微光机系统工程设计工具

杨东上; 韩雪冰; 曾议; Jason Clark; 司福祺

doi:10.3788/OPE.20172513.0120

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微光机系统工程设计工具

微纳技术与精密机械 | 更新时间：2020-08-13

- 微光机系统工程设计工具
- Simulation tool for complex-engineered micro-optical electromechanical system
- 光学精密工程 2017年25卷第10s期页码：120-129
- 作者机构：
  
  1. 中国科学院安徽光学精密机械研究所环境光学与技术重点实验室,安徽合肥,230031
  2. 普度大学机械工程系, 印第安纳州,47906
- 作者简介：
- 基金信息：
  
  国家重点研发计划资助项目（No.2016YFC0200400）();国家自然科学基金资助项目（No.41605017）()
- DOI：10.3788/OPE.20172513.0120
  中图分类号： O411.3;TP391.9
- 收稿日期：2017-05-31，
  
  修回日期：2017-06-17，
  
  纸质出版日期：2017-11-25
- 稿件说明：
移动端阅览
杨东上, 韩雪冰, 曾议等. 微光机系统工程设计工具[J]. 光学精密工程, 2017,25(10s): 120-129

YANG Dong-shang, HAN Xue-bing, ZENG Yi etc. Simulation tool for complex-engineered micro-optical electromechanical system[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 120-129
杨东上, 韩雪冰, 曾议等. 微光机系统工程设计工具[J]. 光学精密工程, 2017,25(10s): 120-129 DOI： 10.3788/OPE.20172513.0120.

YANG Dong-shang, HAN Xue-bing, ZENG Yi etc. Simulation tool for complex-engineered micro-optical electromechanical system[J]. Editorial Office of Optics and Precision Engineering, 2017,25(10s): 120-129 DOI： 10.3788/OPE.20172513.0120.

摘要

为提升多物理域耦合的复杂微光机系统设计分析能力，提出了高效的基于系统级构架的设计和建模方法。而使用传统的建模工具在模拟这样的微系统时存在困难，这些工具或是基于分散的单元分析，计算较复杂费时；或基于传统集总单元分析，不易处理代数约束条件。对于系统设计，建立易用的图形用户界面（GUI），允许设计者立体、快速的配置复杂系统。创立功能丰富的网表语言，并将模型与之结合来满足设计的灵活性。应用系统动力学理论，通过能量方程、约束和载荷来表示复杂的、多学科的组件，建立和求解微分代数方程。对桑迪亚国家实验室制作的一个复杂微光机系统进行了有效的建模和计算，系统包括微镜片、齿轮、铰链、滑块、电子元器件、梳状驱动器和挠性梁。结果显示了方法的有效性，说明该方法有利于模拟微光机这样多学科的、含有静态和动态约束的系统。

Abstract

In order to improve the design and analysis ability of complex microsystems with multi-physical domain coupling

an efficient design and modeling method based on system-level structure was presented. In comparison

it was difficult to simulate such kind of microsystem using conventional modeling tools. Such tools were either based on distributed-element analysis

which was time-consuming and too computationally intensive for complex systems

or based on traditional lumped-element analysis

which was limited by an inability to handle algebraic constraints in general. For design

a novel graphical user interface (GUI) was presented. It allowed users to quickly configure complex systems in 3D using a computer mouse or pen at a faster rate than it might be drawn with pencil and paper. The GUI was coupled to a novel and powerful netlist language for design flexibility. For modeling

recent advances in analytical system dynamics and differential-algebraic equations (DAEs) were applied into a framework that facilitates the systematic modeling of multidisciplinary systems that may comprise static or dynamic constraints. For a test case

a complex microsystem fabricated by Sandia National Laboratory (SNL) was efficiently modeled and simulated. This micro optics electro mechanical system comprises mirrors

gears

hinges

a slider

electronic components

comb drives

and electromechanical flexures. The results prove the effectiveness of the method

which presents the netlist language and modeling methodology are beneficial to configure and simulate one of the most complex-engineered micro systems to date.

关键词

Keywords

references

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