多共振峰圆形光栅滤波器

王永进; 秦川; 高绪敏; 张锋华

doi:10.3788/OPE.20172512.3056

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多共振峰圆形光栅滤波器

光栅微纳制造 | 更新时间：2020-07-07

- 多共振峰圆形光栅滤波器
- Circular grating filters with multiple resonant peaks
- 光学精密工程 2017年25卷第12期页码：3056-3062
- 作者机构：
  
  南京邮电大学 Peter Grünberg研究中心, 江苏南京 210003
- 作者简介：
  
  [ "王永进(1977-), 男, 江苏徐州人, 博士, 教授, 2005年于中科院上海微系统与信息技术研究所获得博士学位, 先后在德国弗莱堡大学、日本东北大学和德国于利希研究中心从事科研工作, 主要从事可见光通信和光传感方面的研究。E-mail:wangyj@njupt.edu.cn" ]
  [ "秦川(1993-), 男, 江苏南京人, 硕士研究生, 2016年于南京邮电大学电子科学与工程学院获得学士学位, 主要从事光学微纳器件的设计和加工。E-mail:qckagome@126.com" ]
- 基金信息：
  
  南京邮电大学科研基金资助项目(KYZZ16-0256);国家重点研究发展计划资助项目(2016YFE0118400);国家自然科学基金资助项目(61322112);国家自然科学基金资助项目(61531166004)
- DOI：10.3788/OPE.20172512.3056
  中图分类号： O436.1;TN305.7
- 收稿日期：2017-05-23，
  
  录用日期：2017-6-19，
  
  纸质出版日期：2017-12-25
- 稿件说明：
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王永进, 秦川, 高绪敏, 等. 多共振峰圆形光栅滤波器[J]. 光学精密工程, 2017,25(12):3056-3062.

Yong-jin WANG, Chuan QIN, Xu-min GAO, et al. Circular grating filters with multiple resonant peaks[J]. Optics and precision engineering, 2017, 25(12): 3056-3062.
王永进, 秦川, 高绪敏, 等. 多共振峰圆形光栅滤波器[J]. 光学精密工程, 2017,25(12):3056-3062. DOI： 10.3788/OPE.20172512.3056.

Yong-jin WANG, Chuan QIN, Xu-min GAO, et al. Circular grating filters with multiple resonant peaks[J]. Optics and precision engineering, 2017, 25(12): 3056-3062. DOI： 10.3788/OPE.20172512.3056.

摘要

提出了一种导模共振圆形光栅滤波器，以实现它在可见光范围内的多波段滤波。理论分析了圆形光栅滤波器在同一入射波偏振条件下形成多个共振峰的原因。通过微纳加工技术在硅基二氧化铪材料上实现了光栅层约为70 nm的圆形光栅薄膜结构。利用一维线性光栅对圆形光栅的反射谱进行了模拟，通过角分辨微纳反射谱测试系统获得了该光栅滤波器在不同入射波偏振条件以及不同入射角时的反射谱。实验表明，在特定的光栅周期以及占空比条件下（如光栅周期350 nm，占空比0.5），当线性偏振光正入射时，该圆形光栅滤波器形成了两个共振峰（505 nm处和575 nm处），与模拟结果基本符合。另外，光栅占空比相同时，随着光栅周期的增加，共振峰会向较长的波段偏移。实验显示：通过设计不同结构的亚波长圆形光栅，可以实现可见光范围内多个特定波段的滤波作用。

Abstract

A guided mode resonant Circular Grating Filter (CGF) was proposed to realize its multiple band filter in the visible light regions. The reason for the formation of multiple resonance peaks in the CGF was analyzed theoretically under the polarization of the same incident beam. The freestanding CGFs with the thickness of 70 nm were realized on HfO

-on-silicon by micro/nano machining technology. An 1D linear grating was used to simulate the reflection spectrum of the circular grating. By changing the polarization conditions and the incidence angle of incident beam

the reflection spectrum of CGF was experimentally obtained by using angular resolved micro reflectometry. Experimental results indicate that the CGF forms two resonant speaks (505 nm and 575 nm) in a specific grating period (350 nm) and a duty cycle (0.5) for the surface-normal linearly polarized incident beam. The result is in great agreement with the theoretical simulations. Furthermore

the resonance peaks will shift to longer bands with the increase of the grating period under the same duty cycle. It concludes that the filtering effect of multiple bands can be realized by designing different subwavelength gratings with different structures.

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references

李业, 张大伟, 王琦, 等.亚波长导模共振滤波器的研究概况[J].光学仪器, 2016, 38(2):185-188.

LI Y, ZHANG D W, WANG Q, et al.. Research progress of sub-wavelength guided-mode resonant filter[J]. Optical Instruments, 2016, 38(2):185-188. (in Chinese)

桑田, 王占山, 吴永刚, 等.亚波长介质光栅导模共振研究[J].光子学报, 2006, 35(5):641-645.

SANG T, WANG ZH SH, WU Y G, et al.. Research on guide-mode resonance for sub-wavelength dielectric grating[J]. Acta Photonica Sinica, 2006, 35(5):641-645. (in Chinese)

DUAN X F, ZHOU G R, HUANG Y Q, et al.. Theoretical analysis and design guideline for focusing subwavelength gratings[J]. Optics Express, 2015, 23(3):2639-2646.

GAO X M, SHI ZH, LI X, et al.. Multiline resonant filters fashioned with different periodic subwavelength gratings[J]. Optics Letters, 2014, 39(23):6660-6663.

FOLEY J M, PHILLIPS J D. Normal incidence narrowband transmission filtering capabilities using symmetry-protected modes of a subwavelength, dielectric grating[J]. Optics Letters, 2015, 40(11):2637-2640.

曹召良, 卢振武, 李凤友, 等.二维抗反射亚波长周期结构光栅的设计分析[J].光学精密工程, 2002, 10(6):537-541.

CAO ZH L, LU ZH W, LI F Y, et al.. Design consideration of two-dimensional anti-reflective subwavelength periodic gratings[J]. Opt. Precision Eng., 2002, 10(6):537-541. (in Chinese)

WANG W, GAO X M, FANG X J, et al.. Transmission properties of Fabry-Pérot filter consisting of silicon-based high-contrast gratings[J]. IEEE Photonics Journal, 2016, 8(1):1-14.

WANG W, ZHU G Y, LIU Q F, et al.. Angle-and polarization-dependent spectral characteristics of circular grating filters[J]. Optics Express, 2016, 24(10):11033-11042.

LUO ZH Y, ZHANG G J, ZHU R D, et al.. Polarizing grating color filters with large acceptance angle and high transmittance[J]. Applied Optics, 2016, 55(1):70-76.

BUET X, DARAN E, BELHARET D, et al.. High angular tolerance and reflectivity with narrow bandwidth cavity-resonator-integrated guided-mode resonance filter[J]. Optics Express, 2012, 20(8):9322-9327.

郑煌晏, 胡芳仁.可见光波段的窄带导模共振滤光片的设计[J].激光技术, 2016, 40(1):118-121.

ZHENG H Y, HU F R. Design of narrowband guided-mode resonance filters in visible wavelength region[J]. Laser Technology, 2016, 40(1):118-121. (in Chinese)

KINTAKA K, MAJIMA T, HATANAKA K, et al.. Polarization-independent guided-mode resonance filter with cross-integrated waveguide resonators[J]. Optics Letters, 2012, 37(15):3264-3266.

DUAN X F, HUANG Y Q, REN X M, et al.. High-efficiency InGaAs/InP photodetector incorporating SOI-based concentric circular subwavelength gratings[J]. IEEE Photonics Technology Letters, 2012, 24(10):863-865.

MA CH L, HUANG Y Q, REN X M. High-numerical-aperture high-reflectivity focusing reflectors using concentric circular high-contrast gratings[J]. Applied Optics, 2015, 54(4):973-978.

WANG ZH H. Influence of duty cycle on resonant wavelength in mode resonance filter[C]. Shanghai Laser Society 2007 Annual Conference , 2007:213-230.

LERMAN G M, GRAJOWER M, YANAI A, et al.. Light transmission through a circular metallic grating under broadband radial and azimuthal polarization illumination[J]. Optics Letters, 2011, 36(20):3972-3974.

DUAN X F, ZHOU G R, HUANG Y Q, et al.. Theoretical analysis and design guideline for focusing subwavelength gratings[J]. Optics Express, 2015, 23(3):2639-2646.

王旭迪, 徐向东, 刘颖, 等. HfO 2 薄膜的离子束刻蚀特性研究[J].光学精密工程, 2004, 12(5):454-458.

WANG X D, XU X D, LIU Y, et al.. Ion beam etching of HfO 2 film[J]. Opt. Precision Eng., 2004, 12(5):454-458. (in Chinese)

MAGNUSSON R. Spectrally dense comb-like filters fashioned with thick guided-mode resonant gratings[J]. Optics Letters, 2012, 37(18):3792-3794.

NIRAULA M, YOON J W, MAGNUSSON R. Mode-coupling mechanisms of resonant transmission filters[J]. Optics Express, 2014, 22(21):25817-25829.

FEHREMBACH A L, GAUTHIER-LAFAYE O, YU K C S, et al.. Measurement and modeling of 2D hexagonal resonant-grating filter performance[J]. Journal of the Optical Society of America A, 2010, 27(7):1535-1540.

PARK C H, YOON Y T, LEE S S. Polarization-independent visible wavelength filter incorporating a symmetric metal-dielectric resonant structure[J]. Optics Express, 2012, 20(21):23769-23777.

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