光学检测下气浮支承的玻璃薄板变形

黄斌; 李程伟; 王晓梦

doi:10.3788/OPE.20182601.0114

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光学检测下气浮支承的玻璃薄板变形

微纳技术与精密机械 | 更新时间：2020-08-13

- 光学检测下气浮支承的玻璃薄板变形
- Deformation of glass sheet supported by gas bearing under optical testing
- 光学精密工程 2018年26卷第1期页码：114-121
- 作者机构：
  
  1.合肥工业大学仪器科学与光电工程学院, 安徽合肥 230009
  2.合肥工业大学智能制造技术研究院, 安徽合肥 230009
- 作者简介：
  
  [ "黄斌(1963-), 男, 安徽合肥人, 博士, 教授, 1983年、2012年于合肥工业大学分别获得学士、博士学位, 主要从事大型光学精密仪器结构设计。气浮系统设计及总体误差理论分析。E-mail:ahhb7310168@163.com" ]
  [ "李程伟(1991-), 男, 安徽安庆人, 硕士研究生, 2015年于安徽理工大学获得学士学位, 主要研究方向为仪器及装备精度保障技术、精密仪器与机械。E-mail:AQLCW0713@163.com" ]
- 基金信息：
  
  国家重大科学仪器设备开发专项资助项目(2013YQ220749)
- DOI：10.3788/OPE.20182601.0114
  中图分类号： TH122;TG65
- 收稿日期：2017-04-28，
  
  录用日期：2017-6-30，
  
  纸质出版日期：2018-01-25
- 稿件说明：
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黄斌, 李程伟, 王晓梦. 光学检测下气浮支承的玻璃薄板变形[J]. 光学精密工程, 2018,26(1):114-121.

Bin HUANG, Cheng-wei LI, Xiao-meng WANG. Deformation of glass sheet supported by gas bearing under optical testing[J]. Optics and precision engineering, 2018, 26(1): 114-121.
黄斌, 李程伟, 王晓梦. 光学检测下气浮支承的玻璃薄板变形[J]. 光学精密工程, 2018,26(1):114-121. DOI： 10.3788/OPE.20182601.0114.

Bin HUANG, Cheng-wei LI, Xiao-meng WANG. Deformation of glass sheet supported by gas bearing under optical testing[J]. Optics and precision engineering, 2018, 26(1): 114-121. DOI： 10.3788/OPE.20182601.0114.

摘要

液晶玻璃基板在线检测过程中对玻璃板在垂直方向上的变形量有严格的要求，为了确定在指标要求光学检测精度下的喷嘴间距。本文基于弹性薄板的小挠度弯曲理论对气浮支承下的液晶玻璃板进行理论分析，推导出液晶玻璃薄板在吹吸喷嘴作用下的最大挠度计算公式，分析得出最大挠度与通孔间距的二次方、载荷集度成正比；通过Fluent对液晶玻璃基板气浮支承系统进行仿真，得到了不同的喷嘴孔间距下的载荷分布以及玻璃基板最大位移处受到载荷的准确值，从满足玻璃板最大位移要求、气膜面的压力分布状况及经济性方面综合考虑得到气膜单元的通孔横向间距范围，给出了采用气浮支承传输的液晶玻璃基板光学检测仪器的喷嘴布置参数，即喷嘴的合理间距应处于20~25 mm之间。

Abstract

There are strict requirements for the deformation of glass plate in the vertical direction in the process of on-line detection of LCD glass substrate. In order to determine the nozzle requirements in index spacing

the theoretical analysis of the LCD glass plate supported by gas suspension was carried out based on the small deflection bending theory of elastic sheet

and the LCD glass sheet maximum deflection formula under the action of the blowing and suction nozzles was derived. The analysis shows that the maximum deflection is proportional to the square of through-hole spacing and degree of load; The load distribution and the maximum displacement of the glass substrate under different nozzle through-hole spacings were obtained by the Fluent simulation on the LCD glass substrate gas suspension system. The maximum displacement of the glass plate

pressure distribution of the gas film surface and economic aspects were considered to obtain the range of the through-hole lateral spacing of the gas film unit. A type of nozzle layout parameter of the optical detection apparatus for the LCD glass substrate using gas suspension transmission was presented; the reasonable nozzle spacing should be between 20 mm and 25 mm.

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