电感-电容式微流体油液检测芯片设计

张洪朋; 滕怀波; 曾霖; 虞子雷

doi:10.3788/OPE.20172513.0104

您当前的位置：

首页 >

文章列表页 >

电感-电容式微流体油液检测芯片设计

微纳技术与精密机械 | 更新时间：2020-08-13

- 电感-电容式微流体油液检测芯片设计
- Design of inductance-capacitance microfluidic oil detection chip
- 光学精密工程 2017年25卷第10s期页码：104-112
- 作者机构：
  
  大连海事大学轮机工程学院, 辽宁大连 116026
- 作者简介：
- 基金信息：
  
  国家自然科学基金资助项目（No.51679022）()
- DOI：10.3788/OPE.20172513.0104
  中图分类号： TH137;TP212.1
- 收稿日期：2017-03-31，
  
  修回日期：2017-04-11，
  
  纸质出版日期：2017-11-25
- 稿件说明：
移动端阅览
张洪朋, 滕怀波, 曾霖等. 电感-电容式微流体油液检测芯片设计[J]. 光学精密工程, 2017,25(10s): 104-112

ZHANG Hong-peng, TENG Huai-bo, ZENG Lin etc. Design of inductance-capacitance microfluidic oil detection chip[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 104-112
张洪朋, 滕怀波, 曾霖等. 电感-电容式微流体油液检测芯片设计[J]. 光学精密工程, 2017,25(10s): 104-112 DOI： 10.3788/OPE.20172513.0104.

ZHANG Hong-peng, TENG Huai-bo, ZENG Lin etc. Design of inductance-capacitance microfluidic oil detection chip[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 104-112 DOI： 10.3788/OPE.20172513.0104.

摘要

为了实现对液压油中多种污染物的检测，设计制作了一种电感-电容式微流体芯片。本文对检测芯片的流道位置、线圈间距和线圈匝数进行了仿真计算，并在所制作的检测芯片上，进行了线圈匝数对污染物检测信号影响规律的实验研究。仿真结果表明：流道位于线圈内孔边缘时电感和电容幅值最大；两平面线圈间的距离越小电感和电容幅值越大；平面线圈匝数增加时，电感幅值逐渐增大，电容幅值逐渐减小。实验结果表明：铁颗粒和铜颗粒的检测电感幅值随着线圈匝数的增加而增大，水和气泡的检测电容幅值随着线圈匝数的增加而减小；电感和电容检测信噪比都是随着线圈匝数的增加而明显降低。线圈匝数为20匝时，铁颗粒、水和气泡的检测信噪比约为60匝时的3.23，8.41和7.34倍，铜颗粒在60匝时的检测信噪比为0。检测芯片的平面线圈匝数为20匝时，对四种污染物的检测信噪比最高。本文设计的微流体检测芯片利用两个平面线圈构成的一个传感器，实现了液压油中铁磁性金属颗粒、非铁磁性金属颗粒、水和空气的区分检测。

Abstract

An inductance-capacitance microfluidic chip was designed and fabricated to detect various pollutants in hydraulic oil. Herein

the position of microchannel

distance of coils and coil turns were simulated. Experiments for studying the influence of coil turns on pollutants detection signal were performed on chip. The results indicate

the inductance and capacitance amplitude are largest when the microchannel is located at the edge of the coil inner hole. The smaller distance between the two coils

the larger inductance and capacitance amplitude are achieved. When coil turns increase

the inductance amplitude increase and the capacitive amplitude decrease gradually. With the increase of coil turns

the inductance amplitude of iron particle and copper particle increase

while the capacitance amplitude of water droplet and air bubble decrease

and inductance and capacitance signal to noise ratio are significantly reduced. When the number of turns is 20

the signal to noise ratio of iron particle

water droplet and air bubble is approximately 3.23

8.41 and 7.34 times of that of 60 turns respectively. The signal to noise ratio of copper particle is 0 at 60 turns. When the coil turns of the detection chip is 20

the detection signal to noise ratio of the four pollutants reaches the maximum. The microfluidic chip designed in this paper can detect ferromagnetic

non-ferromagnetic particles

water droplets and air bubbles in oil by using one sensor made up of two planar coils.

关键词

Keywords

references

蔡祖光. 液压油的性能,作用,污染与防护[J]. 液压与气动, 1997(2):15-18. CAI Z G. Performance, function, pollution and protection of hydraulic oil[J]. Chinese Hydraulics & Pneumatics,1997(2):15-18.(in Chinese)

ZENG L, ZHANG H P, LIU E C, et al.. Research on rapid detection and accounting of small particles in marine hydraulic oil[C]. Key Engineering Materials. Trans Tech Publications, 2015, 645:687-692.

笪靖. 浅谈船舶液压系统的油液监测分析[J]. 交通节能与环保,2016(2):46-48,96. DA J. Oil monitoring analysis in ship hydraulic system[J]. Energy Conservation & Environmental Protection in Transportation, 2016(2):46-48,96. (in Chinese)

孙成杰,丁冬梅,陆沁莹,等. 油液污染度分析在油液监测技术中的应用[J]. 润滑油,2017(1):36-38. SUN CH J, DING D M, LU Q Y, et al.. Application of oil contamination analysis in oil monitoring techniques[J]. Lubricating Oil, 2017(1):36-38. (in Chinese)

董志磊,潘燕,王月行,等.液压油污染度和水分含量在线检测研究[J]. 润滑与密封,2015,40(7):129-132. DONG ZH L, PAN Y, WANG Y X, et al.. Study on continuous measurements of contaminant level and water content in hydraulic oil[J]. Lubrication Engineering,2015,40(7):129-132. (in Chinese)

许毅. 液压系统气泡的危害与防治浅析[J]. 液压与气动,2008(3):71-73. XU Y. Supeficially analyzing harm and prevention of hydraulic system's air-bubble[J]. Chinese Hydraulics & Pneumatics, 2008(3):71-73.(in Chinese)

王革,刘东风,石新发. 船舶液压油监测技术研究现状[J]. 润滑油, 2013(4):38-41. WANG G, LIU D, SH X F. Research status of marine hydraulic oil monitoring technology[J]. Lubricating Oil,2013(4):38-41. (in Chinese)

DU L, ZHE J, CARLETTA J, et al.. Real-time monitoring of wear debris in lubrication oil using a microfluidic inductive coulter counting device[J]. Microfluidics and Nanofluidics, 2010, 9(6):1241-1245.

刘恩辰,张洪朋,张鑫睿,等. 双线式螺线管型磨粒传感器设计及其实验研究[J]. 大连海事大学学报,2016(2):102-106,116. LIU E CH, ZHANG H P, ZHANG X R, et al.. Dual-coil solenoid sensor design and its experimental study for wear particles detection[J]. Journal of Dalian Maritime University,2016(2):102-106,116. (in Chinese)

王强. 用于微流体油液检测芯片的电阻检测法[J]. 光学精密工程,2015,23(10z):342-347. WANG Q. Resistance detection method for microfluidic oil detection chip[J]. Opt. Precision Eng., 2015,23(10z):342-347.

ISGOR P K, MARCALI M, KESER M, et al.. Microfluidic droplet content detection using integrated capacitive sensors[J]. Sensors and Actuators B:Chemical, 2015, 210:669-675.

Xiaoliang Z, DU L, ZHE J. An integrated lubricant oil conditioning sensor using signal multiplexing[J]. Journal of Micromechanics and Microengineering, 2015, 25(1):1-1.

IBEN U, WOLF F, FREUDIGMANN H A, et al.. Optical measurements of gas bubbles in oil behind a cavitating micro-orifice flow[J]. Experiments in Fluids, 2015, 56(6):114.

ZHANG H, CHON C H, PAN X, et al.. Methods for counting particles in microfluidic applications[J]. Microfluidics and Nanofluidics, 2009, 7(6):739.

张兴明. 时谐磁场金属颗粒磁化特性及微流体油液检测机理研究[D].大连:大连海事大学,2014. ZHANG X M. Study on Metal Particle Magnetization in Harmonic Field and Mechanism of Microfluidic Oil Detection[D].Dalian:Dalian Maritime University,2014. (in Chinese)

NISHIYAMA H, NAKAMURA M. Capacitance of disk capacitors[J]. IEEE Transactions on Components, Hybrids, and Manufacturing Technology, 1993, 16(3):360-366.

MORGAN H, SUN T, HOLMES D, et al.. Single cell dielectric spectroscopy[J]. Journal of Physics D:Applied Physics, 2007, 40(1):61.

SUN T, MORGAN H. Single-cell microfluidic impedance cytometry:a review[J]. Microfluidics and Nanofluidics, 2010, 8(4):423-444.

刘恩辰. 高精度液压油微小颗粒检测系统[J]. 光学精密工程,2015,23(10z):396-402. LIU E CH. Detection system of small particles in hydraulic oil[J]. Opt. Precision Eng., 2015,23(10z):396-402. (in Chinese)

浏览量

463

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

暂无数据