二维光电水平倾角测量系统

王洪远; 段发阶; 蒋佳佳; 张聪

doi:10.3788/OPE.20172512.3120

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二维光电水平倾角测量系统

现代应用光学 | 更新时间：2020-07-07

- 二维光电水平倾角测量系统
- A two-dimensional photoelectric level inclination measuring system
- 光学精密工程 2017年25卷第12期页码：3120-3127
- 作者机构：
  
  天津大学精密测试技术及仪器国家重点实验室, 天津 300072
- 作者简介：
  
  [ "王洪远(1993-), 男, 黑龙江佳木斯人, 2015年于吉林大学获得学士学位, 主要从事激光及光电测试技术方向研究。E-mail:wanghy6511@.qq.com" ]
  [ "段发阶(1968-), 男, 湖南郴州人, 教授, 博士生导师, 1989年、1992年和1994年于天津大学分别获得学士、硕士和博士学位, 主要从事激光及光电测试技术、光纤传感技术、计算机视觉、仪器智能化、海洋声学探测技术等方向研究。E-mail:fjduan@tju.edu.cn" ]
- 基金信息：
  
  国家重点研发计划资助项目(2017YFF0204800);国家863计划资助项目(2013AA102402);国家自然科学基金资助项目(61501319);天津市自然科学基金资助项目(17JCQNJC01100);光电信息与仪器北京市工程研究中心开放课题资助项目(GD2015007);海洋经济创新发展区域示范项目资助项目(cxsf2014-2);教育部博士基金资助项目(20130032110054);微光机电系统技术教育部重点实验室（天津大学）开放基金资助项目(MOMST2015-7)
- DOI：10.3788/OPE.20172512.3120
  中图分类号： TB922;TH741
- 收稿日期：2017-05-27，
  
  录用日期：2017-6-26，
  
  纸质出版日期：2017-12-25
- 稿件说明：
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王洪远, 段发阶, 蒋佳佳, 等. 二维光电水平倾角测量系统[J]. 光学精密工程, 2017,25(12):3120-3127.

Hong-yuan WANG, Fa-jie DUAN, Jia-jia JIANG, et al. A two-dimensional photoelectric level inclination measuring system[J]. Optics and precision engineering, 2017, 25(12): 3120-3127.
王洪远, 段发阶, 蒋佳佳, 等. 二维光电水平倾角测量系统[J]. 光学精密工程, 2017,25(12):3120-3127. DOI： 10.3788/OPE.20172512.3120.

Hong-yuan WANG, Fa-jie DUAN, Jia-jia JIANG, et al. A two-dimensional photoelectric level inclination measuring system[J]. Optics and precision engineering, 2017, 25(12): 3120-3127. DOI： 10.3788/OPE.20172512.3120.

摘要

针对高端装备制造中对大尺度机床误差测量与补偿的要求，本文基于光学自准直原理和液体表面反射原理，研制了一种二维光电水平倾角测量系统以实现对机床滚转角和俯仰角的测量。该系统使用半导体激光器发射激光，经光学自准直系统于待测硅油表面将被测倾角放大二倍。然后，由位置敏感探测器感测光斑位置变化，输出包含角度信息的光电流信号，并由低噪声四路同步微弱信号处理电路进行相同倍数的放大以减小误差。最终，由高速采集卡进行数据采集，经均值滤波、曲线拟合、解算处理后将其转化为倾角信息，从而实现二维角度测量。在光学平台进行了对比实验，结果表明：测量系统在-10~10 mm/m（约为-2 000"~2 000"）量程内，角度测量误差小于±0.050 mm/m（约为±10"），线性度优于0.25%，满足大尺度机床二维水平倾角检测对大量程、高精度、高稳定性的要求。

Abstract

For error measurement and error compensation of large-scale machine tools in high-end equipment manufacture

a two-dimensional photoelectric level inclination measuring system was established based on the principle of optical auto-collimation and liquid surface reflection to measure the roll angle and the pitch angle of a machine tool. Firstly

a laser diode was used as a source of the system

and the inclination was doubled on the surface of the silicone oil through an optical auto-collimation system. Then

spot position changes were detected by a position sensitive detector

the photoelectric signal containing angle information was output and the four low noise I-V conversion and consistent amplifying circuits were used to amplify signals and to reduce errors. Finally

a high-speed data acquisition system was used to acquire data and to convert them into inclination information by mean filtering

curve fitting and solution processing to accomplish two-dimensional inclination measuriement. A contrast experiment was performed on an optical platform. The results show that the angle errors are less than ±0.050 mm/m (about ±10") and the linearity exceeds 0.25% within the system measuring range of -10-10 mm/m (about -2 000"-2 000"). It concludes that the system meets the requirements of large range

high precision and high stability and achieves two-dimensional level inclination measurement of large-scale machine tools rapidly.

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references

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