X轴分离式高速原子力显微镜系统设计

刘璐; 胡晓东; 庞海; 胡小唐

doi:10.3788/OPE.20182603.0662

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X轴分离式高速原子力显微镜系统设计

微纳技术与精密机械 | 更新时间：2020-07-05

- X轴分离式高速原子力显微镜系统设计
- Design of high-speed atomic force microscope with a separated X-scanner
- 光学精密工程 2018年26卷第3期页码：662-671
- 作者机构：
  
  1.天津大学精密仪器与光电子工程学院精密测试技术及仪器国家重点实验室, 天津 300072
  2.天津大学理学院, 天津 300072
- 作者简介：
  
  [ "刘璐(1991-), 女, 山东菏泽人, 博士研究生, 2011年和2014年先后在兰州理工大学和天津大学获得学士、硕士学位, 主要从事原子力显微镜的硬件开发工作。E-mail:dgliulu@tju.edu.cn" ]
  [ "胡晓东(1974-), 男, 江西新余人, 教授, 分别于1995年和2000年在天津大学获得学士、博士学位, 主要从事微纳测试技术研究及仪器化工作。E-mail:xdhu@tju.edu.cn" ]
- 基金信息：
  
  国家自然科学基金资助项目(61204117);国家重点研发计划资助项目(2017YFF0105905)
- DOI：10.3788/OPE.20182603.0662
  中图分类号： TP394.1;TH691.9
- 收稿日期：2017-06-23，
  
  录用日期：2017-8-26，
  
  纸质出版日期：2018-03-25
- 稿件说明：
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刘璐, 胡晓东, 庞海, 等. X轴分离式高速原子力显微镜系统设计[J]. 光学精密工程, 2018,26(3):662-671.

Lu LIU, Xiao-dong HU, Hai PANG, et al. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and precision engineering, 2018, 26(3): 662-671.
刘璐, 胡晓东, 庞海, 等. X轴分离式高速原子力显微镜系统设计[J]. 光学精密工程, 2018,26(3):662-671. DOI： 10.3788/OPE.20182603.0662.

Lu LIU, Xiao-dong HU, Hai PANG, et al. Design of high-speed atomic force microscope with a separated X-scanner[J]. Optics and precision engineering, 2018, 26(3): 662-671. DOI： 10.3788/OPE.20182603.0662.

摘要

为了提高原子力显微镜(Atomic Force Microscope，AFM)的成像速度，本文提出了一种新的AFM结构设计方案并搭建了相应的实验系统。在该方案中，

、

扫描器集成于测头内驱动探针进行慢轴扫描和形貌反馈;

扫描器与测头分离，驱动样品做快轴扫描。

扫描器采用高刚性的独立一维纳米位移台，能够承载尺寸和质量较大的样品高速往复运动而不易发生共振; 同时

扫描器的载荷实现最小化，固有频率得以显著提高。为了避免测头的扫描运动引起检测光束与探针相对位置的偏差，设计了一种随动式光杠杆光路; 为了便于装卸探针以及精确调整激光在探针上的反射位置，设计了基于磁力的探针固定装置和相应的光路调节方案。对所搭建的AFM系统的初步测试结果表明，该系统在采用三角波驱动和简单PID控制算法的情况下，可搭载尺寸达数厘米且质量超过10 g的较大样品实现13

m×13

m范围50 Hz行频的高速成像。

Abstract

To increase the imaging rate of atomic force microscope (AFM)

a new AFM structure design was presented. In this structure

the

and

scanners were integrated in the scanning head

which move the probe in the slow-axis and the

-axis

respectively. The

scanner was separated from the head

which moved the sample in the fast-axis. An independent one-dimensional nanopositioning stage was used as the

scanner. Due to its high stiffness

the

scanner could carry relative large samples and scan at a high speed without inducing resonance vibration. Meanwhile

the load of the

scanner was minimized

resulting in higher resonant frequency and hence faster response. A trackable optical lever was used to avoid the shift of the laser spot on the cantilever probe during scanning. A magnetic based probe holder as well as a new adjustment setup were introduced to hold the probe and precisely position it relative to the laser. According to a preliminary test

the AFM system established in this work can realize high speed imaging for the sample with centimeters dimensions and mass above 10 g. The scanning speed (line frequency) achieves 50 Hz@13

m with linear driving and simple PID control algorithm.

关键词

Keywords

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