of the grating mosaic.

关键词

Keywords

references

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