大口径非球面系统的共基准加工与检验

王孝坤; 薛栋林; 张学军

doi:10.3788/OPE.20182604.0743

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大口径非球面系统的共基准加工与检验

现代应用光学 | 更新时间：2020-07-05

- 大口径非球面系统的共基准加工与检验
- Fabrication and testing of large aspheric system based on common reference
- 光学精密工程 2018年26卷第4期页码：743-748
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室, 吉林长春 130033
- 作者简介：
  
  [ "王孝坤(1980-), 男, 江苏丹阳人, 研究员, 博士生导师, 2003年于江苏师范大学获得学士学位, 2008年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事光学制造与测试技术的研究。E-mail:jimwxk@sohu.com" ]
  [ "薛栋林(1979-), 男, 江苏靖江人, 研究员, 博士生导师, 2001年于长春理工大学获得学士学位, 2006年于中国科学院长春光学精密机械与物理研究所获得博士学位, 主要从事光学总体设计与分析技术的研究。Email:xuedl@ciomp.ac.cn" ]
- 基金信息：
  
  国家自然科学基金重点项目(61036015)
- DOI：10.3788/OPE.20182604.0743
  中图分类号： TN305.2;O436.1
- 收稿日期：2017-10-09，
  
  录用日期：2017-11-24，
  
  纸质出版日期：2018-04-25
- 稿件说明：
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王孝坤, 薛栋林, 张学军. 大口径非球面系统的共基准加工与检验[J]. 光学精密工程, 2018,26(4):743-748.

Xiao-kun WANG, Dong-lin XUE, Xue-jun ZHANG. Fabrication and testing of large aspheric system based on common reference[J]. Optics and precision engineering, 2018, 26(4): 743-748.
王孝坤, 薛栋林, 张学军. 大口径非球面系统的共基准加工与检验[J]. 光学精密工程, 2018,26(4):743-748. DOI： 10.3788/OPE.20182604.0743.

Xiao-kun WANG, Dong-lin XUE, Xue-jun ZHANG. Fabrication and testing of large aspheric system based on common reference[J]. Optics and precision engineering, 2018, 26(4): 743-748. DOI： 10.3788/OPE.20182604.0743.

摘要

针对大口径离轴非球面系统加工与装调的难点，提出了非球面光学系统共基准加工与检测的方法，对该方法的基本原理和实现过程进行了分析和研究。当光学系统的主镜和第三镜面形的RMS值优于λ/10（λ=632.8 nm）时，对主镜和第三镜进行共基准装调和测试，并进行背板一体化装嵌，然后利用离子束对其进行一体化共基准加工。结合工程实例，对一大口径非球面系统口径为724 mm×247 mm的非球面主镜和口径为632 mm×205 mm的第三镜进行了共基准加工与检测，最终利用离子束共基准一体化精抛光得到主镜和第三镜面形的RMS值分别为0.019λ和0.017λ，满足光学成像。

Abstract

A key technology for fabricating and testing three mirror astigmatism (TMA) was proposed based on a common reference

to overcome the difficulty of manufacturing and aligning large off-axis aspheric systems. The analysis and research of the basic principles involved were presented. When the Root Mean Square (RMS) of the surface error of the primary mirror and tertiary mirrors was better than λ/10 (for wavelength λ at 632.8 nm)

the primary and tertiary mirrors were measured and aligned with the common reference and the same supporting back plate

with the two mirrors were then being polished by Ion Beam Figuring (IBF). A large TMA system with primary and tertiary mirror apertures of 724 mm×247 mm and 632 mm×205 mm

respectively was fabricated and tested based on the proposed method. The integrated mirrors were polished by IBF

and the RMSs of the surface error of the primary and tertiary mirrors are 0.019λ and 0.017λ

respectively.

关键词

Keywords

references

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