物体表面非接触式高精度瑕疵检测与三维重建

宋丽梅; 魏泽; 杨燕罡; 郭庆华; 习江涛

doi:10.3788/OPE.20172513.0087

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物体表面非接触式高精度瑕疵检测与三维重建

现代应用光学 | 更新时间：2020-08-13

- 物体表面非接触式高精度瑕疵检测与三维重建
- Non-contact high-precision defect detection and 3D reconstruction of object surface
- 光学精密工程 2017年25卷第10s期页码：87-94
- 作者机构：
  
  1. 天津工业大学电工电能新技术天津市重点实验室天津,300387
  2. 天津职业技术师范大学机械工程学院天津,300222
  3. 伍伦贡大学计算机、电气工程与通信工程学院,澳大利亚,2500
- 作者简介：
- 基金信息：
  
  精密测试技术及仪器国家重点实验室开放基金资助项目(pilab1801)
- DOI：10.3788/OPE.20172513.0087
  中图分类号： TP391.41
- 收稿日期：2017-04-28，
  
  修回日期：2017-06-19，
  
  纸质出版日期：2017-11-25
- 稿件说明：
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宋丽梅, 魏泽, 杨燕罡等. 物体表面非接触式高精度瑕疵检测与三维重建[J]. 光学精密工程, 2017,25(10s): 87-94

SONG Li-mei, WEI Ze, YANG Yan-gang etc. Non-contact high-precision defect detection and 3D reconstruction of object surface[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 87-94
宋丽梅, 魏泽, 杨燕罡等. 物体表面非接触式高精度瑕疵检测与三维重建[J]. 光学精密工程, 2017,25(10s): 87-94 DOI： 10.3788/OPE.20172513.0087.

SONG Li-mei, WEI Ze, YANG Yan-gang etc. Non-contact high-precision defect detection and 3D reconstruction of object surface[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 87-94 DOI： 10.3788/OPE.20172513.0087.

摘要

针对光学器件表面非接触、高精度的检测要求，利用光谱共焦原理搭建一套几何精密测量系统，实现显微镜镜头等光学器件表面的瑕疵检测与三维重建。首先，介绍了光谱共焦位移传感器的测量原理。然后结合高精度位移平台搭建了一套物体表面三维扫描系统，分析系统的结构和原理，对采样率造成的光谱共焦位移传感器读数不精确问题采用一种基于二分法的自适应方法控制系统采样率，并通过对同一标准量块的重复测量，分析系统的整体测量误差。最后，对测得的点云数据进行三维重建，得到待测显微镜镜头的三维曲面模型。实验结果表明，该方法实现了对透明曲面的微米级测量，并在曲面梯度变化较大的边缘部分仍有较好的测量结果，测量最大误差为0.624

m，平均误差为0.167

m，测量不确定度为0.633

m。实现了显微镜镜头表面的高精度测量，对镜头表面存在的微小瑕疵可以实现形貌和大小的分析，能够得到待测镜头表面的精准三维模型。

Abstract

Aimed at the requirement of non-contact and high-precision detection on the surface of optical devices

a set of geometric precision measurement system was constructed by using the principle of spectral confocal to realize flaw detection and 3D reconstruction on the surface of optical devices such as microscope lens and so on.A set of 3D scanning system of object surface was constructed combined with high-precision displacement platform to analyze structure and principle of system after introducing the measurement principle of spectral confocal displacement sensor. A self-adaptive method based on dichotomy was adopted to control sampling rate of system for the problem of inaccurate reading of spectral confocal displacement sensor caused by sampling rate

and overall measurement error of system was analyzed by repeated measurement of the same standard measured mass. Finally

high-precision measurement on the surface of microscope lens was realized. Experimental result shows that the method realizes micro-grade measurement of transparent surfaces

and still has better measurement result in the edges with larger surface gradient change. Maximum error of measurement is 0.624

average error is 0.167

m and uncertainty of measurement is 0.633

m.Analysis of morphology and size can be realized for micro defects existing on the surface of lens and accurate 3D model on the surface of lens to be detected can be obtained.

关键词

Keywords

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