磁悬浮分子泵用Hartley涡流传感器

王坤; 张利胜; 陈少华; 韩邦成

doi:10.3788/OPE.20182602.0344

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磁悬浮分子泵用Hartley涡流传感器

微纳技术与精密机械 | 更新时间：2020-07-05

- 磁悬浮分子泵用Hartley涡流传感器
- Hartley eddy current sensor used in maglev molecular pump
- 光学精密工程 2018年26卷第2期页码：344-354
- 作者机构：
  
  1.北京航空航天大学惯性技术重点实验室新型惯性仪表与导航系统技术国防重点学科实验室, 北京 100191
  2.北京市高速磁悬浮电机技术及应用工程技术研究中心, 北京 100191
  3.北京信息科技大学仪器科学与光电工程学院, 北京 100192
- 作者简介：
  
  [ "王坤(1982-), 男, 黑龙江伊春人, 博士, 硕士生导师, 2007年、2011年于北京航空航天大学分别获得硕士、博士学位, 主要从事精密仪器与机械设计、主动磁悬浮轴承设计、高速电机设计与仿生爬壁机器人的研究。E-mail:wangkunggg@163.com" ]
  [ "张利胜(1993-)，男，河北石家庄人，硕士研究生，2015年于燕山大学获得学士学位，主要从事磁悬浮轴承控制与磁悬浮轴承用位移传感器的研究。E-mail: guitarprozls@163.com" ]
- 基金信息：
  
  国家重大科学仪器设备开发专项(2012YQ040235);光电信息与仪器北京市工程技术研究中心开放基金资助项目(GD2017008)
- DOI：10.3788/OPE.20182602.0344
  中图分类号： TP212.1;TH36
- 收稿日期：2017-08-21，
  
  录用日期：2017-10-9，
  
  纸质出版日期：2018-02-25
- 稿件说明：
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王坤, 张利胜, 陈少华, 等. 磁悬浮分子泵用Hartley涡流传感器[J]. 光学精密工程, 2018,26(2):344-354.

Kun WANG, Li-sheng ZHANG, Shao-hua CHEN, et al. Hartley eddy current sensor used in maglev molecular pump[J]. Optics and precision engineering, 2018, 26(2): 344-354.
王坤, 张利胜, 陈少华, 等. 磁悬浮分子泵用Hartley涡流传感器[J]. 光学精密工程, 2018,26(2):344-354. DOI： 10.3788/OPE.20182602.0344.

Kun WANG, Li-sheng ZHANG, Shao-hua CHEN, et al. Hartley eddy current sensor used in maglev molecular pump[J]. Optics and precision engineering, 2018, 26(2): 344-354. DOI： 10.3788/OPE.20182602.0344.

摘要

工业领域的磁悬浮分子泵用位移传感器除了要具有良好的静态特性外，还应具有高动态响应特性，同时其体积大小还影响着磁悬浮分子泵的抽速、真空度和压缩比。针对高真空磁悬浮分子泵，提出了一种基于Hartley原理的电涡流位移传感器设计方法，将传感器对称探头接入同一振荡电路作为工作电感。对传感器的动态特性进行了分析，并提出了对其动态响应特性在不影响灵敏度和线性度等静态性能的情况下进行补偿的方法。实验结果表明，在-0.4~0.4 mm内，传感器的线性度为±1.17%，灵敏度为9.901 mV/

m，分辨率为0.25%，动态响应带宽达到了10.2 kHz，两径向四路位移信号测量集成电路板体积仅为π×4

，大大减小了传感器体积，满足了磁悬浮分子泵面向更高抽速和更高真空度的发展需求。

Abstract

For the displacement sensor used in maglev molecular pump in the industrial field

in addition to good static characteristic and high dynamic characteristic requirements

its volume also affects the pumping speed

the vacuum and the compression ratio of the maglev molecular pump. Aiming at the high-vacuum maglev molecular pump

a design method of the eddy current displacement sensor (ECDS) based on the Hartley oscillator was proposed. The symmetrical probes were connected into the same oscillation circuit as working inductors. Then the dynamic characteristic of the ECDS was analyzed in detail. And a method to compensate the response bandwidth without affecting the sensitivity and the linearity was put forward. Experimental results indicated that in the measurement range of -0.4-0.4 mm

the linearity came to ±1.17% and the sensitivity achieved 9.901 mV/

the resolution was ±0.25% and the response bandwidth was 10.2 kHz. The volume of the integrated circuit board of the two radial four-way displacement signal was only π×4

which greatly reduced the sensor volume. It can satisfy the requirements of the maglev molecular pump for higher pumping speed and higher vacuum.

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references

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