深紫外倍频用KBBF晶体光栅耦合器设计

谭鑫; 张嘉航; 巴音贺希格

doi:10.3788/OPE.20172512.3041

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深紫外倍频用KBBF晶体光栅耦合器设计

光栅微纳制造 | 更新时间：2020-07-07

- 深紫外倍频用KBBF晶体光栅耦合器设计
- Design of KBBF crystal grating coupler in deep ultraviolet band
- 光学精密工程 2017年25卷第12期页码：3041-3047
- 作者机构：
  
  1.中国科学院长春光学精密机械与物理研究所, 吉林长春 130033
  2.中国科学技术大学, 安徽合肥 230026
- 作者简介：
  
  [ "谭鑫(1981-), 男, 吉林长春人, 博士, 研究员, 博士生导师, 2003年、2008年于中国科学技术大学分别获得学士、博士学位, 主要从事光栅设计制作技术及光学器件微细加工技术的研究。E-mail:xintan_grating@163.com" ]
  [ "巴音贺希格(1962-), 男, 内蒙古鄂尔多斯人, 博士, 研究员, 博士生导师, 2002年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事光栅理论、光栅制作技术及光谱技术的研究。E-mail:bayin888@sina.com" ]
- 基金信息：
  
  国家重大科研装备开发专项(2011YQ120023);国家自然科学基金面上项目(61675197)
- DOI：10.3788/OPE.20172512.3041
  中图分类号： O734.1;TN244
- 收稿日期：2017-05-27，
  
  录用日期：2017-6-28，
  
  纸质出版日期：2017-12-25
- 稿件说明：
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谭鑫, 张嘉航, 巴音贺希格. 深紫外倍频用KBBF晶体光栅耦合器设计[J]. 光学精密工程, 2017,25(12):3041-3047.

Xin TAN, Jia-hang ZHANG, BAYANHESHIGE. Design of KBBF crystal grating coupler in deep ultraviolet band[J]. Optics and precision engineering, 2017, 25(12): 3041-3047.
谭鑫, 张嘉航, 巴音贺希格. 深紫外倍频用KBBF晶体光栅耦合器设计[J]. 光学精密工程, 2017,25(12):3041-3047. DOI： 10.3788/OPE.20172512.3041.

Xin TAN, Jia-hang ZHANG, BAYANHESHIGE. Design of KBBF crystal grating coupler in deep ultraviolet band[J]. Optics and precision engineering, 2017, 25(12): 3041-3047. DOI： 10.3788/OPE.20172512.3041.

摘要

分析了氟硼铍酸钾（KBe

，KBBF）晶体的倍频特性，结合基波光光栅耦合和KBBF晶体内全反射特性设计了新型KBBF晶体光栅耦合器。介绍了KBBF晶体光栅耦合器设计原理。在KBBF晶体表面制作光栅结构，使其衍射级次满足匹配角进而产生倍频光；结合在KBBF晶体内的全反射传输，增大光程，获得高的倍频转化效率。通过计算晶体匹配角、走离角、倍频系数等参数，获得合适的光栅匹配类型。优化设计匹配光栅参数，获得了槽型参数及较高的衍射效率；基于光栅衍射效率与倍频转化率的关系获得了KBBF晶体光栅耦合器的倍频转化率计算公式，并给出它们的适用范围。最后，基于5.2 mm×5.2 mm×1 mm KBBF晶体研制了晶体光栅耦合器，该光栅耦合器能够实现深紫外波段倍频光的输出，总倍频转化效率达到了16.86%

Abstract

The double frequency characteristics of KBe

(KBBF) crystals were analyzed. A new KBBF crystal grating coupler was designed with combination of the base wave grating coupling and the total reflection properties of KBBF crystals. The design principle of KBBF crystal grating coupler was introduced.By etching diffraction grating on the surface of a KBBF crystal

the diffraction order matching with the grating was chosen to generate double frequency. The total reflection in the KBBF crystal was used to increase optical path to obtain higher frequency conversion efficiency. Then

appropriate matching types were put forward by calculating matching angle

walk-off angle

frequency factor and other parameters. And the matched grating parameters were optimized to calculate groove parameters and diffraction efficiency of grating. Moreover

grating coupler frequency conversion formulas were given and their applicable ranges were shown. Finally

crystal grating coupler based on a 5.2 mm×5.2 mm×1 mm KBBF crystal was fabricated

and the results indicate that the grating coupler realizes double frequency outputs in deep ultraviolet waveband and its total frequency conversion efficiency reaches 16.86%.

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references

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