二级杠杆柔性铰链复合结构的双足压电直线电机

钟相强; 黄卫清; 张轩; 孙梦馨; 卢倩

doi:10.3788/OPE.20182601.0086

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二级杠杆柔性铰链复合结构的双足压电直线电机

微纳技术与精密机械 | 更新时间：2020-08-13

- 二级杠杆柔性铰链复合结构的双足压电直线电机
- Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure
- 光学精密工程 2018年26卷第1期页码：86-94
- 作者机构：
  
  1.南京航空航天大学机械结构力学及控制国家重点实验室, 江苏南京 210016
  2.安徽工程大学机械与汽车工程学院, 安徽芜湖 241000
- 作者简介：
  
  [ "钟相强(1980-), 男, 山东临沂人, 博士研究生, 副教授, 2003年、2006年于西北农林科技大学分别获得学士、硕士学位, 主要从事压电精密致动技术方面的研究。E-mail:xqzh@nuaa.edu.cn" ]
  [ "黄卫清(1965-), 男, 江苏南通人, 博士, 教授, 博士生导师, 1987年、1990年于南京航空航天大学分别获得学士、硕士学位, 1999年于香港理工大学获得博士学位, 主要从事超声电机技术的研究。E-mail:mehwq@nuaa.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(51375224);安徽高校自然科学研究重点项目(KJ2017A121);江苏高校优势学科建设工程资助项目
- DOI：10.3788/OPE.20182601.0086
  中图分类号： TM359.4;TH112.5;TN384
- 收稿日期：2017-05-09，
  
  录用日期：2017-7-8，
  
  纸质出版日期：2018-01-25
- 稿件说明：
移动端阅览
钟相强, 黄卫清, 张轩, 等. 二级杠杆柔性铰链复合结构的双足压电直线电机[J]. 光学精密工程, 2018,26(1):86-94.

Xiang-qiang ZHONG, Wei-qing HUANG, Xuan ZHANG, et al. Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure[J]. Optics and precision engineering, 2018, 26(1): 86-94.
钟相强, 黄卫清, 张轩, 等. 二级杠杆柔性铰链复合结构的双足压电直线电机[J]. 光学精密工程, 2018,26(1):86-94. DOI： 10.3788/OPE.20182601.0086.

Xiang-qiang ZHONG, Wei-qing HUANG, Xuan ZHANG, et al. Double-foot piezoelectric linear motor with secondary lever and flexure hinge composite structure[J]. Optics and precision engineering, 2018, 26(1): 86-94. DOI： 10.3788/OPE.20182601.0086.

摘要

为实现精密机械装置的快速定位，增加压电直线电机中位移放大结构对压电叠堆输出位移的放大能力，提出了一种基于二级杠杆和柔性铰链复合结构的新型双足压电直线电机。首先，对电机的作动原理进行分析，推导了驱动足轨迹方程。为提高其输出性能，对直圆型柔性铰链的参数进行了优化，得到最佳铰链参数为厚度

=0.2 mm、切割半径

=1 mm和宽度

=10 mm。最后，制作了该电机样机并进行了振幅、速度和负载性能测试，基于正交试验方法对电机速度进行了分析，得出电压对电机速度的影响更灵敏。实验结果表明，驱动足Ⅰ、Ⅱ的位移振幅分别在75 μm和63 μm附近波动，差值约为12 μm；在120 V、110 Hz的信号激励下速度达16.163 mm/s，最大负载能力为1.7 N。与现有的压电直线电机相比较，该电机结构简单，易于安装调试，具有响应快、大振幅、速度大且运行稳定的特点。

Abstract

In order to improve the rapid positioning of precision mechanical devices and the amplification ability of displacement amplification structures for the output displacement of piezoelectric stacks in piezoelectric linear motors

a new kind of double-foot driving piezoelectric linear motor with secondary lever and flexible hinge was proposed. First

the operating principle of the motor was analyzed and the trajectory equation of the driving feet was formulated. Next

the parameters of the straight circular flexure hinge were optimized in order to improve the output performance; the optimal hinge parameters obtained were thickness

=0.2 mm

cutting radius

=1 mm

and width

=10 mm. Finally

the prototype motor was designed

and the amplitude

speed

and load performance were tested. The motor speed was analyzed based on the orthogonal test method; our analysis revealed the sensitivity of the motor speed on the voltage. Our experimental results revealed displacement amplitudes of the driving feet Ⅰ and Ⅱ in the range of 75 μm and 63 μm

respectively

i.e.

the difference is about 12 μm. Furthermore

the speed was observed to reach 16.163 mm/s under a voltage of 120 V and a signal excitation of frequency 110 Hz

and a maximum load capacity of 1.7 N was obtained. Compared with existing piezoelectric linear motors

our motor possesses the advantages of a simple structure

easy installation and debugging

fast response

large amplitude

high speed

and stable operation.

关键词

Keywords

references

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