高精度弓型光纤光栅微位移传感器

谭跃刚; 陈宇佳; 李瑞亚; 毛健; 刘芹

doi:10.3788/OPE.20182603.0556

您当前的位置：

首页 >

文章列表页 >

高精度弓型光纤光栅微位移传感器

现代应用光学 | 更新时间：2020-07-05

- 高精度弓型光纤光栅微位移传感器
- High-precision bow-shaped fiber Bragg grating micro-displacement sensors
- 光学精密工程 2018年26卷第3期页码：556-564
- 作者机构：
  
  武汉理工大学机电工程学院, 湖北武汉 430070
- 作者简介：
  
  [ "谭跃刚(1959-), 男, 教授, 博士生导师, 1983年、1989年于重庆大学分别获得学士、硕士学位, 2005年于武汉理工大学获得博士学位, 主要从事机器人及其控制, 控制理论与应用、机械装备动态监测技术与应用等方面的研究。E-mail:ygtan@whut.edu.cn" ]
  陈宇佳(1992-), 女, 湖北十堰人, 硕士研究生, 2011年于湖北汽车工业学院获得学士学位, 主要从事光纤光栅传感技术以及机床变形测量的研究。E-mail:2319146336@qq.com
- 基金信息：
  
  国家自然科学基金资助项目(51375358)
- DOI：10.3788/OPE.20182603.0556
  中图分类号： TN253
- 收稿日期：2017-06-28，
  
  录用日期：2017-9-12，
  
  纸质出版日期：2018-03-25
- 稿件说明：
移动端阅览
谭跃刚, 陈宇佳, 李瑞亚, 等. 高精度弓型光纤光栅微位移传感器[J]. 光学精密工程, 2018,26(3):556-564.

Yue-gang TAN, Yu-jia CHEN, Rui-ya LI, et al. High-precision bow-shaped fiber Bragg grating micro-displacement sensors[J]. Optics and precision engineering, 2018, 26(3): 556-564.
谭跃刚, 陈宇佳, 李瑞亚, 等. 高精度弓型光纤光栅微位移传感器[J]. 光学精密工程, 2018,26(3):556-564. DOI： 10.3788/OPE.20182603.0556.

Yue-gang TAN, Yu-jia CHEN, Rui-ya LI, et al. High-precision bow-shaped fiber Bragg grating micro-displacement sensors[J]. Optics and precision engineering, 2018, 26(3): 556-564. DOI： 10.3788/OPE.20182603.0556.

摘要

为了测量控机床结构件、微加工工作台的微小变形量，设计了一种高精度弓型光纤布拉格光栅（FBG）微位移传感器。将光纤布拉格光栅的栅区部分粘贴在弓型上下壁处，当弓形件发生变形时，可测出上下壁的应变值，从而测得位移值并进行温度解耦。实验结果表明，在量程为1 mm时，传感器的灵敏度为2.02 pm/

m，线性相关系数为0.998 3，实验的迟滞误差为4.08%，重复性误差为4.08%。在温度补偿实验中可以看出，当温度上升1℃，波长漂移量不到1 pm。类似于弓型结构衍生出一种半弓型结构的位移传感器。两类传感器相比，弓型传感器的温度灵敏度比半弓型传感器小0.001 5 pm/

m，温度补偿效果更好；但半弓型传感器的线性度为0.4%，线性度比弓型传感器好。两种传感器均满足测量值稳定可靠、精度高、抗电磁干扰能力强，温度不敏感等要求。

Abstract

In order to realize small deformation measurements of Numerical Control (NC) machine tool structures and micro-processing platforms

a high-precision optical fiber Bragg grating (FBG) micro-displacement-sensor based on a bow shape was designed. The grating region of the FBG was attached to the upper and lower walls of the bow. Hence

the strain value of the upper and lower walls could be measured while the bow was deformed

allowing displacement measurement and achieving temperature decoupling. Experimental results show that in the displacement range of 1 mm

the sensitivity by fitting a straight line is 2.02 pm/

the linearity is 2.92%

the linear correlation coefficient is 0.998 3

the hysteresis error of three groups is 4.08%

and the repeatability error of three groups is 4.08%. A temperature compensation test is presented in addition

showing a wavelength drift of less than 1 pm with a temperature increase of 1℃. Furthermore

a similar half bow structure was derived and compared with the previous bow type in terms of their performance. The comparison shows that the temperature compensation of the bow type is 0.001 5 pm/

which is smaller than that of the half bow type

while the latter has a better static calibration linearity of 0.4%. It satisfies the sensor requirements of stability

higher precision

as well as strong electromagnetic interference resistance and temperature insensitivity.

关键词

Keywords

references

董红磊.精密加工与精密测量技术的发展[J].宇航计测技术, 2008, 28(6):21-22, 26.

DONG H L. Development of the precision finishing and measurement technique[J]. Journal of Astronautic Metrology and Measurement, 2008, 28(6):21-22, 26. (in Chinese)

OTHONOS A, KALLI K, KOHNKE G E. Fiber Bragg gratings:fundamentals and applications in telecommunications and sensing[J]. Physics Today, 2000, 53(5):61-62.

RAO Y J. Recent progress in applications of in-fibre Bragg grating sensors[J]. Optics and Lasers in Engineering, 1999, 31(4):297-324.

赛耀樟, 姜明顺, 隋青美, 等.基于光纤光栅阵列和MVDR算法的声发射定位[J].光学精密工程, 2015, 23(11):3012-3107.

SAI Y ZH, JIANG M SH, SUI Q M, et al.. Acoustic emission location based on FBG array and MVDR algorithm[J]. Opt. Precision Eng., 2015, 23(11):3012-3107. (in Chinese)

赵斌, 仲志成, 林君, 等.基于光纤光栅传感地层应力的监测方法与实验[J].光学精密工程, 2016, 24(10):346-353.

ZHAO B, ZHONG ZH CH, LIN J, et al.. Monitoring method and experiment for stratum stress based on fiber Bragg grating sensing[J]. Opt. Precision Eng., 2016, 24(10):346-353. (in Chinese)

HOREJŠ O, MAREŠ M, NOVOTNY L. Advanced modelling of thermally induced displacements and its implementation into standard CNC controller of horizontal milling center[J]. Procedia CIRP, 2012, 4:67-72.

韦宣, 乐静, 申阿维, 等.用于微动工作台的光纤位移传感器设计[J].传感器与微系统, 2013, 32(1):115-117.

WEI X, YUE J, SHEN A W, et al.. Design of optical fiber displacement sensor for micromotion worktable[J]. Transducer and Microsystem Technologies, 2013, 32(1):115-117. (in Chinese)

ZHAO ZH G, ZHANG Y J, LI CH, et al.. Monitoring of coal mine roadway roof separation based on fiber Bragg grating displacement sensors[J]. International Journal of Rock Mechanics and Mining Sciences, 2015, 74:128-132.

杨秀峰, 于汇, 王鹏, 等.基于杠杆原理的新型光纤光栅微位移传感器[J].光电子·激光, 2010, 21(8):1156-1158.

YANG X F, YU H, WANG P, et al.. A novel micrometric displacement fiber grating sensor based on the principle of lever[J]. Journal of Optoelectronics·Laser, 2010, 21(8):1156-1158. (in Chinese)

SHEN CH Y, ZHONG CH. Novel temperature-insensitive fiber Bragg grating sensor for displacement measurement[J]. Sensors and Actuators A:Physical, 2011, 170(1-2):51-54.

ZHONG CH, SHEN CH Y, CHU J L, et al.. A displacement sensor based on a temperature-insensitive double trapezoidal structure with fiber Bragg grating[J]. IEEE Sensors Journal, 2012, 12(5):1280-1283.

ZHANG Y N, ZHAO Y, WANG Q. Improved design of slow light interferometer and its application in FBG displacement sensor[J]. Sensors and Actuators A:Physical, 2014, 214:168-174.

CHEN SH M, LIU Y, LIU X X, et al.. Self-compensating displacement sensor based on hydramatic structured transducer and fiber Bragg grating[J]. Photonic Sensors, 2015, 5(4):351-356.

TAO S C, DONG X P, LAI B W. Temperature-insensitive fiber Bragg grating displacement sensor based on a thin-wall ring[J]. Optics Communications, 2016, 372:44-48.

郭永兴, 熊丽, 孔建益, 等.滑动式光纤布拉格光栅位移传感器[J].光学精密工程, 2017, 25(1):50-58.

GUO Y X, XIONG L, KONG J Y, et al.. Sliding type fiber Bragg grating displacement sensor[J]. Opt. Precision Eng., 2017, 25(1):50-58. (in Chinese)

李天梁, 谭跃刚, 张翔, 等.受弯件上粘贴型光纤布拉格光栅的应变传递规律[J].光学精密工程, 2015, 23(5):1254-1264.

LI T L, TAN Y G, ZHANG X, et al.. Strain transfer factors of pasted FBG on bending part surface[J]. Opt. Precision Eng., 2015, 23(5):1254-1264. (in Chinese)

浏览量

478

下载量

CSCD

文章被引用时，请邮件提醒。

提交

工具集

关联资源

基于应变增敏的双层十字型FBG触觉感知单元

温度不敏感的光纤双腔盐度传感器

基于光纤布拉格光栅的扑翼机器人三维扑动变形测量

基于单光子探测的光子计数光时域反射仪研究进展

基于多孔式敏感膜片的MEMS光纤珐珀传感器及其局部放电检测