采用分区曝光提高非均匀光照下质心测量信噪比的哈特曼波前传感器

马晓燠; 饶长辉; 饶学军; 杨金生

doi:10.3788/OPE.20172513.0060

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采用分区曝光提高非均匀光照下质心测量信噪比的哈特曼波前传感器

现代应用光学 | 更新时间：2020-08-13

- 采用分区曝光提高非均匀光照下质心测量信噪比的哈特曼波前传感器
- Hartmann wavefront sensor for improving SNR of centroid measurement under non-uniform illumination using zone-sharing exposure
- 光学精密工程 2017年25卷第10s期页码：60-65
- 作者机构：
  
  1. 中国科学院自适应光学重点实验室,四川成都,610209
  2. 中国科学院光电技术研究所,四川成都,610209
- 作者简介：
- 基金信息：
  
  中科院西部之光A类人才项目()
- DOI：10.3788/OPE.20172513.0060
  中图分类号： P427.1;TP212.6
- 收稿日期：2017-06-01，
  
  修回日期：2017-07-01，
  
  纸质出版日期：2017-11-25
- 稿件说明：
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马晓燠, 饶长辉, 饶学军等. 采用分区曝光提高非均匀光照下质心测量信噪比的哈特曼波前传感器[J]. 光学精密工程, 2017,25(10s): 60-65

MA Xiao-yu, RAO Chang-hui, RAO Xue-jun etc. Hartmann wavefront sensor for improving SNR of centroid measurement under non-uniform illumination using zone-sharing exposure[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 60-65
马晓燠, 饶长辉, 饶学军等. 采用分区曝光提高非均匀光照下质心测量信噪比的哈特曼波前传感器[J]. 光学精密工程, 2017,25(10s): 60-65 DOI： 10.3788/OPE.20172513.0060.

MA Xiao-yu, RAO Chang-hui, RAO Xue-jun etc. Hartmann wavefront sensor for improving SNR of centroid measurement under non-uniform illumination using zone-sharing exposure[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 60-65 DOI： 10.3788/OPE.20172513.0060.

摘要

为了降低非均匀光照明对哈特曼波前传感器波前测量精度的影响，分析了哈特曼波前传感器绝对标定原理和质心测量误差与信号光能量的关系，提出了对哈特曼波前传感器分区曝光的方法。该方法在被测波前为静态波前的条件下，通过对哈特曼波前传感器不同子孔径区域设置不同的曝光时间，来提高单个子孔径内光斑质心测量的信噪比。最后，针对哈特曼波前传感器绝对定标的35×35个子孔径进行分区曝光，仿真结果表明，单个子孔径内的质心误差降低至0.1 pixel内。分区曝光的方法可以有效降低非均匀光照下子孔径内光斑的质心测量误差，从而提高哈特曼波前传感器在非均匀光照时的波前测量精度。

Abstract

In order to reduce the influence of non-uniform illumination on the wavefront measurement accuracy of Hartmann wavefront sensor

the absolute calibration principle of Hartmann wavefront sensor as well as the relationship between the centroid measurement error and the signal light energy were analyzed

then a method for zone-sharing exposure of Hartmann wavefront sensor was proposed. Under the condition of a static wavefront

the signal-to-noise ratio of centroid measurement in a single subaperture was improved by setting different exposure time for different subaperture regions of the Hartmann wavefront sensor. Finally

the 35×35 sub apertures used for absolute calibration of the Hartmann wavefront sensor was exposed as zone-sharing exposure. Simulation results show that the centroid measurement error within a single sub aperture is reduced to 0.1 pixel. The method of divisional exposure can effectively reduce the centroid measurement error of the spot in non-uniform illumination

thus improving the accuracy of the Hartmann wavefront sensor in non-uniform illumination.

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Keywords

references

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